Abstract
The effect of temperature on the elastic, thermophysical and mechanical properties of VNx (0.76 ≤ x ≤ 1.00) epitaxial layers has been investigated using Coulomb and Born–Mayer potentials approach up to second nearest neighbor. The elastic constants and its allied properties (Bulk, Shear, Poisson's ratio and Young’s modulus) are analyzed to provide insights into the mechanical behavior of VNx (0.76 ≤ x ≤ 1.00) transition-metal nitrides using second-order elastic constants (SOECs). SOECs are used to measure the temperature deviation of ultrasonic velocities along the crystal’s z axis. The temperature variation of Debye average velocity and thermal relaxation time are calculated along same orientation. Thermal conductivity has been observed to be the main contributing factor to the temperature-dependent behavior of ultrasonic attenuations with phonon–phonon interaction. Depending on G/B ratios, the nitride groups are attributed to brittle and ductile behavior in the future. Including all epitaxial layers, the estimated melting temperatures are in better agreement with those calculated with B and C11 and have highest strength and highest harness. Transition metal nitrides have unusual chemical and physical properties, which are commonly used in industrial fields that require working at temperatures.
Similar content being viewed by others
References
W.D. Sproul, Surf. Coat. Technol. 86, 170 (1996)
G.M. Matenoglu, L.E. Koutsokeras, Ch.E. Lekka, G. Abadias, C. Kosmidis, G.A. Evangelakis, P. Patsalas, Surf. Coat. Technol. 204, 911 (2009)
N. J. Ashley, E. Robin, and W. Grimes E. Ken, J. McClellan J. Mater Sci.42, 1884 (2007).
C. Sarioglu, Surf. Coat. Technol. 201(3–4), 707 (2006)
M. B. Takeyama, T. Itoi,cK. Satoh, M. Sakagami, and A. Noya, J. Vacuum. Sci. Technol. B 22, 2542 (2004).
X.P. Qu, M. Zhou, T. Chen, Q. Xie, G.P. Ru, B.Z. Li, Microelectron. Eng. 83, 236 (2006)
Q. Sun, Z.W. Fu, Electro. Chim. Acta. 54, 403 (2008)
X. Chu, S.A. Barnett, M.S. Wong, W.D. Sproul, J. Vacuum Sci. Technol. A 14, 3124 (1996)
M. Hebbache, Solid State Commun. 113, 427 (2000)
Z. Ding, S. Zhou, Y. Zhao, Phys. Rev. B 70, 184117 (2004)
S. Ganeshan, S.L. Shang, Y. Wang, Z.-K. Liu, J. Alloys Compound 498, 191 (2010)
M. B. Kanoun, S. Goumri- Said, and A. H. Reshak, Comput. Mater Sci. 47,491 (2009).
B.D. Fulcher, X.Y. Cui, B. Delley, C. Stampfl, Phys. Rev. B 85, 184106 (2012)
R. Sanjines, C. Wiemer, P. Hones, F. Levy, J. Appl. Phys. 83, 1396 (1998)
C. Stampfl, W. Mannstadt, R. Asahi, A.J. Freeman, Phys. Rev. B 63, 155106 (2001)
S. Veprek, M.G.J. Veprek-Heijman, P. Karvankova, J. Prochazka, Thin Solid Films 476, 1 (2005)
S. Veprek, M. Haussmann, S. Reiprich, L. Shizhi, J. Dian, Surf. Coat. Technol. 86–87, 394 (1996)
N. Hirashita, J.E. Greene, U. Helmersson, J. Birch, J.-E. Sundgren, J. Appl. Phys. 70, 4963 (1991)
A.B. Mei, H. Kindlund, E. Broitman, L. Hultm, I. Petrovd, J.E. Greene, D.G. Sangiovanni, Acta Mater. 192, 78 (2020)
K. Brugger, Phys. Rev. 133, A1611 (1964)
P.B. Ghate, Phys. Rev. 139, A1666 (1965)
S. Mori, Y. Hiki, J. Phys. Soc. Jpn. 45, 1449 (1975)
P.K. Yadawa, R.R. Yadav, Multidiscip. Model. Mater. Struct. 5, 59 (2009)
R. Hill, Proc. Phys. Soc., Sec. A 65, 349 (1952).
D. Singh, S. Kaushik, S. Tripathi, V. Bhalla, A.K. Gupta, Arab J. Sci Eng. 39, 485 (2014)
S.F. Pugh, Philos. Mag. 45, 823 (1954)
S. Bhajanker, V. Srivastava, G. Pagare, S.P. Sanyal, J. Phys.: Conf. Ser. 377, 01208037 (2012)
X.Q. Chen, H. Niu, D. Li, Y. Li, Intermetallics 19, 1275 (2011)
M.E. Fine, L.D. Brown, H.L. Marcus, Scripta Metall. 18, 951 (1984)
V. Bhalla, D. Singh, S.K. Jain, International Journal of Computational. Mater. Sci. Eng. 5(3), 1650012 (2016)
W. P. Mason, Academic Press Inc. (1965), p. 237.
W.P. Mason, T.B. Bateman, J. Acoust. Soc. 40, 852 (1966)
D.E. Gray (ed.), AIP Handbook (Mc Graw Hill Co., Inc., New York, IIIrd edition, 1956), p.4
C. Oligschleger, R.O. Jones, S.M. Reimann, H.R. Schober, Phys. Rev. 53(10), 6165 (1996)
Q. Zheng, A.B. Mei, M. Tuteja, D.G. Sangiovanni, L. Hultman, I. Petrov, J.E. Greene, D.G. Cahill, Phys. Rev. Mater. 1, 065002 (2017)
M. Landa, V. Novak, P. Sedlak, P. Sittner, Ultrasonics 42, 519 (2004)
A.B. Mei, R.B. Wilson, D. Li, D.G. Cahill, A. Rockett, J. Birch, L. Hultman, J.E. Greene, I. Petrov, J. Appl. Phys. 115, 214908 (2014)
S.P. Singh, P.K. Yadawa, P.K. Dhawan, A.K. Verma, R.R. Yadav, Cryogenics 100, 105 (2019)
P.K. Yadawa, J. Theor. Appl. Phys. 10, 203 (2016)
D. Singh, P.K. Yadawa, S.K. Sahu, Cryogenics 50, 476 (2010)
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Rai, S., Prajapati, A.K. & Yadawa, P.K. Effect of temperature on elastic, mechanical and thermophysical properties of VNx (0.76 ≤ x ≤ 1.00) epitaxial layers. J. Korean Phys. Soc. 82, 46–56 (2023). https://doi.org/10.1007/s40042-022-00643-3
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s40042-022-00643-3