Abstract
Optical parameters of porous silicon films of doped 100-oriented silicon substrate fabricated by electrochemical etching are investigated. The photoluminescence and ellipsometry measurements were realized under the effect of etching current densities and contact times. The ellipsometry is simulated using a model of multilayer structures that allows the determination of the thickness, refractive index, penetration factor, extinction coefficient, absorption coefficient, and porosity of the silicon (PS) layer. Our results have shown that agreement is obtained between the PL measurements, represented by the integrated PL intensity, together with the FTIR and SEM measurements, represented by the thickness and the porosity of the porous layers, for etching time and varying current density. The absorption coefficient decreased as a function of the current density value with increasing porosity, and the penetration factor is an increasing function with current density. We also note that the data presented in this work are more promising for the development of layers for photovoltaic applications.
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Acknowledgements
The authors are grateful to the Department of Technology, ENSET-Skikda (Algeria), and the Directorate-General for Scientific Research and Technological Development (DGRSDT) for supporting this research by providing the required facilities. The present work is the result of a project PRFU ref (B00L02EN210120200001).
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Salah Rahmouni and Noureddine Boukhanoufa Conceptualization, Methodology and Investigation, Issam Tifouti and Brahim Mariane. Writing- Original draft preparation, Hacene Bendjeffal Reviewing and Editing.
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Rahmouni, S., Boukhanoufa, N., Tifouti, I. et al. Influence of Etching Current Density on the Structural and Optical Properties of Porous Silicon Films Developed For Photovoltaic Applications. Silicon 15, 3261–3268 (2023). https://doi.org/10.1007/s12633-022-02261-x
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DOI: https://doi.org/10.1007/s12633-022-02261-x