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Characteristic analysis of unidirectional multi-driven and large stroke micro/nano-transmission platform

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Abstract

In order to improve the working stroke of micro/nano-transmission platform (MNTP) , a unidirectional multi-driven compliant mechanism based on the right-angle flexure hinges is designed. Applying the compliant mechanisms, elastic mechanics, and combining the working principle of MNTP, the mechanics models of bridge-type amplification mechanism (BTAM) and MNTP are built. Stiffness matrices, stress and strain, natural frequency, and sensitivity are derived. Also, the posture state equations of MNTP are established to predict the mechanism behavior. Then a few simulation calculations through Matlab software are carried out. In terms of Ansys 14.5 software, the simulation motions of the MNTP are acquired. The MNTP is machined through wire cut electrical discharge machining, and the measurement experiments of MNTP are established to verify the computational predictions, and the ability of the proposed mechanism with large working stroke is demonstrated in the experimental study. Finally, the theoretical values, finite element values and experimental values are comparatively analyzed, especially the output results of X/Y-direction in single-driven and double-driven mode. As a result, the reasonability of theoretical model of MNTP is verified. And a reference basis in the study of large stroke micro platform is provided.

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Authors and Affiliations

  1. State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing, 400030, China

    Chao Lin, Zhaohui Wu & Yihang Ren

  2. Aerospace System Engineering Shanghai, Shanghai, 201108, China

    Hong Yu

Authors
  1. Chao Lin
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  2. Zhaohui Wu
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  3. Yihang Ren
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  4. Hong Yu
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Correspondence to Chao Lin.

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Lin, C., Wu, Z., Ren, Y. et al. Characteristic analysis of unidirectional multi-driven and large stroke micro/nano-transmission platform. Microsyst Technol 23, 3389–3400 (2017). https://doi.org/10.1007/s00542-016-3130-x

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  • DOI: https://doi.org/10.1007/s00542-016-3130-x

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