Abstract
A light-weight Wolter type-I telescope for future space X-ray observations is prototyped by using micromachining technologies. Curvilinear micro pores with a width of 20 \(\upmu\)m are fabricated with deep reactive ion etching. Sidewalls of the pores are smoothed with high temperature annealing. Then, two wafers are deformed to different curvature radii, 1000 and 333 mm. The two wafers are aligned using parallel X-ray beams which are dominated by Al-K\(_{\alpha }\) line at 1.49 keV. High angular and positional accuracies of the order of arcsec and \(\upmu\)m are achieved using movable stages. The first clear X-ray focusing is confirmed. Its angular resolution is 4.1 arcmin in full width half maximum while it is at least 92 arcmin in half power width. The effective area is 19.0 mm\(^2\) which is \(\sim\)5 times smaller than a model calculation. We discuss causes of the degraded angular resolution and effective area and also future improvements.
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Acknowledgments
The authors would like to express their deepest gratitude to the ISAS/JAXA beamline team and Dr. Makoto Mita for technical support for this study. Careful reading and comments on the manuscript by Dr. Magnus Axelsson are gratefully acknowledged. This work was financially supported by Grant-in-Aid for Young Scientists A 23684009 and Grant-in-Aid for JSPS Fellows 13J05865.
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Ogawa, T., Ezoe, Y., Kakiuchi, T. et al. First X-ray imaging with a micromachined Wolter type-I telescope. Microsyst Technol 23, 1101–1116 (2017). https://doi.org/10.1007/s00542-016-2906-3
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DOI: https://doi.org/10.1007/s00542-016-2906-3