Abstract
The paper considers two main approaches discussed in literature for conversion of gaseous fluorides SiF4, GeF4 and hydrogen-containing compound of germanium, i.e., GeH4, isotopic enriched by centrifugal method, into target products—stable isotopes of silicon and germanium in the form of bulk polycrystals and thin layers. In the first two-step (chemical) approach the fluorides are converted into intermediate compounds which are further subjected either to pyrolysis or to reduction by hydrogen. In the second single-step (plasma-chemical) approach the gaseous fluorides are reduced by hydrogen in plasma sustained by the discharges of different types.
Similar content being viewed by others
References
Geballe TH, Hull GW (1958) Phys Rev 110:773–775
Feher G, Gordon JP (1958) Phys Rev 109:221–222
Haller EE (1995) Appl Phys Rev 77:2857–2878
Itoh KM (2001) Physica E 10:463–466
Cardona M, Thewalt MLW (2005) Rev Mod Phys 75:1173–1224
Ager JW III, Haller E (2006) Phys Stat Solids A203:3550–3558
Becker P, Pohl H-J, Riemann H, Abrosimov N (2010) Phys Stat Solids A207:49–66
Churbanov MF, Gusev AV, Bulanov AD, Potapov AM (2013) Russ Chem Bull 62:270–275
Zwanenburg FA, Dzurak S, Morello A, Simmons MY, Hollenberg LCL, Klimeck G, Rogge S, Coppersmith SN, Eriksson MA (2013) Rev Mod Phys 85:961–1019
Itoh KM, Watanabe H (2014) MRS Commun 4:143–157
Agostini M, Allardt M, Andreotti E (2015) Eur Phys J C 75:39
Roberts WL (1989) Nucl Instrum Methods Phys A282:271–276
Tikhomirov A (1992) Nucl Instrum Methods Phys B70:1–4
Becker P, Bettin H, De Bievre P, Holm C, Kuetgens U, Spieweck F, Stuempel J, Valkiers S, Zulehner W (1995) IEEE Trans Instrum Meas 44:522–525
Takyu K-I, Itoh KM, Oka K, Saito N, Ozhogin VI (1999) Jpn J Appl Phys 38:L1493–L1495
Korolev VA, Mashirov LG, Perepech KV, Polyakov MS, Shilnikov AYU, Godisov ON, Kaliteevskii AK, Ber BYA, Kovarskii AP (2002) Inorg Mater 38:539–541
Godisov ON, Kaliteevskii AK, Korolev VA, Ber BYA, Davydov VYU, Kaliteevskii MA, Kop’ev PS (2001) Phys Technol Semicond 35:877–879
Abrosimov NA, Riemann H, Schroeder W, Pohl H-J, Kaliteevskii AK, Godisov ON, Korolev VI, Zhilnikov AYU (2003) Cryst Res Technol 38:654–658
Bulanov AD, Devyatykh GG, Gusev AV, Sennikov PG, Pohl H-J, Riemann H, Schilling H, Becker P (2000) Cryst Res Technol 35:1023–1026
Devyatykh GG, Bulanov AD, Gusev AV, Kovalev ID, Krylov VA, Potapov AM, Sennikov PG, Adamchik SA, Gavva VA, Kotkov AP, Churbanov MF, Dianov EM, Kaliteevskii AK, Godisov ON, Pohl H-J, Becker P, Riemann H, Abrosimov N (2008) Dokl Chem Part I 421:157–160
Loginov AV, Garbar AM (1990) High-Purity Subst 3:747–755
Krylov VA, Sennikov PG, Chernova OYU, Sorochkina TG, Sozin AYU, Chuprov LA, Adamchik SA, Kotkov AP (2008) Inorg Mater 44:766–772
Ager JW III, Beeman JW, Hansen WL, Haller EE, Sharp ID, Liao C, Yang A, Thewalt MLW, Riemann H (2005) J Electrochem Soc 152:G448–G451
Itoh K, Hansen WL, Haller EE, Farmer JW, Ozhogin VI, Rudnev A, Tikhomirov A (1993) J Mater Res 8:1341–1347
Hu MY, Sinn H, Atalas A, Sturhahn W, Alp EE, Wille H-C, Shvyd’ko YUV, Sutter JP, Bandaru J, Haller EE, Ozhogin VI, Rodriguez R, Corella R, Kartheuser E, Villerett MA (2003) Phys Rev B 67:113306
Klapdor-Kleingrothaus HV (2005) Nuclear Physics (Proc.Suppl) 143B:229–232
Arefyev DG, Vassin SA, Dolgov SG, Zyryanov SM, Luzkii VA, Skorynin GM, Timofeev MG, Sharin GA, Filimonov SV, Bulanov AD, Churbanov MF (2010) Perspekt Mater (Adv Mater) 8:19–24 [in Russian]
Gusev AV, Bulanov AD, Filimonov SV, Zyryanov SM, Arefyev DG, Churbanov MF, Andryushenko IA, Potapov AM, Gavva VA, Adamchik SA (2011) Perspekt Mater (Adv Mater) 10:17 [in Russian]
Adamchik SA, Bulanov AD, Churbanov MF, Troshin OYU, Lashkov AYU, Gusev AV, Lipskii VA (2014) Dokl Chem Part II 458:185–188
Kut’in AM, Polyakov VS, Sennikov PG (2008) 5th international conference “Silicon 2008”, Chernogolovra. Book of abstracts:178
Boone JE, Richards DM, Bossier III DM (1991) Patent 5075092 US
Djeridane Y, Abramov A, i Cabarrocas PR (2007) Thin Solid Films 515:7451–7454
Kumar S, Brenot R, Kalache B, Tripathi V, Vanderhagen R, Drevillion B, i Cabarrocas PR (2001) Solid State Phenom 80–81:237–240
Bruno G, Capezzuto P, Cicala G (1991) J Appl Phys 69(10):7256
Tumanov YuN (2003) Plasma and high-frequency processes for obtaining and processing materials in the nuclear fuel cycle: present and future. Fizmatlit, Moscow
Tichomolov YUV, Afonin YUG, Shulshenko NA, Zainchkovskii SV, Koshelev SM (1996) Patent. 2066296 Russian Federation
Nagano M, Mriya T, Takehiro T, Nobuyuki M, Fumiteru Y (2004) Patent 0250764 A1 USA
Sennikov PG, Golubev SV, Shashkin VI, Ptyakhin DA, Andreev BA, Drozdov YUN, Kuznetsov AS, Pohl H-J (2009) Semiconductors 43:968
Sennikov PG, Golubev SV, Shashkin VI, Pryakhin DA, Drozdov MN, Andreev BA, Pohl H-J, Godisov ON (2009) JETP Lett 89:73–75
Sennikov PG, Golubev SV, Kornev RA, Mochalov LA, Shilaev AA (2014) High Energy Chem 48:49–53
Mutsukura N, Ohuchi M, Satoh S, Machi Y (1983) Thin Solid Films 10:47–57
Sennikov P, Pryakhin D, Andreev B, Gavrilenko L, Drozdov Yu, Drozdov M, Pohl H-J, Shashkin V (2010) Cryst. Res Technol 45:983–987
Sennikov PG, Pryakhin DA, Abrosimov NV, Andreev B, Drozdov YU, Drozdov M, Kuznetsov A, Murel A, Pohl H-J, Riemann H, Shashkin V (2010) Cryst Res Technol 45:899–908
Vodopyanov VA, Golubev SV, Mansfeld DA, Sennikov PG, Drozdov YUN (2011) Rev Sci Instrum 82:063503
Mansfeld DA, Vodopyanov VA, Golubev SV, Sennikov PG, Mochalov LA, Andreev BA, Drozdov YUN, Drozdov MN, Shashkin VI, Bulkin P, I Cabarrocas PR (2014) Thin Solid Films 552:46–49
Sennikov PG, Vodopyanov VA, Golubev SV, Mansfeld DA, Drozdov MN, Drozdov YUN, Gavrilenko LV, Pryakhin DA, Shashkin VI, Godisov ON, Glasunov AI, Safonov AYu, Pohl HJ, Thewalt MLW, Becker P, Riemann H, Abrosimov NV, Valkiers S (2012) Solid State Commun 152:455–457
Sennikov PG, Golubev SV, Kornev RA, Mochalov LA, Kossyi IA, Davydov AM (2012) In: YuA Lebedev (ed) Proceedings of VIII International workshop”Microwave discharges: fundamentals and applications. Zvenigorod. September 10–14, 2012 Yanus-K, Moscow, 243–248
Sennikov PG, Kornev RA, Mochalov LA, Golubev SV (2014) J Phys 514:012002–012008
Shigeru Saito and Kinich Obi (1993) J Appl Phys 74(3):1480
Andreev BA, Gavrilenko LV, Drozdov YUN, Yunin PA, Pryakhin DA, Mochalov LA, Sennikov PG, Bulkin P, I Cabarrocas PR (2014) Thin Solid Films 552:46–49
Sennikov PG, Kornev RA, Mochalov LA et al (2013) Perspekt Mater (Adv Mater) 14:212 [in Russian]
Acknowledgments
The work was supported by Russian Foundation for Basic Research (Project No 15-43-02308).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Sennikov, P.G., Kornev, R.A. & Abrosimov, N.V. Production of stable silicon and germanium isotopes via their enriched volatile compounds. J Radioanal Nucl Chem 306, 21–30 (2015). https://doi.org/10.1007/s10967-015-4192-4
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10967-015-4192-4