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Impact of Sputtering Power on Properties of CdO:ZnO Thin Films Synthesized by Composite Method for Oxygen Gas Sensing Application

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Abstract

The present work reports the impact of RF sputtering power on CdO:ZnO (3:1) nanocomposite thin films deposited by sputtering. The structural, morphological, optical and electrical properties of CdO:ZnO thin films deposited at 40 W, 60 W, 80 W and 100 W RF sputtering power were investigated. The structural and morphological results show that high sputtering power improves the crystallinity of thin films. The thin film deposited at 80 W has (111) and (002) phases corresponding to mixed cubic and wurtzite crystal structure, whereas surface morphology of 100 W thin film shows that particles are densely agglomerate. The energy-dispersive x-ray spectrum shows the presence of Cd and Zn atoms in the CdO:ZnO nanocomposite samples. The films show 75–85% transparency in the visible region and a large variation in optical bandgaps from 2.6 eV to 3.5 eV was observed for the samples deposited at 40–100 W with lowest value for the 80 W thin film. I–V characteristics of all the CdO:ZnO thin films show an ohmic nature and resistance varies from 104 Ω to 109 Ω, suitable for resistive based gas sensor. The optimized thin film of CdO:ZnO deposited at 80 W was used for oxygen gas sensing applications 25–200°C operating temperatures and 25.4% sensor response was observed. The response and recovery times were found 10–20 s. Overall study reflects appreciable impact of RF sputtering power on different parameters under investigation.

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Authors and Affiliations

  1. Semiconductor Research Lab, Department of Physics, Gurukula Kangri University, Haridwar, India

    Jeevitesh K. Rajput, Trilok K. Pathak & L. P. Purohit

  2. Department of Physics, TKCOE Teerthanker Mahaveer University, Moradabad, India

    Trilok K. Pathak

Authors
  1. Jeevitesh K. Rajput
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  2. Trilok K. Pathak
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  3. L. P. Purohit
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Correspondence to L. P. Purohit.

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Rajput, J.K., Pathak, T.K. & Purohit, L.P. Impact of Sputtering Power on Properties of CdO:ZnO Thin Films Synthesized by Composite Method for Oxygen Gas Sensing Application. J. Electron. Mater. 48, 6640–6646 (2019). https://doi.org/10.1007/s11664-019-07464-4

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  • DOI: https://doi.org/10.1007/s11664-019-07464-4

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