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Research on the design of the ultra-high-precision positioning control error compensation

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Abstract

Active researches on milli-structures and micro-machines have been conducted in advanced countries, and micro-machining technology is one of the core items of the researches. The current technical backgrounds of micro-machining can be divided into semiconductor-based machining, such as lithography and etching, and conventional mechanical machining such as cutting, grinding, and electro-spark machining. The former can be limited due to their materials or thickness, and the latter, while having good productivity, suffer from a less-than superior finishing surface. Therefore, the cutting work could be reasonable in terms of superior productivity and a greater degree of freedom. Conventional ultra-high-precision cutting technology can be used for surface machining, but it has not yet been used to produce ultra-fine components. Therefore, researches on the preparation of ultra-highprecision micro-components in three-dimensional spaces with the milling technique using a single crystal diamond bite are underway. In this study, finite element analysis (FEA) was used to determine the safety and control performance of the micro-stage for the design of an elastic-hinge-type stage using a piezo-electric element.

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Abbreviations

Fm:

main cutting force

Fr:

radial/thrust cutting force

Fa:

feed cutting force

N:

shape function

â :

parameter

B :

deformation rate matrix

E:

Young’s modulus

v :

Poisson ratio

σ ij :

stress

ε ij :

deformation rate

f e :

applied force

K e :

element rigidity matrix

a e :

knot parameter

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Authors and Affiliations

  1. Department of Advanced Parts and Materials, Graduate School, Chosun University, 309, Pilmun-daero, Dong-gu, Gwangju, 61452, South Korea

    Dae-Kwang Park

  2. Department of Mechanical System Engineering, Graduate School, Chosun University, 309, Pilmun-daero, Dong-gu, Gwangju, 61452, South Korea

    Gyung-Il Lee & Jia-Chen Gao

  3. Department of Mechanical System Engineering, Chosun University, 309, Pilmun-daero, Dong-gu, Gwangju, 61452, South Korea

    Jae-Yeol Kim

Authors
  1. Dae-Kwang Park
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  2. Gyung-Il Lee
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  3. Jia-Chen Gao
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  4. Jae-Yeol Kim
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Correspondence to Jae-Yeol Kim.

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Park, DK., Lee, GI., Gao, JC. et al. Research on the design of the ultra-high-precision positioning control error compensation. Int. J. Precis. Eng. Manuf. 17, 1351–1358 (2016). https://doi.org/10.1007/s12541-016-0160-3

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  • DOI: https://doi.org/10.1007/s12541-016-0160-3

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