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Influence of angular acceleration on the dynamic response of the proof mass in the MEMS vibratory gyroscope model

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Abstract

The paper studies the influence of the parameters of the rotational motion on the resonant frequency in the mechanical structure of the MEMS vibratory gyroscope (MVG). This working frequency is the important parameter impacting the quality factor of the MVGs. The result shows that the angular velocity impacts significantly the resonant frequency of the mechanical system in MVG. The frequencies reduce 57% when increasing angular velocity 7 times while there is little influence of the angular acceleration on it. The driving and sensing frequency of the mechanical system is almost stable with the variability of angular acceleration. Therefore, in cases of higher resonant frequencies than the parameters of rotational motion, they can be neglected in the expression describing the working frequency of the MVGs.

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Authors and Affiliations

  1. Le Quy Don Technical University, Hanoi, Vietnam

    Vu Van The

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  1. Vu Van The
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Correspondence to Vu Van The.

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Technical Editor: Ehsan Noroozinejad Farsangi.

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Van The, V. Influence of angular acceleration on the dynamic response of the proof mass in the MEMS vibratory gyroscope model. J Braz. Soc. Mech. Sci. Eng. 45, 29 (2023). https://doi.org/10.1007/s40430-022-03970-5

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