Skip to main content

Advertisement

SpringerLink
Log in

Wafer-scale integrated micro-supercapacitors on an ultrathin and highly flexible biomedical platform

  • Published:
Biomedical Microdevices Aims and scope Submit manuscript

Abstract

We present wafer-scale integrated micro-supercapacitors on an ultrathin and highly flexible parylene platform, as progress toward sustainably powering biomedical microsystems suitable for implantable and wearable applications. All-solid-state, low-profile (<30 μm), and high-density (up to ~500 μF/mm2) micro-supercapacitors are formed on an ultrathin (~20 μm) freestanding parylene film by a wafer-scale parylene packaging process in combination with a polyaniline (PANI) nanowire growth technique assisted by surface plasma treatment. These micro-supercapacitors are highly flexible and shown to be resilient toward flexural stress. Further, direct integration of micro-supercapacitors into a radio frequency (RF) rectifying circuit is achieved on a single parylene platform, yielding a complete RF energy harvesting microsystem. The system discharging rate is shown to improve by ~17 times in the presence of the integrated micro-supercapacitors. This result suggests that the integrated micro-supercapacitor technology described herein is a promising strategy for sustainably powering biomedical microsystems dedicated to implantable and wearable applications.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9

Similar content being viewed by others

References

  • H. An, Y. Wang, X. Wang, L. Zheng, X. Wang, L. Yi, L. Bai, X. Zhang, J. Power Sources 195, 6964 (2010)

    Article  Google Scholar 

  • M. Beidaghi, C. Wang, Adv. Funct. Mater. 22, 4501 (2012)

    Article  Google Scholar 

  • J. Chmiola, C. Largeot, P.L. Taberna, P. Simon, Y. Gogotsi, Science 328, 480 (2010)

    Article  Google Scholar 

  • H. Durou, D. Pech, D. Colin, P. Simon, P.L. Taberna, M. Brunet, Microsyst. Technol. 18, 467 (2012)

    Article  Google Scholar 

  • M.F. El-Kady, R.B. Kaner, Nat. Commun. 4, 1475 (2013)

    Article  Google Scholar 

  • V. Gupta, N. Miura, Electrochem. Solid State Lett 8, A630 (2005)

    Article  Google Scholar 

  • N.T. Kemp, J.W. Cochrane, R. Newbury, Nanotechnology 18, 145610 (2007)

    Article  Google Scholar 

  • G.R. Li, Z.P. Feng, J.H. Zhong, J.L. Wang, Y.X. Tong, Macromolecules 43, 2178 (2010)

    Article  Google Scholar 

  • C. Liu, K. Hayashi, K. Toko, Electrochem. Commun. 12, 36 (2010)

    Article  Google Scholar 

  • J. Maeng, B. Kim, D. Ha, W.J. Chappell, IEEE Trans. Microw. Theroy Tech. 59, 3410 (2011)

    Article  Google Scholar 

  • C. Meng, C. Liu, L. Chen, C. Hu, S. Fan, Nano Lett. 10, 4025 (2010)

    Article  Google Scholar 

  • C. Meng, O.Z. Gall, P.P. Irazoqui, Biomed. Microdevices 15, 973 (2013)

    Article  Google Scholar 

  • C. Meng, J. Maeng, S.W.M. John, P.P. Irazoqui, Adv. Energy Mater. 4, 1301269 (2014)

    Article  Google Scholar 

  • S.H. Mujarwar, S.B. Ambade, T. Battumur, R.B. Ambade, S.H. Lee, Electrochim. Acta 56, 4462 (2011)

    Article  Google Scholar 

  • Z. Niu, L. Zhang, L. Liu, B. Zhu, H. Dong, X. Chen, Adv. Mater. 25, 4035 (2013)

    Article  Google Scholar 

  • D. Pech, M. Brunet, H. Durou, P.H. Huang, V. Mochalin, Y. Gogotsi, P.L. Taberna, P. Simon, Nat. Nanotechnol. 5, 651 (2010)

    Article  Google Scholar 

  • G.A. Salvatore, N. Münzenrieder, T. Kinkeldei, L. Petti, C. Zysset, I. Strebel, L. Büthe, G. Tröster, Nat. Commun. 5, 2982 (2014)

    Article  Google Scholar 

  • R.K. Sharma, A.C. Rastogi, S.B. Desu, Electrochim. Acta 53, 7690 (2008)

    Article  Google Scholar 

  • C. Shen, X. Wang, W. Zhang, F. Kang, J. Power Sources 196, 10465 (2011)

    Article  Google Scholar 

  • W. Si, C. Yan, Y. Chen, S. Oswald, L. Han, O.G. Schmidt, Energy Environ. Sci. 6, 3218 (2013)

    Article  Google Scholar 

  • Y.T. Tan, F. Ran, L.R. Wang, L.B. Kong, L. Kang, J. Appl. Polym. Sci. 127, 1544 (2013)

    Article  Google Scholar 

  • Y.G. Wang, H.Q. Li, Y.Y. Xia, Adv. Mater. 18, 2619 (2006)

    Article  Google Scholar 

  • J. Wang, Y. Xu, X. Chen, X. Du, J. Power Sources 163, 1120 (2007)

    Article  Google Scholar 

  • K. Wang, J. Huang, Z. Wei, J. Phys. Chem. C 114, 8062 (2010)

    Article  Google Scholar 

  • K. Wang, W. Zou, B. Quan, A. Yu, H. Wu, P. Jiang, Z. Wei, Adv. Energy Mater. 1, 1068 (2011)

    Article  Google Scholar 

  • S. Xiong, F. Yang, H. Jiang, J. Ma, X. Lu, Electrochim. Acta 85, 235 (2012)

    Article  Google Scholar 

  • L. Yuan, X.H. Lu, T. Zhai, J. Dai, F. Zhang, B. Hu, X. Wang, L. Gong, J. Chen, C. Hu, Y. Tong, J. Zhou, Z.L. Wang, ACS Nano 6, 656 (2012)

    Article  Google Scholar 

  • J. Zang, S.J. Bao, C.M. Li, H. Bian, X. Cui, Q. Bao, C.Q. Sun, J. Guo, K. Lian, J. Phys. Chem. C 112, 14843 (2008)

    Article  Google Scholar 

  • H. Zhang, G. Cao, Z. Wang, Y. Yang, Z. Shi, Z. Gu, Electrochem. Commun. 10, 1056 (2008)

    Article  Google Scholar 

  • Y.G. Zhu, Y. Wang, Y. Shi, J.I. Wong, H.Y. Yang, Nano Energy 3, 46 (2014)

    Article  Google Scholar 

Download references

Acknowledgments

This work was sponsored by the Defense Advanced Research Projects Agency (DARPA) MTO under the auspices of Dr. Jack Judy through the Space and Naval Warfare Systems Center, Pacific Grant/Contract No. N66001-11-1-4029. The authors thank Rebecca A. Bercich for proofreading the manuscript.

Author information

Authors and Affiliations

  1. Center for Implantable Devices, Weldon School of Biomedical Engineering, Purdue University, West Lafayette, IN, 47907, USA

    Jimin Maeng, Chuizhou Meng & Pedro P. Irazoqui

Authors
  1. Jimin Maeng
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Chuizhou Meng
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Pedro P. Irazoqui
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Jimin Maeng.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Maeng, J., Meng, C. & Irazoqui, P.P. Wafer-scale integrated micro-supercapacitors on an ultrathin and highly flexible biomedical platform. Biomed Microdevices 17, 7 (2015). https://doi.org/10.1007/s10544-015-9930-4

Download citation

  • Published:

  • DOI: https://doi.org/10.1007/s10544-015-9930-4

Keywords

Search

Navigation