Abstract
Recently, increasing power leakage has become a major concern especially in MOSFET based nanoscale devices due to poor gate control. To mitigate these problems, the devices with steep slope, low leakage and power consumption are required. In this context, this work introduced a novel concept of Negative Capacitance (NC) effect with Junctionless Multi Gate FET to investigate various device performance parameters for nanoscale dimensions. The baseline approach of combining LK-equation with Sentaurus TCAD tool, was used to design and optimize a 14nm n-type Negative Capacitance Junctionless FinFET (NC-JL FinFET) with doped HfO2 as gate ferroelectric material for low power applications. The impact of ferroelectric thickness, spacer and gate dielectric was analyzed using extensive device simulations. The results showed that the designed NC-JL FinFET exhibits enhanced performance with steep SS, Negative DIBL, lower leakage current and also higher drive current performance than JL FinFET. Further, the application of strain-engineering in NC-JL FinFET shows 12 % improvement in ION/IOFF as compared to unstrained NC-JL FinFET.
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Acknowledgements
The authors would like to thank the Department of Electronics and Communication Engineering, National Institute of Technology, Hamirpur, Himachal Pradesh, India for providing valuable support to carry out this study in VLSI & Nano Laboratory.
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Design, Methodology, Formal analysis, and investigation, Validation, Writing - original draft preparation: [Shelja Kaushal]; Conceptualization, Resources, Supervision, Writing - review and editing: [Ashwani K. Rana]
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Kaushal, S., Rana, A.K. Negative Capacitance Junctionless FinFET for Low Power Applications: An Innovative Approach. Silicon 14, 6719–6728 (2022). https://doi.org/10.1007/s12633-021-01392-x
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DOI: https://doi.org/10.1007/s12633-021-01392-x