Abstract
A tunable terahertz metamaterial sensor based on aluminum and silicon has been proposed in this paper. Two identical aluminum crosses are placed on either side of the silicon layer. Two substructures are formed by changing certain structural parameters, and two different resonant modes are enhanced directionally in these substructures, respectively. The refractive index sensing range for both resonant modes is 1.0–1.8. The sensitivity and figure of merit (FOM) of the electric dipole resonant mode which is centered at 2.333 THz are 117.67 and 1.07 GHz/RIU. As for the Fano mode which is centered at 3.381 THz, the calculated values are 81 and 2.53 GHz/RIU. Both resonant modes can achieve over 98% opacity. More significantly, an enhancement method of sensing capacity is realized based on perturbation theory. By placing polytetrafluoroethylene (PTFE) plates on the ends of the upper surface aluminum cross, the sensitivity of both resonant modes is improved. The optimized structure provides a sensitivity of 132.75 and 105.17 GHz/RIU for the two resonant modes, respectively. In addition, the effects of PTFE layer thickness on sensing performance are also discussed. This work opens up new prospects in the design of terahertz metamaterial sensors and provides a new method of enhancing sensing capacity.
Similar content being viewed by others
Data Availability
All data included in this paper are available upon reasonable request by contact with the corresponding author.
References
Barh A, Pal BP, Agrawal GP, Varshney RK, Rahman BMA (2016) Specialty fibers for terahertz generation and transmission: a review. IEEE J Sel Top Quant 22(2):365–379
Al-Naib IAI, Jansen C, Koch M (2008) Thin-film sensing with planar asymmetric metamaterial resonators. Appl Phys Lett 93(8):2438–3290
Bernier M, Garet F, Kato E, Blampey B, Coutaz J (2018) Comparative study of material parameter extraction using terahertz time-domain spectroscopy in transmission and in reflection. Journal of Infrared, Millimeter, and Terahertz Waves 39(4):349–366
Tao YH, Fitzgerald AJ, Wallace VP (2020) Non-contact, non-destructive testing in various industrial sectors with terahertz technology. Sensors-basel 20(3):712
Chen K, Ruan C, Zhan F, Song X, Fahad AK, Zhang T, Shi W (2023) Ultra-sensitive terahertz metamaterials biosensor based on luxuriant gaps structure. iScience 26(1):105781
Xu W, Xu W, Xie L, Xie L, Ying Y, Ying Y (2017) Mechanisms and applications of terahertz metamaterial sensing: a review. NANOSCALE -CAMBRIDGE- 9(34):13864–13878
Amin M, Siddiqui O, Abutarboush H, Farhat M, Ramzan R (2021) A THz graphene metasurface for polarization selective virus sensing. Carbon 176:580–591
Islam M, Chowdhury DR, Ahmad A, Kumar G (2017) Terahertz plasmonic waveguide based thin film sensor. J Lightwave Technol. PP(23):1–1
Islam MS, Sultana J, Biabanifard M, Vafapour Z, Nine MJ, Dinovitser A, Cordeiro CMB, Ng BWH, Abbott D (2020) Tunable localized surface plasmon graphene metasurface for multiband superabsorption and terahertz sensing. Carbon 158:559–567
Veeraselvam A, Mohammed GNA, Savarimuthu K, Anguera J, Paul JC, Krishnan RK (2021) Refractive index-based terahertz sensor using graphene for material characterization. Sensors-Basel 21(23):8151
Deng X, Shen Y, Liu B, Song Z, He X, Zhang Q, Ling D, Liu D, Wei D (2022) Terahertz metamaterial sensor for sensitive detection of citrate salt solutions. Biosensors 12(6):408
Zhan Y, Yin H, Wang J, Yao H, Fan C (2022) Tunable multiple band THz perfect absorber with InSb metamaterial for enhanced sensing application. Results in Optics 8:100255
Khodadadi B, Babaeinik M, Ghods V, Rezaei P (2023) Triple-band metamaterial perfect absorber for refractive index sensing in THz frequency. Opt Quant Electron 55(5)
Anwar S (2023) Dual-band detection based on metamaterial sensor at terahertz frequency. Opt Rev 30(3):300–309
Chen T, Liang D, Jiang W (2022) A tunable terahertz graphene metamaterial sensor based on dual polarized plasmon-induced transparency. IEEE Sens J 22(14):14084–14090
Zhu J, Xiong J (2023) Tunable terahertz graphene metamaterial optical switches and sensors based on plasma-induced transparency. Measurement 220:113302
Liang D, Chen T (2023) Optical modulated graphene metamaterial based on plasmon-induced transparency in the terahertz band: application for sensing. Diam Relat Mater 131:109613
Zhang J, Mu N, Liu L, Xie J, Feng H, Yao J, Chen T, Zhu W (2021) Highly sensitive detection of malignant glioma cells using metamaterial-inspired THz biosensor based on electromagnetically induced transparency. Biosens Bioelectron 185:113241
Cheng Y, Zhang K, Liu Y, Li S, Kong W (2020) Actively mode tunable electromagnetically induced transparency in a polarization-dependent terahertz metamaterial. AIP Adv 10(4)
Cui W, Wang Y, Xue J, He Z, He H (2021) Terahertz sensing based on tunable Fano resonance in graphene metamaterial. Results Phys 31:104994
Yan X, Zhang Z, Liang L, Yang M, Wei D, Song X, Zhang H, Lu Y, Liu L, Zhang M, Wang T, Yao J (2020) A multiple mode integrated biosensor based on higher order Fano metamaterials. Nanoscale 12(3):1719–1727
He Z, Xue W, Cui W, Li C, Li Z, Pu L, Feng J, Xiao X, Wang X, Li AG (2020) Tunable Fano resonance and enhanced sensing in a simple Au/TiO2 hybrid metasurface. Nanomater 10(4):687
Smith DR, Vier DC, Koschny T, Soukoulis CM (2005) Electromagnetic parameter retrieval from inhomogeneous metamaterials. Phys Rev E Stat Nonlin Soft Matter Phys 71(3 Pt 2B):036617
Karmakar S, Kumar D, Varshney RK, Chowdhury DR (2020) Strong terahertz matter interaction induced ultrasensitive sensing in Fano cavity based stacked metamaterials. J Phys D Appl Phys 53(41):415101–415109
Park DJ, Park SJ, Park I, Ahn YH (2014) Dielectric substrate effect on the metamaterial resonances in terahertz frequency range. Curr Appl Phys 14(4):570–574
Limonov MF, Rybin MV, Poddubny AN, Kivshar YS (2017) Fano resonances in photonics. Nat Photonics 11(9):543–554
Cheng R, Xu L, Yu X, Zou L, Shen Y, Deng X (2020) High-sensitivity biosensor for identification of protein based on terahertz Fano resonance metasurfaces. Opt Commun 473:125850
Funding
National Natural Science Foundation of China (61905091, 62005095).
Author information
Authors and Affiliations
Contributions
Conceptualization, Methodology, Formal analysis, Writing, Shijing Guo.; Writing-Review and Editing, Supervision, Funding acquisition, Chao Li.; Writing-Review and Editing, Dong Wang; Supervision, Wenya Chen, Guozheng Wu and Jiaran Xiong; Funding acquisition, Song Gao. All authors have read and agreed to the published version of the manuscript.
Corresponding author
Ethics declarations
Competing Interests
The authors declare no competing interests.
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Guo, S., Li, C., Wang, D. et al. A Terahertz Metamaterial Sensor Based on Dual Resonant Mode and Enhancement of Sensing Performance. Plasmonics (2023). https://doi.org/10.1007/s11468-023-02163-7
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s11468-023-02163-7