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High macroscopic piezoelectric d33 of the nm-thick flexible PZT ferroelectric film

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Abstract

Integrated nanoelectromechanical systems (NEMS) with nm-scale piezoelectric films exhibit enormous advantages compared with traditional microelectromechanical systems. Herein, the flexible PZT ferroelectric films with 50–200 nm thickness were achieved, and their piezoelectric d33 rapidly enhanced with the thickness of film increasing and the thickness of mica substrate decreasing. The d33 value of the 80 nm-thick PZT film increases from 180 to 220 pC/N with the thickness of mica substrate reducing from 0.2 mm to 10 μm to largely decrease clamping strain between substrate and PZT film. Furthermore, the flexible mica substrate largely increases both the piezoelectric effect and the inverse piezoelectric effect of PZT films. These nm-scale PZT films with robust piezoelectricity will encourage the creation of new NEMS and piezoelectric devices that are flexible.

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Acknowledgements

This work is supported by the National Natural Science Foundation of China (92263105 and 62374090 and U2037603) and the Fundamental Research Funds for the Central Universities (30921013108).

Funding

Funding was provided by National Natural Science Foundation of China (Garnt Nos. 92263105, 62374090, U2037603) and Fundamental Research Funds for the Central Universities (Grant No. 30921013108).

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Authors and Affiliations

  1. School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, 210094, China

    Rui Zhang, Yecheng Ding, Nannan Liu, Wenbin Tang, Yaojin Wang & Guoliang Yuan

  2. Precision Driving Laboratory, Nanjing University of Aeronautics and Astronautics, Nanjing, China

    Yiping Wang & Ying Yang

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Contributions

RZ: Conceptualization, Investigation, Data curation, Formal analysis, Writing—original draft, YD: Investigation, Data curation, Formal analysis, NL: Investigation, Formal analysis, Conceptualization, WT: Investigation, Formal analysis, Conceptualization. YW: Investigation, Formal analysis, Conceptualization, YY: Conceptualization, Supervision, Writing—review & editing, YW: Investigation, Formal analysis, Conceptualization, GY: Conceptualization, Supervision, Writing—review & editing.

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Correspondence to Guoliang Yuan.

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Zhang, R., Ding, Y., Liu, N. et al. High macroscopic piezoelectric d33 of the nm-thick flexible PZT ferroelectric film. J Mater Sci: Mater Electron 35, 298 (2024). https://doi.org/10.1007/s10854-024-12040-6

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