Abstract
In this paper a miniature piezoelectric energy harvester (PEH) with clamped–clamped beam and mass loading at the center is introduced which has more consistency against off-axis accelerations and more efficiency in comparison to other cantilever PEH’s. The beams consist of different layers of Si, piezoelectric, and insulators based on MEMS technology that vibrates by applying an external force to the fixed frame. Due to beam vibration, variable stress is applied to the AlN piezoelectric and a potential difference is created at the output terminals. AlN is deposited on clamped–clamped beams in such a way that produce more stress points which cause more power to be generated in comparison to other cantilever beam PEH’s with about same dimensions. A partial differential equations (PDE) describing the flexural wave propagating in the multi-morph clamped–clamped beam are solved as theoretical calculations for inherent frequency estimation and is confirmed by simulation results. The obtained inherent frequency is 42 Hz which with 1 g (g = 9.81 m/s2) acceleration produces 4 V and 80 µW maximum electrical peak power that can be used in the node of low-power consumption wireless sensor node for wireless sensor network (WSN) applications.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
Notes
Plasma enhanced chemical vapor deposition.
Deep reactive ion etching.
References
Andosca R, Gus McDonald T, Genova V, Rosenberg S, Keating J, Benedixon C, Wu J (2012) Experimental and theoretical studies on MEMS piezoelectric vibrational energy harvesters with mass loading. Sens Actuators. https://doi.org/10.1016/j.sna.2012.02.028
Arms SW, Townsend CP, Churchill DL, Galbreath JH (2005) Power management for energy harvesting wireless sensors. In: Proceedings of SPIE international symposium on smart structures and smart materials, San Diego, CA, pp 1–9
Auld BA (1990) Acoustic fields and waves in solids, vol I, 2nd edn. Krieger Publishing Co, Malabar
Bhugra H, Piazza G (2017) Piezoelectric MEMS resonators (microsystems and nanosystems). Springer, p 215 (ISBN-13: 978-3319286860)
Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2002/95/EC commonly referred to as the Restriction of Hazardous Substances Directive or RoHS was adopted in February 2003 by the European Union (2011) http://en.wikipedia.org/wiki/RestrictionofHazardousSubstancesDirective
Elfrink R, Kamel TM, Goedbloed M, Matova S, Hohlfeld D, Schaijk RV, Vullers R (2009) Vibration energy harvesting with aluminum nitride-based piezoelectric devices. J Micromech Microeng. https://doi.org/10.1088/0960-1317/19/9/094005
Han D, Yun KS (2015) Piezoelectric energy harvester using mechanical frequency up conversion for operation at low-level accelerations and low-frequency vibration. Microsyst Technol. https://doi.org/10.1007/s00542-014-2261-1
Jia Y, Du S, Seshia AA (2015) Cantilevers-on-membrane design for broadband MEMS piezoelectric vibration energy harvesting. J Phys Conf Ser 660:012030. https://doi.org/10.1088/1742-6596/660/1/012030
Kathpalia B, Tan D, Stern I, Valdes F, Kim S, Erturk A (2017) Modeling and characterization of curved piezoelectric energy harvester for smart paver tiles. Proc Comput Sci 109C(2017):1060–1066
Liu Y, Zhao Y, Tian B, Sun L, Yu Z, Jiang Z (2014) Analysis and design for piezoresistive accelerometer geometry considering sensitivity, resonant frequency and cross-axis sensitivity. Microsyst Technol 20(3):463–470
Lueke J, Moussa WA (2011) MEMS-based power generation techniques for implantable biosensing applications. Sensors. https://doi.org/10.3390/s110201433(ISSN 1424-8220)
Mallela VS, Ilankumaran V and Srinivasa N (2004) Trends in cardiac pacemaker batteries. Indian Pacing Electrophysiol J 4(4). (ISSN0972-6292). https://www.ncbi.nlm.nih.gov/pmc/articles/PMC1502062. Accessed 01 Oct 2004
Meirovitch L (2001) Fundamentals of vibrations. McGraw-Hill, New York
Meruane V, Pichara K (2016) A broadband vibration-based energy harvester using an array of piezoelectric beams connected by springs. Shock Vib. https://doi.org/10.1155/2016/9614842
Mobki H, Sadeghi M, Rezazadeh Gh, Fathalilou M, Keyvani A (2014) Nonlinear behavior of a nano-scale beam considering length scale-parameter. Appl Math Model. https://doi.org/10.1016/j.apm.2013.10.001
Nabavi S, Zhang L (2017) Design and optimization of wideband multimode piezoelectric MEMS vibration energy harvesters. In: Eurosensors 2017 Conference. https://doi.org/10.3390/proceedings1040586
Nechibvute A (2012) Piezoelectric energy harvesting devices: an alternative energy source for wireless sensors. Smart Mater Res. https://doi.org/10.1155/2012/853481
Quinnell R (2009) Energy scavenging yields endless power possibilities. Electron. 22. http://www.electronicdesign.com/energy. Accessed 08 Apr 2009
Rahimi Z, Rezazadeh Gh, Sadeghian H (2018) Study on the size dependent effective Young modulus by EPI method based on modified couple stress theory. Microsyst Technol. https://doi.org/10.1007/s00542-018-3708-6
Roundy S (2005) On the effectiveness of vibration-based energy harvesting. J Intell Mater Syst Struct 16:809–823
Saadon S, Sidek O (2015) Micro-electro-mechanical system (MEMS)-based piezoelectric energy harvester for ambient vibrations. Proc Soc Behav Sci 195(2015):2353–2362. https://doi.org/10.1016/j.sbspro.2015.06.198
Sadeghian H, Yang CK, Goosen JFL (2010) Effects of size and defects on the elasticity of silicon nanocantilevers. J Micromech Microeng. https://doi.org/10.1088/0960-1317/20/6/064012
Shaker FJ (1975) Effect of axial load on mode shape and frequencies of beams. National Aeronautics and space administration, Washington, DC
Tang G, Yang B, Hou C, Li G, Liu J, Chen X, Yang C (2016) A piezoelectric micro generator worked at low frequency and high acceleration based on PZT and phosphor bronze bonding. Sci Rep. https://doi.org/10.1038/srep38798
Vullers RR (2009) Micropower energy harvesters for autonomous wireless sensor nodes: from lab to reality. In: 2009 Sensors Expo and Conference, Chicago
Wang X (2016) Frequency analysis of vibration energy harvesting systems. Elsevier Science, London. (ISBN 978-0-12-802321-1)
Yu JC, Lee C, Kuo W, Chang C (2011) Modeling analysis of a triaxial microaccelerometer with piezoelectric thin-film sensing using energy method. Microsyst Technol 17(4):483–493
Yun H, Zhou J, Deng L, Wen Z (2014) A vibration-based MEMS piezoelectric energy harvester and power conditioning circuit. Sensors. https://doi.org/10.3390/s140203323
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Damya, A., Abbaspour Sani, E. & Rezazadeh, G. An innovative piezoelectric energy harvester using clamped–clamped beam with proof mass for WSN applications. Microsyst Technol 26, 3203–3211 (2020). https://doi.org/10.1007/s00542-018-3890-6
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-018-3890-6