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LASIE: Large Area Spectroscopic Imaging Ellipsometry for Characterizing Multi-Layered Film Structures

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Abstract

In this investigation, we describe a spectroscopic imaging ellipsometry for large area measurements, named as large area spectroscopic ellipsometry (LASIE). LASIE uses a broadband light source and an imaging spectrometer in order to obtain the spectral-spatial intensity images corresponding to a measurement line of a specimen and it can characterize the 3D multi-film structures with the aid of lateral scanning. Opposed to the typical high resolution imaging ellipsometry with the small field of view (FOV), LASIE uses a low magnification imaging lens to enlarge the measurement area and line profiles of multi-layered film structure can be reconstructed at a single operation based on the operation of the spectroscopic imaging spectrometer. In the experiment, 3- and 4-layered film specimen were measured after the system calibration and the 3D film thickness profiles of all film layers were obtained with 1 nm repeatability.

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Abbreviations

ρ :

the ratio between Fresnel reflection coefficients of p- and s-waves

r :

the Fresnel reflection coefficient

δ :

the phase retardation by film layer

\(\tilde S\) :

Jones matrix of a specimen

Ã:

Jones matrix of an analyzer

\(\tilde P\) :

Jones matrix of a polarizer

x :

spatial line coordinate

λ :

wavelength of an optical source

θ :

rotation angle of a compensator

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Author notes

  1. Dae Hee Kim and Young Ho Yun contributed equally to this work

Authors and Affiliations

  1. Department of Photonic Engineering, Chosun University, 309, Pilmun-daero, Dong-gu, Gwangju, 61452, Republic of Korea

    Dae Hee Kim, Young Ho Yun & Ki-Nam Joo

Authors
  1. Dae Hee Kim
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  2. Young Ho Yun
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  3. Ki-Nam Joo
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Correspondence to Ki-Nam Joo.

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Kim, D.H., Yun, Y.H. & Joo, KN. LASIE: Large Area Spectroscopic Imaging Ellipsometry for Characterizing Multi-Layered Film Structures. Int. J. Precis. Eng. Manuf. 19, 1125–1132 (2018). https://doi.org/10.1007/s12541-018-0133-9

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  • DOI: https://doi.org/10.1007/s12541-018-0133-9

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