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Study on a vibratory tri-axis MEMS gyroscope with single drive and multiple axes angular rate sense

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Abstract

In this paper a vibratory tri-axis gyroscope with single drive and three axes angular rate sense is presented. Firstly the structural design is proposed. And based on the modal analysis of this structure the operating principle of gyroscope is explained. Secondly the detail design of this gyroscope is presented. Based on simulation, the performance of the gyroscope is evaluated, the character of structural coupling among the drive and sense modes is studied. Thirdly the SOI fabrication process for this gyroscope is described. Fourthly the circuitry design including AGC and PLL is discussed, and the signal process is described in detail. Finally the implementation of this gyroscope is presented. Experiment results show the performance of the gyroscope. The scale factors are −0.0078 V/°/s, −0.0043 V/°/s and −0.0049 V/°/s along X-, Y- and Z-axis respectively. And experiment results also indicate the character of structural coupling among the drive and sense modes similar with the results of simulation.

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Authors and Affiliations

  1. Beijing Institute of Aerospace Control Instrument, 100094, Beijing, China

    Zhang Tingkai, Xing Chaoyang, Zhang Ling & Wang Wei

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  1. Zhang Tingkai
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  2. Xing Chaoyang
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  3. Zhang Ling
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  4. Wang Wei
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Correspondence to Zhang Tingkai.

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Tingkai, Z., Chaoyang, X., Ling, Z. et al. Study on a vibratory tri-axis MEMS gyroscope with single drive and multiple axes angular rate sense. Microsyst Technol 21, 2145–2154 (2015). https://doi.org/10.1007/s00542-014-2313-6

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  • DOI: https://doi.org/10.1007/s00542-014-2313-6

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