Abstract
This paper presents the development of gold-doped tin oxide (SnO2) film, realized by radiofrequency (RF) sputtering, which is highly sensitive for carbon monoxide (CO) gas. According to the Occupational Safety and Health Administration (OSHA), human exposure to 50 ppm CO is safe up to 8 h (as permissible exposure limit), but inhalation of higher concentrations of CO can cause headache, dizziness, nausea, etc. Hence, it is imperative to detect CO gas in low concentrations. The receptor films were prepared via reactive co-sputtering of high-purity Sn and Au targets and characterized by x-ray diffraction (XRD), which confirmed the presence of SnO2 and gold. The thin films of pristine SnO2 and gold-doped SnO2 were also examined through field emission scanning electron microscopy (FESEM) images, showing the distinction in their structures. A reasonably enhanced response of ~ 56.4% was exhibited by gold-doped SnO2 compared to 15.5% for pristine SnO2 for 50 ppm CO at operating temperature of each film.
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Acknowledgments
The authors would like to acknowledge the Director, CSIR-CEERI, Pilani, for supporting this activity. The authors would like to thank all the scientists and technical staff of the Smart Sensors Area for their constant support. The authors would also like to thank Dr. S. Santosh and Dr. Ravindra Kumar Jha for the support. The authors also wish to thank the central facility for technical support in the activity.
Funding
Funding was provided by Central Electronics Engineering Research Institute (Grant No. HCP-0012).
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Prajesh, R., Nahid, M., Saini, V. et al. Gold-Doped Tin Oxide Film for Highly Sensitive Carbon Monoxide Sensing. J. Electron. Mater. 50, 554–561 (2021). https://doi.org/10.1007/s11664-020-08613-w
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DOI: https://doi.org/10.1007/s11664-020-08613-w