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The early development of synchrotron white-beam X-ray topography analysis for crystal investigations at Pohang light source-II

  • Original Paper - Cross-Disciplinary Physics and Related Areas of Science and Technology
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Abstract

Given the limitations imposed by the physical properties of silicon semiconductors, various wide-bandgap-based semiconductor materials are being actively developed and utilized. Also, the use of crystalline materials such as diamond has been increasing in recent years. An understanding of crystal quality and the extent of internal defects is becoming increasingly important for the development and application of such crystalline materials. X-ray topography (XRT) nondestructively yields information on crystal surfaces and internal defects. In particular, XRT using synchrotron X-rays quickly provides high-resolution images of defects in single crystals. Here, we confirmed the utility of synchrotron white-beam XRT (SWXRT). We established the technique and used it to evaluate the characteristics of a representative, wide-bandgap-based semiconductor material. The SWXRT installed in the 9D beamline of the Pohang accelerator laboratory has an eight-axis sample stage and three-axis detector motion and thus defects in wafers several inches in size in various XRT measurement modes. The SWXRT device not only accepts analog X-ray film, but also yields large-area panel images and data for high-resolution X-ray cameras. We used high-resolution X-ray film and a digital detector to rapidly acquire and analyze the diffraction image of the SiC substrate, which is a representative single-crystal power semiconductor. We expect the quality and defect information of various monocrystalline materials to increase in the near future.

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Acknowledgements

We thank Ms. Jin-A Kim of Pohang Accelerator Laboratory and Mr. Hyun Wook Park of WIZsystem for conducting the experiments and sharing experience in SWXRT. This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (No. 2021R1C1C1010187 and No. 2021R1F1A1063106) and experiments at PLS-II 9D beamline were supported in part by MSIT and POSTECH.

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Author notes

  1. Ho Jae Kwak and Kangwoo Ahn have contributed equally to this work.

Authors and Affiliations

  1. Pohang Accelerator Laboratory, 80 Jigokro-127-Beongil, Nam-gu, Pohang, Gyeongbuk, Korea

    Ho Jae Kwak, Kangwoo Ahn, Jae-Hong Lim & Jong Hyun Kim

  2. Department of Mechanical Engineering, Pohang University of Science and Technology, 77 Cheongam-Ro. Nam-Gu, Pohang, Gyeongbuk, Korea

    Jong Hyun Kim

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  1. Ho Jae Kwak
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Correspondence to Jong Hyun Kim.

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Kwak, H.J., Ahn, K., Lim, JH. et al. The early development of synchrotron white-beam X-ray topography analysis for crystal investigations at Pohang light source-II. J. Korean Phys. Soc. 82, 985–991 (2023). https://doi.org/10.1007/s40042-023-00740-x

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  • DOI: https://doi.org/10.1007/s40042-023-00740-x

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