Abstract
In this manuscript, thermal annealing effects on platinum (Pt) thin film on various substrate configurations have been studied experimentally. The objective of this study is to attain a thermally stable ‘Pt’ film that can sustain annealing temperatures > 500 °C for gas sensing applications. 200 nm thick ‘Pt’ was evaporated using Electron Beam (E-Beam) Evaporation System on silicon substrate. High temperature (> 450 °C) degradation of platinum films with different adhesion layers of titanium and its oxide was examined on silicon substrate. Impact of annealing at two different peak temperatures viz. 450 °C and 520 °C on platinum film was studied in terms of ‘Pt’ film morphological changes and electrical resistance variations. A novel method of making platinum micro-heater on titanium oxide film (prepared using rapid thermal anneal process) is described, which results into stable platinum film at annealing temperatures up to 520 °C.
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References
Ababneh A, Al-Omaria A N, Marschibois M, Feili D, Seidel H (2013) Investigations on the high temperature compatibility of various adhesion layers for platinum. In: Proceedings of SPIE - The International Society for Optical Engineering
Ababneh A, Al-Omari AN, Dagamseh AMK et al (2017) Electrical and morphological characterization of platinum thin-films with various adhesion layers for high temperature applications. Microsyst Technol 23:703–709
Burns GP (1989) Titanium dioxide dielectric films formed by rapid thermal oxidation. J Appl Phys 65:2095
Cesar RR, Barros AD, Doil I, Diniz JA, Swart JW (2014) Thin titanium oxide films obtained by RTP and by Sputtering. In: 29thIEEE symposium on Microelectronics technology and devices (SBMicro)
Eichorst DJ, Blanton TN, Barnes CL, Bosworth LA (2006) Influence of processing conditions on hillock formation in electron-beam evaporated platinum/titanium films. Integr Ferroelectr 4(3):239–246
Ezzat MA, El-Bary AA (2016) Effects of variable thermal conductivity on Stoke’s flow of a thermoelectric fluid with fractional order of heat transfer. Int J Therm Sci 100:305–315
Firebaugh SL, Jensen KF, Schmidt MA (1998) Investigation of high-temperature degradation of platinum thin films with an in- situ resistance measurement apparatus. J Microelectromech Syst 7(1):128–135
Guarnieri V, Biazi L, Marchiori R, Lago A (2014) Platinum metallization for MEMS application focus on coating adhesion for biomedical applications. Biomatter 4:e28822
Jeroish ZE, Bhuvaneshwari KS, Samsuri F, Narayanamurthy V (2022) Microheater: material, design, fabrication, temperature control and applications—a role in COVID-19. Biomed Microdev 24:3
Kang J, Park JS, Park KB et al (2017) Temperature control of micro heater using Pt thin film temperature sensor embedded in micro gas sensor. Micro Nano Syst Lett 5:26
Liu H, Zhang L, Li KHH, Tan OK (2018) Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach. Micromachines 9(11):557
Magno M, Jelicic V, Chikkadi K, Roman C et al (2016) Low-power gas sensing using single walled carbon nano tubes in wearable devices. IEEE Sens J 16:23
Prajesh R, Jain N, Agarwal A (2016) Low power highly sensitive platform for gas sensing application. Microsyst Technol 22:2185–2192
Prasad M, Dutta PS (2018) Development of micro-hotplate and its reliability for gas sensing applications. J Appl Phys A Mater Sci Process 124:788
Puigcorbe J, Vogel D, Michel B et al (2003) High temperature degradation of Pt/Ti electrodes in micro-hotplate gas sensors. J Micromech Microeng 13:119–124
Resnik D, Vrtačnik D, Aljančič U, Možek M, Amon S (2009) Experimental study of Ti/Pt thin film heater and temperature sensors on Si platform. In: IEEE Sensors Conference
Schmid U (2008) The impact of thermal annealing and adhesion film thickness on the resistivity and the agglomeration behavior of titanium/platinum thin films. J Appl Phys 103:054902
Schmid U, Seidel H (2008) Effect of high temperature annealing on the electrical performance of titanium/platinum thin films. Thin Solid Films 516:898–906
Senturia SD (2002) Microsystem design. Kluwer Academic Publishers, Massachusetts Institute of Technology (0-7923-7246-8)
Vieira E, Sousa R, Ribeiro JF, Silva MM (2016) Titanium oxide adhesion layer for high temperature annealed Si/Si3N4/TiOx /Pt/LiCoO2 battery structures. J Electron Mater 45:910–916
Xu L, Li T, Gao X, Wang Y (2011) Development of a reliable micro-hotplate with low power consumption. IEEE Sens J 11(4):913–919
Acknowledgements
Authors would like to thank Sh. Surinder Singh (Director, SCL) for his continuous motivation to carry out this work. We also thank MEMS Fabrication Division (MFD) team for carrying out the fabrication of micro-heater. We also want to thank SCL’s VLSI Test Division (VTD), VLSI Packaging Division (VPD) and Sh. Rohit Ranjan (PTDD) for providing the testing, annealing and SEM services without which this study could not be accomplished successfully.
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Chauhan, A.K., Tiwari, S., Singh, S. et al. Experimental study of thermal annealing effects on evaporated platinum thin film with various substrate configurations. Microsyst Technol 29, 107–114 (2023). https://doi.org/10.1007/s00542-022-05394-6
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DOI: https://doi.org/10.1007/s00542-022-05394-6