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High-Performance Field-Effect Transistor Fabricated on CVD-Grown MoS2 Monolayers with Indium Contacts

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Abstract

Molybdenum disulfide (MoS2), an emerging two-dimensional semiconductor material, has been keenly studied for field-effect transistors (FETs). In this work, we explored the optical and electrical properties of FETs fabricated by MoS2 flakes grown by chemical vapor deposition (CVD) and transferred to the electrodes through propylene carbonate film. Large-area, high-quality and highly crystalline MoS2 monolayers up to 58 µm are obtained through CVD. Flakes are characterized by optical microscopy, atomic force microscopy, Raman spectroscopy, and photoluminescence analysis. The back-gated measurements are performed in ambient conditions without any encapsulation of the device. The fabricated device reveals n-type behavior with high field-effect mobility of 32 cm2/V s and high current ON/OFF ratio of 106. Good ohmic contact is achieved while using indium as source/drain electrodes. The large sized, highly crystalline flakes of MoS2 and the fabricated device showing high field-effect mobility and ON/OFF ratio make them potential candidates for high-performance nanoelectronics and optoelectronics devices.

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References

  1. K.S. Novoselov, D. Jiang, F. Schedin, T. Booth, V. Khotkevich, S. Morozov, and A.K. Geim, Two-dimensional atomic crystals. Proc. Natl. Acad. Sci. 102(30), 10451 (2005).

    Article  CAS  Google Scholar 

  2. K.S. Novoselov, L. Colombo, P. Gellert, M. Schwab, and K. Kim, A roadmap for graphene. Nature 490(7419), 192 (2012).

    Article  CAS  Google Scholar 

  3. G. Cunningham, U. Khan, C. Backes, D. Hanlon, D. McCloskey, J.F. Donegan, and J.N. Coleman, Photoconductivity of solution-processed MoS2 films. J. Mater. Chem. C 1(41), 6899 (2013).

    Article  CAS  Google Scholar 

  4. Y. Gong, J. Lin, X. Wang, G. Shi, S. Lei, Z. Lin, X. Zou, G. Ye, R. Vajtai, and B.I. Yakobson, Vertical and in-plane heterostructures from WS2/MoS2 monolayers. Nat. Mater. 13(12), 1135 (2014).

    Article  CAS  Google Scholar 

  5. Z. Lin, C. Wang, and Y. Chai, Emerging group-VI elemental 2d materials: preparations, properties, and device applications. Small 16(41), 2003319 (2020).

    Article  CAS  Google Scholar 

  6. O. Lopez-Sanchez, D. Lembke, M. Kayci, A. Radenovic, and A. Kis, Ultrasensitive photodetectors based on monolayer MoS2. Nat. Nanotechnol. 8(7), 497 (2013).

    Article  CAS  Google Scholar 

  7. B. Radisavljevic, A. Radenovic, J. Brivio, V. Giacometti, and A. Kis, Single-layer MoS2 transistors. Nat. Nanotechnol. 6(3), 147 (2011).

    Article  CAS  Google Scholar 

  8. Z. Yu, Z.Y. Ong, S. Li, J.B. Xu, G. Zhang, Y.W. Zhang, Y. Shi, and X. Wang, Analyzing the carrier mobility in transition-metal dichalcogenide MoS2 field-effect transistors. Adv. Funct. Mater. 27(19), 1604093 (2017).

    Article  Google Scholar 

  9. H.V. Phuc, N.N. Hieu, B.D. Hoi, N.V. Hieu, T.V. Thu, N.M. Hung, V.V. Ilyasov, N.A. Poklonski, and C.V. Nguyen, Tuning the electronic properties, effective mass and carrier mobility of MoS2 monolayer by strain engineering: first-principle calculations. J. Electron. Mater. 47, 730 (2018).

    Article  CAS  Google Scholar 

  10. R. Sundaram, M. Engel, A. Lombardo, R. Krupke, A. Ferrari, P. Avouris, and M. Steiner, Electroluminescence in single layer MoS2. Nano Lett. 13(4), 1416 (2013).

    Article  CAS  Google Scholar 

  11. K.G. Zhou, N.N. Mao, H.X. Wang, Y. Peng, and H.L. Zhang, A mixed-solvent strategy for efficient exfoliation of inorganic graphene analogues. Angew. Chem. 123(46), 11031 (2011).

    Article  Google Scholar 

  12. Y. Zhan, Z. Liu, S. Najmaei, P.M. Ajayan, and J. Lou, Large-area vapor-phase growth and characterization of MoS2 atomic layers on a SiO2 substrate. Small 8(7), 966 (2012).

    Article  CAS  Google Scholar 

  13. H.Y. Jeong, Y. Jin, S.J. Yun, J. Zhao, J. Baik, D.H. Keum, H.S. Lee, and Y.H. Lee, Heterogeneous defect domains in single-crystalline hexagonal WS2. Adv. Mater. 29(15), 1605043 (2017).

    Article  Google Scholar 

  14. S. Helveg, J.V. Lauritsen, E. Lægsgaard, I. Stensgaard, J.K. Nørskov, B. Clausen, H. Topsøe, and F. Besenbacher, Atomic-scale structure of single-layer MoS2 nanoclusters. Phys. Rev. Lett. 84(5), 951 (2000).

    Article  CAS  Google Scholar 

  15. Y. Peng, Z. Meng, C. Zhong, J. Lu, W. Yu, Y. Jia, and Y. Qian, Hydrothermal synthesis and characterization of single-molecular-layer MoS2 and MoSe2. Chem. Lett. 30(8), 772 (2001).

    Article  Google Scholar 

  16. Q. Li, J. Newberg, E. Walter, J. Hemminger, and R. Penner, Polycrystalline molybdenum disulfide (2H–MoS2) nano-and microribbons by electrochemical/chemical synthesis. Nano Lett. 4(2), 277 (2004).

    Article  CAS  Google Scholar 

  17. X. Li and H. Zhu, Two-dimensional MoS2: properties, preparation, and applications. J. Mater. 1(1), 33 (2015).

    Google Scholar 

  18. J. Pütz and M.A. Aegerter, Liquid film deposition of chalcogenide thin films. J. Sol-Gel Sci. Technol. 26(1), 807 (2003).

    Article  Google Scholar 

  19. K. Matsuura, T. Ohashi, I. Muneta, S. Ishihara, K. Kakushima, K. Tsutsui, A. Ogura, and H. Wakabayashi, Low-carrier-density sputtered MoS2 film by vapor-phase sulfurization. J. Electron. Mater. 47, 3497 (2018).

    Article  CAS  Google Scholar 

  20. Y.C. Kim, Y.H. Ahn, S. Lee, and J.-Y. Park, Large-area growth of high-quality graphene/MoS2 vertical heterostructures by chemical vapor deposition with nucleation control. Carbon 168, 580 (2020).

    Article  Google Scholar 

  21. F.K. Perkins, A.L. Friedman, E. Cobas, P. Campbell, G. Jernigan, and B.T. Jonker, Chemical vapor sensing with monolayer MoS2. Nano Lett. 13(2), 668 (2013).

    Article  CAS  Google Scholar 

  22. H. Şar, A. Özden, B. Yorulmaz, C. Sevik, N. Kosku Perkgoz, and F. Ay, A comparative device performance assesment of CVD grown MoS2 and WS2 monolayers. J. Mater. Sci. Mater. Electron. 29(10), 8785 (2018).

    Article  Google Scholar 

  23. C. Lee, H. Yan, L.E. Brus, T.F. Heinz, J. Hone, and S. Ryu, Anomalous lattice vibrations of single-and few-layer MoS2. ACS Nano 4(5), 2695 (2010).

    Article  CAS  Google Scholar 

  24. H. Li, Q. Zhang, C.C.R. Yap, B.K. Tay, T.H.T. Edwin, A. Olivier, and D. Baillargeat, From bulk to monolayer MoS2: evolution of Raman scattering. Adv. Funct. Mater. 22(7), 1385 (2012).

    Article  CAS  Google Scholar 

  25. J. Zhang, H. Yu, W. Chen, X. Tian, D. Liu, M. Cheng, G. Xie, W. Yang, R. Yang, and X. Bai, Scalable growth of high-quality polycrystalline MoS2 monolayers on SiO2 with tunable grain sizes. ACS Nano 8(6), 6024 (2014).

    Article  CAS  Google Scholar 

  26. S.S. Withanage, H. Kalita, H.-S. Chung, T. Roy, Y. Jung, and S.I. Khondaker, Uniform vapor-pressure-based chemical vapor deposition growth of MoS2 using MoO3 thin film as a precursor for coevaporation. ACS Omega 3(12), 18943 (2018).

    Article  CAS  Google Scholar 

  27. S.K. Kang and H.S. Lee, Study on growth parameters for monolayer MoS2 synthesized by CVD using solution-based metal precursors. Appl. Sci. Converg. Technol. 28(5), 159 (2019).

    Article  Google Scholar 

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Correspondence to Abdul Sattar.

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Mustafa, H., Khan, J., Sattar, A. et al. High-Performance Field-Effect Transistor Fabricated on CVD-Grown MoS2 Monolayers with Indium Contacts. J. Electron. Mater. 52, 7157–7163 (2023). https://doi.org/10.1007/s11664-023-10625-1

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