Skip to main content
SpringerLink
Log in

Wideband RF MEMS switch using two dimensional actuations

  • Published:
Analog Integrated Circuits and Signal Processing Aims and scope Submit manuscript

Abstract

In this paper, a new wideband RF MEMS switch using lateral and vertical actuations has been proposed which can be used for wide frequency band. The switch consists of one side clamped bridge and two electrostatic actuators array which move the bridge laterally. There is also one vertical electrostatic actuator which moves the bridge up and down. This actuation voltage is equal to 15 V. A flexible hinge is used in the proposed structure, which has a little spring constant in the lateral direction. Thus, by applying a small voltage, the switch bridge can be moved laterally to left or right and it changes the capacitive area between the bridge and RF signal line both in up and down positions. Depending on left or right electrostatic actuation forces, the bridge moves to left or right and the switch capacitive area is increased or decreased. The lateral actuation voltage of the proposed switch is equal to 2 V. Briefly, the switch can operate in wider bandwidth than conventional structure which consists of only vertical actuator. The simulations are done by HFSS and COMSOL softwares. The bandwidth of this switch is from 4.5 to 10 GHz.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13

Similar content being viewed by others

References

  1. Singh, T., Khaira, N., & Sengar, J. (2013). A novel capacitive RF MEMS switch design for low voltage applications. In Fourth international conference on computing, communications and networking technologies (ICCCNT), 4–6 July 2013 (pp. 1–6). https://doi.org/10.1109/icccnt.2013.6726709.

  2. Asutkar, S. B., & Ghutke, P. A. (2016). Novel approach for optimized design of RF MEMS capacitive switch. In 2nd international conference on advances in electrical, electronics, information, communication and bio-informatics (AEEICB), 27–28 Feb. 2016 (pp. 358–362). https://doi.org/10.1109/aeeicb.2016.7538308.

  3. Sahu, A. K., & Sarkar, B. K. (2009). A novel low actuation voltage RF MEMS shunt capacitive switch. In Applied electromagnetics conference (AEMC) (pp. 1–3). https://doi.org/10.1109/aemc.2009.5430612.

  4. Saffari, H., Moghadam, R. A., & Koohsorkhi, J. (2017). Rotated serpentine spring structure for low actuation voltage CPW RF MEMS switch. Micro and Nanosystems, 9, 80–87.

    Article  Google Scholar 

  5. Saffari, H., Moghadam, R. A., & Koohsorkhi, J. (2017). RF MEMS switch with increased operational bandwidth. In Iranian conference on electrical engineering (ICEE), IEEE, (pp. 288–292).

  6. Saffari, H., Moghadam, R. A., & Koohsorkhi, J. (2017). A novel DC contact RF MEMS switch with high actuation area and low actuation voltage. In The 25 th annual international conference on mechanical engineering, 2–4 May 2017 (pp. 288–292).

  7. Saffari, H., Moghadam, R. A., & Tahmasebipour, M. (2017). Low actuation voltage RF MEMS Shunt Capacitive Switch based on rotated serpentine spring. In Iranian conference on electrical engineering (ICEE), IEEE (pp. 293–297).

  8. Saffari, H., Moghadam, R. A., Tahmasebipour, M., & Koohsorkhi, J. (2017) A survey on low actuation voltage RF MEMS switches. In The 16th international conference of iranian aerospace society, Tehran, Iran.

  9. Angira, M., & Rangra, K. (2015). A low insertion loss, multi-band, fixed central capacitor based RF-MEMS switch. Microsystem Technologies, 21, 2259–2264. https://doi.org/10.1007/s00542-014-2378-2.

    Article  Google Scholar 

  10. Mahesh. (2014). A low actuation voltage capacitive RF MEMS switch for Ku-band applications. In 2014 International conference for convergence of technology (I2CT), 6–8 April 2014. (pp. 1–5). https://doi.org/10.1109/i2ct.2014.7092073.

  11. Lobontiu, N. (2002). Compliant mechanisms: design of flexure hinges. Boca Raton: CRC Press.

    Book  Google Scholar 

  12. Tang, M., Liu, A. Q., Agarwal, A., Zhang, Q. X., & Win, P. (2004). A new approach of lateral RF MEMS switch. Analog Integrated Circuits and Signal Processing, 40, 165–173. https://doi.org/10.1023/b:alog.0000032597.03215.65.

    Article  Google Scholar 

  13. Tang, M., Agarwal, A., Li, J., Zhang, Q. X., Win, P., Huang, J. M., & Liu, A. Q. (2003). An approach of lateral RF MEMS switch for high performance. In Symposium on design, test, integration and packaging of MEMS/MOEMS 2003., 5–7 May 2003 (pp. 99–102). https://doi.org/10.1109/dtip.2003.1287016.

  14. Moseley, R.W., Yeatman, E.M., Holmes, A.S., Syms, R. R. A., Finlay, A. P., & Boniface, P. (2006). Laterally actuated, low voltage, 3-port RF MEMS switch. In 19th IEEE international conference on micro electro mechanical systems, 2006 (pp. 878–881). https://doi.org/10.1109/memsys.2006.1627940.

  15. Pirmoradi, E., Mirzajani, H., & Badri Ghavifekr, H. (2015). Design and simulation of a novel electro-thermally actuated lateral RF MEMS latching switch for low power applications. Microsystem Technologies, 21, 465–475. https://doi.org/10.1007/s00542-014-2084-0.

    Article  Google Scholar 

  16. He, X. j., Wang, C. j., Guo, J. f., Cai, Z. j., Fu, J. h., & Meng, F.y. (2012). Lateral RF MEMS capacitive switch based on HfO2 film for millimeter wave applications. In Proceedings of 2012 5th global symposium on millimeter-waves, 27–30 May 2012 (pp. 637–640). https://doi.org/10.1109/gsmm.2012.6313989.

  17. Li-Feng, W., Lei, H., Jie-Ying, T., & Qing-An, H. (2015). Laterally-actuated inside-driven RF MEMS switches fabricated by a SOG process. Journal of Micromechanics and Microengineering, 25(6), Article Id 065007.

  18. Bhatasana, P., Pujara, D., & Bera, S. C. (2015). Movable parallel plate RF MEMS switch with wide frequency response. In IEEE applied electromagnetics conference (AEMC), 18–21 Dec. 2015 (pp. 1–2). https://doi.org/10.1109/aemc.2015.7509162.

  19. Singh, T. (2016). Novel high capacitance ratio compact float metal based RF MEMS switch for multi band and variable bandwidth: design and RF performance analysis. Microsystem Technologies, 22, 2977–2986. https://doi.org/10.1007/s00542-015-2677-2.

    Article  Google Scholar 

  20. Beer, F. P., Johnston, R., Dewolf, J., & Mazurek, D. (2006). Mechanics of materials. Boston: McGraw-Hill.

    Google Scholar 

  21. Wu, Y., & Zhou, Z. (2002). Design calculations for flexure hinges. Review of Scientific Instruments, 73, 3101–3106.

    Article  Google Scholar 

  22. Rebeiz, G. M. (2004). RF MEMS: Theory, design, and technology. Hoboken: Wiley.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Sensors and Actuators Laboratory, Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran

    Hassan Saffari & Reza Askari Moghadam

  2. Department of Electrical Engineering, University of Leuven, Leuven, Belgium

    Michael Kraft

Authors
  1. Hassan Saffari
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Reza Askari Moghadam
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Michael Kraft
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Reza Askari Moghadam.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Saffari, H., Askari Moghadam, R. & Kraft, M. Wideband RF MEMS switch using two dimensional actuations. Analog Integr Circ Sig Process 100, 369–376 (2019). https://doi.org/10.1007/s10470-019-01486-y

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10470-019-01486-y

Keywords

Search

Navigation