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Decoupling and control of micromotion stage based on hysteresis of piezoelectric actuation

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Abstract

This paper presents the mechanism and control design of a micro-motion stage, which employs the right-angle flexure hinges and piezoelectric actuators (PZT). Aiming at the mechanism with the characteristics of a large stroke and three degrees of freedom, analytical models of statics and dynamics are established; especially the coupling motions of stage are investigated, which are verified by finite element analysis simulation. Via open-loop experiment, the decoupling property is well certified. Owing to the hysteresis of PZT, the dynamic equation of system with Bouc–Wen hysteresis model is proposed, which is identified through the Least squares. Moreover, a closed-loop controller of proportion integral derivative combined with the inverse hysteresis model-based feedforward is developed to reduce the nonlinearity and uncertainty, which can improve the positioning accuracy. Besides, the single-axis and multi-axis motions are tested. Experimental results reveal that the stage has a well-decoupling performance, and the effectiveness of proposed Bouc–Wen model is validated under open-loop control. Furthermore, the micro-motion performance in single- and multi-axis motions can be achieved as well.

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Acknowledgements

This work is supported by the National Natural Science Foundation of China (No. 51675060) and the Fundamental Research Funds for the Central Universities (No. 106112017CDJPT280002).

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Authors and Affiliations

  1. State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing, 400030, China

    Chao Lin, Jiang Yu, Zhaohui Wu & Zhonglei Shen

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  1. Chao Lin
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  2. Jiang Yu
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  3. Zhaohui Wu
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  4. Zhonglei Shen
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Correspondence to Chao Lin.

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Lin, C., Yu, J., Wu, Z. et al. Decoupling and control of micromotion stage based on hysteresis of piezoelectric actuation. Microsyst Technol 25, 3299–3309 (2019). https://doi.org/10.1007/s00542-019-04501-4

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