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Novel design for performance enhancement of a touch-mode capacitive pressure sensor: theoretical modeling and numerical simulation

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Abstract

Capacitive pressure sensors have undergone a multitude of design modifications to improve their performance for various applications. This paper aims to add a novel feature to increase the capacitance generated by using a convex dome-shaped substrate electrode. The paper provides in-depth mathematical and analytical modeling that supports the proposed design. The results indicate a significant improvement in capacitance, touch-mode range, and linearity for the touch-mode capacitive pressure sensor.

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Authors and Affiliations

  1. School of Electronics Engineering, Vellore Institute of Technology, Vellore, Tamil Nadu, India

    M. Aditya Varma & Sumit Kumar Jindal

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  1. M. Aditya Varma
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  2. Sumit Kumar Jindal
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Correspondence to Sumit Kumar Jindal.

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Varma, M.A., Jindal, S.K. Novel design for performance enhancement of a touch-mode capacitive pressure sensor: theoretical modeling and numerical simulation. J Comput Electron 17, 1324–1333 (2018). https://doi.org/10.1007/s10825-018-1174-0

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  • DOI: https://doi.org/10.1007/s10825-018-1174-0

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