Skip to main content
Log in

Impact of Circular Layout on Characteristics in LSAMBM APD Based on SOI Film

  • Original Paper
  • Published:
Silicon Aims and scope Submit manuscript

Abstract

Lateral separate absorption multi-buffer multiplication avalanche photodiode (LSAMBM APD) with rectangular layout based on SOI film had been investigated as a promising candidate in the high-speed weak-light detection application. In this article, the layout-dependent characteristics of LSAMBM APD were investigated furthermore. Comparing to rectangular layout, the circular layout could shorten the length and improve electric field intensity of absorption region under the same sensitive area. In this way, carriers’ drift velocity could be accelerated, and the photon-generated carriers would be more effectively separated to achieve high responsivity and fast frequency response in LSAMBM APD with circular layout. When the illumination wavelength was 400 nm and input optical power was 0.001 W/cm2, the circular layout could enhance LSAMBM APD to achieve high responsivity and fast frequency response under the reverse bias voltage of 8.11 V and 9.2 V, and reach to 1236.9A/W and 3.2GHz, respectively. All results revealed that the LSAMBM APD with circular layout was more appropriate to high-speed single photon detection systems.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. Lalucaa V, Martin-Gonthier P, Magnan P (2015) Comparison of the 2D and 3D integrated circuit fabrication process for visible imaging SPAD arrays. 2015 IEEE Photonics Conference (IPC), Reston, VA, USA, pp. 442–443. https://doi.org/10.1109/IPCon.2015.7323586

    Book  Google Scholar 

  2. Bergeron M, Thibaudeau C, Cadorette J, Tetrault MA, Pepin CM, Clerk-Lamalice J, Loignon-Houle F, Davies M, Dautet H, Deschamps P, Fontaine R, Lecomte R (2015) LabPET II, an APD-based detector module with PET and counting CT imaging capabilities. IEEE Trans Nucl Sci 62(3):756–765. https://doi.org/10.1109/TNS.2015.2420796

    Article  Google Scholar 

  3. Villa F, Lussana R, Bronzi D, Tisa S, Tosi A, Zappa F, Mora AD, Contini D, Durini D, Weyers S, Brockherde W (2014) CMOS imager with 1024 SPADs and TDCs for single-photon timing and 3-D time-of-flight. IEEE Journal of Selected Topics in Quantum Electronics 20(6):364–373. Art no 3804810, https://doi.org/10.1109/JSTQE.2014.2342197

  4. Beer M, Hosticka BJ, Schrey OM, Brockherde W, Kokozinski R (2017) Range accuracy of SPAD-based time-of-flight sensors. 2017 European Conference on Circuit Theory and Design (ECCTD), Catania, Italy, pp 1–4. https://doi.org/10.1109/ECCTD.2017.8093306

  5. Bretz T, Anderhub H, Backes M, Biland A, Boccone V, Braun I, Buß J, Cadoux F, Commichau V, Djambazov L, Dorner D, Einecke S, Eisenacher D, Gendotti A, Grimm O, von Gunten H, Haller C, Hempfling C, Hildebrand D, Horisberger U, Huber B, Kim K-S, Knoetig ML, Köhne J-H, Krähenbühl T, Krumm B, Lee M, Lorenz E, Lustermann W, Lyard E, Mannheim K, Meharga M, Meier K, Müller S, Montaruli T, Neise D, Nessi-Tedaldi F, Overkemping A-K, Paravac A, Pauss F, Renker D, Rhode W, Ribordy M, Röser U, Stucki J-P, Schneider J, Steinbring T, Temme F, Thaele J, Tobler S, Viertel G, Vogler P, Walter R, Warda K, Weitzel Q, Zänglein M (2013) FACT—the G-APD revolution in Cherenkov astronomy. 2013 IEEE Nuclear Science Symposium and Medical Imaging Conference (2013 NSS/MIC), Seoul, Korea (South), pp 1–8. https://doi.org/10.1109/NSSMIC.2013.6829590

  6. Huang WK, Liu YC, Hsin YM (2008) Bandwidth enhancement in Si photodiode by eliminating slow diffusion photocarriers. Electron Lett 44(4):52–53. https://doi.org/10.1049/el:20082484

    Article  CAS  Google Scholar 

  7. Kang HS, Lee MJ, Choi WY (2007) Si avalanche photodetectors fabricated in standard complementary metal-oxide-semiconductor process. Appl Phys Lett 90(15):63. https://doi.org/10.1063/1.2722028

    Article  CAS  Google Scholar 

  8. Bashkany ZA, Abbas IK, Mahdi MA, Al-Taay HF, Jennings P (2018) A self-powered heterojunction photodetector based on a PBS nanostructure grown on porous silicon substrate. Silicon 10(2):403–411. https://doi.org/10.1007/s12633-016-9462-4

    Article  CAS  Google Scholar 

  9. Cova S, Ghioni M, Zappa F, Tosi A, Rech I, Gulinatti A, Tisa S (2010) Single-photon avalanche detectors for quantum communications. Optical Fiber Communication, IEEE:1–3. https://doi.org/10.1364/OFC.2010.OTuC2

  10. Sullivan W, Beck J, Scritchfield R, Skokan M, Mitra P, Sun XL, Abshire J, Carpenter D, Lane B (2015) Linear-mode HgCdTe avalanche photodiodes for photon-counting applications. J Electron Mater 44(9):3092–3101. https://doi.org/10.1007/s11664-015-3824-3

    Article  CAS  Google Scholar 

  11. Zhang ZH, Sun LJ, Chen M, Qiu XJ, Li B, Jiang H (2020) Separate absorption and multiplication AlGaN solar-blind avalanche photodiodes with high-low-doped and heterostructured charge layer. J Electron Mater 49(4):2343–2348. https://doi.org/10.1007/s11664-020-07950-0

    Article  CAS  Google Scholar 

  12. Wen K, Zhao Y, Gao J, Zhang S, Tu J (2015) Design of a coherent receiver based on InAs Electron avalanche photodiode for free-space optical communications. IEEE Transactions on Electron Devices 62(6):1932–1938. https://doi.org/10.1109/TED.2015.2421895

  13. Sammak A, Aminian M, Nanver LK, Charbon E (2016) CMOS-compatible PureGaB Ge-on-Si APD pixel arrays. IEEE Transactions on Electron Devices 63(1):92–99. https://doi.org/10.1109/TED.2015.2457241

  14. Vignetti MM, Calmon F, Lesieur P, Savoy-Navarro A (2017) Simulation study of a novel 3D SPAD pixel in an advanced FD-SOI technology. Solid State Electron 128:163–171. https://doi.org/10.1016/j.sse.2016.10.014

    Article  CAS  Google Scholar 

  15. Iiyama K, Takamatsu H, Maruyama T (2010) Hole-injection-type and electron-injection-type silicon avalanche photodiodes fabricated by standard 0.18μm CMOS process. IEEE hotonics Technology Letters 22(12):932–934. https://doi.org/10.1109/LPT.2010.2047389

  16. Tseng C, Chen K, Chen W, Lee MM, Na N (2014) A high-speed and low-breakdown-voltage silicon avalanche photodetector. IEEE Photon Technol Lett 26(6):591–594. https://doi.org/10.1109/LPT.2014.2300853

    Article  CAS  Google Scholar 

  17. Xie H, Peng Y, Li J, Wu L (2019) Lateral separate absorption multibuffer multiplication avalanche photodiode based on SOI film. IEEE Trans Electron Devices 66(7):3003–3006. https://doi.org/10.1109/TED.2019.2915336

    Article  CAS  Google Scholar 

  18. Habib MHU, McFarlane N (2017) Breakdown and optical response of CMOS perimeter gated single-photon avalanche diodes. Electron Lett 53(19):1323–1325. https://doi.org/10.1049/el.2017.2485

    Article  CAS  Google Scholar 

  19. Cheong JS, Hayat MM, Zhou X, David JPR (2015) Relating the experimental ionization coefficients in semiconductors to the nonlocal ionization coefficients. IEEE Trans Electron Devices 62(6):1946–1952. https://doi.org/10.1109/TED.2015.2422789

    Article  CAS  Google Scholar 

  20. Nichetti C, Pilotto A, Palestri P, Selmi L, Antonelli M, Arfelli F, Biasiol G, Cautero G, Driussi F, Klein NY, Menk RH, Steinhartova T (2018) An improved nonlocal history-dependent model for gain and noise in avalanche photodiodes based on energy balance equation. IEEE Trans Electron Devices 65(5):1823–1829. https://doi.org/10.1109/TED.2018.2817509

    Article  CAS  Google Scholar 

  21. Zhang M, Wang KL, Jiang H, Hong R, Wu Z (2016) High performance silicon carbide avalanche-p-i-n ultraviolet photodiode with dual operation models. Electron Lett 52(17):1474–1476. https://doi.org/10.1049/EL.2016.2025

    Article  CAS  Google Scholar 

Download references

Acknowledgments

This work was supported by the National Natural Science Foundation of China (Grant no. 61404011), in part by the key projects of Changsha science and technology plan (Grant no. kq1901102), in part by the Scientific Research Fund of Hunan Provincial Education Department (Grant no. 20 K007), and in part by “Double first-class” international cooperation project in scientific research of Changsha University of Science and Technology (Grant no. 2019IC20). We are grateful to Professor Denis Flandre from Université catholique de Louvain for his assistance throughout this study.

Availability of Data and Material

The data sets supporting the results of this article are included within the article.

Code Availability

Not applicable.

Funding

This work was supported by the National Natural Science Foundation of China (Grant no. 61404011), in part by the key projects of Changsha science and technology plan (Grant no. kq1901102), in part by the Scientific Research Fund of Hunan Provincial Education Department (Grant no. 20 K007), and in part by “Double first-class” international cooperation project in scientific research of Changsha University of Science and Technology (Grant no. 2019IC20).

Author information

Authors and Affiliations

Authors

Contributions

All authors contributed to the study conception and design. Model establish, data collection and analysis were performed by Haiqing Xie, Xiya Cai, Junlin Lu and Xinbo Yi. The first draft of the manuscript was written by Haiqing Xie and Gang Liu, and all authors commented on previous versions of the manuscript. All authors read and approved the final manuscript.

Corresponding author

Correspondence to Haiqing Xie.

Ethics declarations

Ethics Approval

This article does not contain any studies with human participants or animals performed by any of the authors. In this research, we did not collect any samples of human and animals.

Consent to Participate

Not applicable.

Consent for Publication

Written informed consent for publication was obtained from all authors.

Conflict of Interest

The authors have no conflicts of interest to declare that are relevant to the content of this article.

Additional information

Publisher’s Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Xie, H., Liu, G., Cai, X. et al. Impact of Circular Layout on Characteristics in LSAMBM APD Based on SOI Film. Silicon 14, 3395–3401 (2022). https://doi.org/10.1007/s12633-021-01104-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12633-021-01104-5

Keywords

Navigation