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RF MEMS Switch

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Micro Electro Mechanical Systems

Part of the book series: Micro/Nano Technologies ((MNT,volume 2))

Abstract

RF MEMS switch is a new type of RF component developed by MEMS technology. Like the macro switches and relays, RF MEMS switches use a mechanical way to control the signal on and off. The difference is that, RF MEMS switches have very small volume and are used to process RF or microwave signals. Compared with the traditional solid-state semiconductor RF switches, RF MEMS switches have the advantages of low insertion loss, high isolation, low power consumption, and high linearity. Hence, RF MEMS switches have a wide range of application prospects in many fields, such as radar, satellite, base station, and portable radio communication equipment.

In this chapter, the configuration principles of RF MEMS switches is first introduced, including four basic EM models and two basic movement styles. According to the two basic movement styles, the vertical movement and the lateral movement, several RF MEMS switches with different features are shown. Two different vertical actuating membrane bridge RF MEMS switches are obtained based on two different substrates. The first one has the advantage of compatibility with GaAs MMIC process, and the second one has the feature of flexibility. Furthermore, another two lateral actuating RF MEMS switches are demonstrated based on the SOG process. One is the push-pull type switch controlled by only one actuation signal, and the other is the three-state switch actuated by rhombic structures. By designing lateral actuating structures, some performances of the RF MEMS switches are improved.

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Authors and Affiliations

  1. Southeast University, 2 Sipailou, Xuanwu, 210018, Nanjing, Jiangsu, China

    Li-Feng Wang, Qing-An Huang & Lei Han

Authors
  1. Li-Feng Wang
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  2. Qing-An Huang
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  3. Lei Han
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Corresponding author

Correspondence to Li-Feng Wang .

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Editors and Affiliations

  1. Southeast University, Nanjing, China

    Qing-An Huang

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© 2017 Springer Nature Singapore Pte Ltd.

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Wang, LF., Huang, QA., Han, L. (2017). RF MEMS Switch. In: Huang, QA. (eds) Micro Electro Mechanical Systems. Micro/Nano Technologies, vol 2. Springer, Singapore. https://doi.org/10.1007/978-981-10-2798-7_34-1

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  • DOI: https://doi.org/10.1007/978-981-10-2798-7_34-1

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-2798-7

  • Online ISBN: 978-981-10-2798-7

  • eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering

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