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High quality factor tuning fork resonators with various resonance frequencies

  • Original Paper - Condensed Matter
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Abstract

We demonstrate that the designed and fabricated tuning fork resonators have quality factors of about 103–104 in the diverse frequency range from 50 Hz to 10 kHz in ambient condition. Metal and ceramic materials such as tantalum, steel, silicon nitride are used as resonator materials for high quality factors with minimal loss of mechanical energy. Resonators of various sizes with a tuning fork shape are realized by metal 3D printing method as well as metal machining process. We show that the increase in crystallinity of the 3D printed PLA tuning fork via annealing leads to an increase in quality factor, by which we confirm that the material to be used as a resonator should be with high crystallinity rather than an amorphous state. In addition, since the quality factor depends on the mass symmetry of both prongs for the case of a tuning fork-type resonator, we improve the quality factor by matching the position and mass of the displacement-sensing accelerometer and the displacement-inducing actuator. The quality factor differences between predicted quality factor and measured one indicate that there are specific defects inside the material used as a resonator, which will be useful when the various-frequency tuning forks are employed as a highly sensitive force sensing resonator in the dynamic force microscopy and spectroscopy.

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References

  1. A. Hajjaj, N. Jaber, S. Ilyas, F. Alfosail, M.I. Younis, Int. J. Non-Linear Mech. 119, 103328 (2020)

    Article  ADS  Google Scholar 

  2. J. Rieger, A. Isacsson, M.J. Seitner, J.P. Kotthaus, E.M. Weig, Nat. Commun. 5, 1 (2014)

    Google Scholar 

  3. P. Ovartchaiyapong, L. Pascal, B. Myers, P. Lauria, A. Bleszynski Jayich, Appl. Phys. Lett. 101, 163505 (2012)

    Article  ADS  Google Scholar 

  4. V.P. Adiga, A. Sumant, S. Suresh, C. Gudeman, O. Auciello, J. Carlisle, R.W. Carpick, Phys. Rev. B 79, 245403 (2009)

    Article  ADS  Google Scholar 

  5. D. Czaplewski, J. Sullivan, T. Friedmann, D. Carr, B. Keeler, J. Wendt, J. Appl. Phys. 97, 023517 (2005)

    Article  ADS  Google Scholar 

  6. S. Liu, Y. Wang, Scanning 32, 61 (2010)

    Article  Google Scholar 

  7. F.J. Giessibl, Rev. Sci. Instrum. 90, 011101 (2019)

    Article  ADS  Google Scholar 

  8. T. Sulchek, R. Hsieh, J. Adams, G. Yaralioglu, S. Minne, C. Quate, J. Cleveland, A. Atalar, D. Adderton, Appl. Phys. Lett. 76, 1473 (2000)

    Article  ADS  Google Scholar 

  9. M. Lee, J.G. Hwang, J. Jahng, Q. Kim, H. Noh, S. An, W. Jhe, J. Appl. Phys. 120, 074503 (2016)

    Article  ADS  Google Scholar 

  10. T. Stowe, K. Yasumura, T. Kenny, D. Botkin, K. Wago, D. Rugar, Appl. Phys. Lett. 71, 288 (1997)

    Article  ADS  Google Scholar 

  11. M. Lee, J. Jahng, K. Kim, W. Jhe, Appl. Phys. Lett. 91, 023117 (2007)

    Article  ADS  Google Scholar 

  12. M. Todorovic, S. Schultz, J. Appl. Phys. 83, 6229 (1998)

    Article  ADS  Google Scholar 

  13. J.-M. Friedt, É. Carry, Am. J. Phys. 75, 415 (2007)

    Article  ADS  Google Scholar 

  14. S. Gürgen, M.C. Kuşhan, W. Li, Prog. Polym. Sci. 75, 48 (2017)

    Article  Google Scholar 

  15. M. Guvendiren, H.D. Lu, J.A. Burdick, Soft Matter 8, 260 (2012)

    Article  ADS  Google Scholar 

  16. S.S. Verbridge, H.G. Craighead, J.M. Parpia, Appl. Phys. Lett. 92, 013112 (2008)

    Article  ADS  Google Scholar 

  17. S.S. Verbridge, R. Ilic, H.G. Craighead, J.M. Parpia, Appl. Phys. Lett. 93, 013101 (2008)

    Article  ADS  Google Scholar 

  18. L. Canale, J. Comtet, A. Niguès, C. Cohen, C. Clanet, A. Siria, L. Bocquet, Phys. Rev. X 9, 041025 (2019)

    Google Scholar 

  19. A. Lainé, L. Jubin, L. Canale, L. Bocquet, A. Siria, S.H. Donaldson, A. Niguès, Nanotechnology 30, 195502 (2019)

    Article  ADS  Google Scholar 

  20. D. Chung, J. Mater. Sci. 36, 5733 (2001)

    Article  ADS  Google Scholar 

  21. H. Hosaka, K. Itao, S. Kuroda, Sens. Actuators A Phys. 49, 87 (1995)

    Article  Google Scholar 

  22. Z. Hao, A. Erbil, F. Ayazi, Sens. Actuators A Phys. 109, 156 (2003)

    Article  Google Scholar 

  23. C. Zener, Phys. Rev. 53, 90 (1938)

    Article  ADS  Google Scholar 

  24. V.B. Braginskiĭ, V.P. Mitrofanov, V.I. Panov, Systems with small dissipation (University of Chicago Press, Chicago, IL, 1985)

    Google Scholar 

  25. M. Blanter, I. Golovin, H. Neuhäuser, H. Sinning, Internal friction in metallic materials: a handbook, Berlin (Springer, Berlin, 2007)

    Book  Google Scholar 

  26. H. Numakura, K. Kashiwazaki, H. Yokoyama, M. Koiwa, J. Alloy. Compd. 310, 344 (2000)

    Article  Google Scholar 

  27. I. Golovin, S. Golovin, J. Phys. IV 6, C8 (1996)

    Google Scholar 

  28. G. Miles, G. Leak, Proc. Phys. Soc. (1958–1967) 78, 1529 (1961)

    Article  ADS  Google Scholar 

  29. R. Schaller, G. Fantozzi, G. Gremaud, “Mechanical Spectroscopy, with Applications to Materials Science”, Proceedings of the Summer School Q-1 2001, ed. by R. Schaller, G. Fantozzi, G. Gremaud, 684 pages, Materials Science Forum, vol. 366–368, Trans Tech Publications, Switzerland (2001)

  30. N. von Windheim, D.W. Collinson, T. Lau, L.C. Brinson, K. Gall, Rapid Prototyp. J 27(7), 1327–1336 (2021)

    Article  Google Scholar 

  31. M.F. Ashby, D. Cebon, J. Phys. IV 3, C7 (1993)

    Google Scholar 

  32. N. Chikkanna, S. Krishnapillai, V. Ramachandran, Int. J. Adv. Manuf. Technol. 119, 1179 (2022)

    Article  Google Scholar 

  33. A.N. Cleland, Foundations of nanomechanics: from solid-state theory to device applications (Springer Berlin, Heidelberg, 2003)

  34. D. Hussain, J. Song, H. Zhang, X. Meng, W. Yongbing, H. Xie, IEEE Sens. J. 17, 2797 (2017)

    Article  ADS  Google Scholar 

  35. J. Zhang, S. O’shea, Sens. Actuators B Chem. 94, 65 (2003)

    Article  Google Scholar 

  36. B.D. Flinn, R.K. Bordia, A. Zimmermann, J. Rödel, J. Eur. Ceram. Soc. 20, 2561 (2000)

    Article  Google Scholar 

  37. B.P. Ng, Y. Zhang, S.W. Kok, Y.C. Soh, Ultramicroscopy 109, 291 (2009)

    Article  Google Scholar 

  38. P. Patimisco, A. Sampaolo, V. Mackowiak, H. Rossmadl, A. Cable, F. K. Tittel, and V. Spagnolo, IEEE Transact. Ultrason. Ferroelectr. Freq. Control 65, 1951 (2018).

  39. S. Schmid, K. Jensen, K. Nielsen, A. Boisen, Phys. Rev. B 84, 165307 (2011)

    Article  ADS  Google Scholar 

  40. K. Rosin, B. Finkelshtein, Dokl. Akad. Nauk SSSR 91, 4 (1953)

    Google Scholar 

  41. J. Snoek, Physica 8, 711 (1941)

    Article  ADS  Google Scholar 

Download references

Acknowledgements

This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIP) (No. 2016R1A3B1908660).

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Authors and Affiliations

  1. Center for 0D Nanofluidics, Institute of Applied Physics, Department of Physics and Astronomy, Seoul National University, Seoul, 08826, Korea

    Chan Young Oh, Jonggeun Hwang & Wonho Jhe

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  1. Chan Young Oh
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  2. Jonggeun Hwang
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  3. Wonho Jhe
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Correspondence to Wonho Jhe.

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Oh, C.Y., Hwang, J. & Jhe, W. High quality factor tuning fork resonators with various resonance frequencies. J. Korean Phys. Soc. 82, 411–419 (2023). https://doi.org/10.1007/s40042-023-00724-x

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