Skip to main content
SpringerLink
Log in

Silicon Pore Optics

  • Living reference work entry
  • First Online:
Handbook of X-ray and Gamma-ray Astrophysics

Abstract

Silicon Pore Optics (SPO) uses commercially available monocrystalline double-sided super-polished silicon wafers as a basis to produce mirrors that form lightweight high-resolution X-ray optics. The technology has been invented by cosine measurement systems and the European Space Agency (ESA) and developed together with scientific and industrial partners to mass production levels. It leverages techniques and processes developed over decades by the semiconductor industry to handle, process, and clean silicon wafers and plates. SPO is an enabling technology for large spaceborne X-ray telescopes such as Athena and ARCUS, operating in the 0.2–12 keV band, with angular resolution aiming for 5 arcsec. SPO has also shown to be a versatile technology that can be further developed for gamma-ray optics, medical applications, and material research.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution

Institutional subscriptions

References

  • M.D. Ackermann, M.J. Collon, R. Guenther, R. Partapsing, G. Vacanti, E.J. Buis, M. Krumrey, P. Müller, M.W. Beijersbergen, M. Bavdaz, K. Wallace, Performance prediction and measurement of silicon pore optics in Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV, ed. by S.L. O’Dell, G. Pareschi. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 7437 (2009), p. 74371N. https://doi.org/10.1117/12.826840

  • M. Ackermann, G. Vacanti, M. Vervest, Method for assembling an imaging x-ray optic. NL1041110A;NL1041110B1 (2014)

    Google Scholar 

  • N.M. Barrière, G. Vacanti, S. Verhoeckx, E. Hauser, M. Vervest, L. Keek, B. Okma, B. Landgraf, R. Günther, L. Voruz, D. Girou, L. Babić, M.J. Collon, M.W. Beijersbergen, M. Bavdaz, E. Wille, S. Fransen, J. Haneveld, A. Koelewijn, R. Start, M. Wijnperle, J.J. Lankwarden, C. van Baren, A. Eigenraam, P. Müller, E. Handick, M. Krumrey, G. Valsecchi, Assembly of confocal silicon pore optic mirror modules for Athena, in Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11119 (2019), p. 111190J. https://doi.org/10.1117/12.2530706

  • N.M. Barrière, L. Babić, A. Bayerle, L. Castiglione, M.J. Collon, N. Eenkhoorn, D. Girou, R. Günther, E. Hauser, Y. Jenkins, B. Landgraf, L. Keek, B. Okma, G. Mendoza Serano, A. Thete, G. Vacanti, S. Verhoeckx, M. Vervest, L. Voruz, M.W. Beijersbergen, M. Bavdaz, E. Wille, I. Ferreira, S. Fransen, M. Olde Riekerink, J. Haneveld, B. Schurink, R. Start, C. van Baren, E. Handick, M. Krumrey, G. Valsecchi, M. Bradshaw, V. Burwitz, Assembly of confocal silicon pore optics mirror modules, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11822 (2021), p. 1182208. https://doi.org/10.1117/12.2594171

  • M. Bavdaz, M.W. Beijersbergen, Optical Reflector Element, its Method of Fabrication, and an Optical Instrument Implementing Such Elements (European Space Agency, Paris, 2005)

    Google Scholar 

  • M. Bavdaz, E. Wille, M. Ayre, I. Ferreira, B. Shortt, S. Fransen, M. Millinger, M.J. Collon, G. Vacanti, N.M. Barriere, B. Landgraf, M.O. Riekerink, J. Haneveld, R. Start, C. van Baren, D.D.M. Ferreira, S. Massahi, S. Svendsen, F. Christensen, M. Krumrey, E. Handick, V. Burwitz, M. Bradshaw, G. Pareschi, G. Valsecchi, D. Vernani, G. Kailla, W. Mundon, G. Phillips, J. Schneider, T. Korhonen, A. Sanchez, D. Heinis, C. Colldelram, M. Torti, R. Willingale, ATHENA x-ray optics development and accommodation, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11822 (2021), p. 1182205. https://doi.org/10.1117/12.2594689

  • M. Beijersbergen, S. Kraft, R. Gunther, A.L. Mieremet, M. Collon, M. Bavdaz, D.H. Lumb, A.J. Peacock, Silicon pore optics: novel lightweight high-resolution X-ray optics developed for XEUS, in UV and Gamma-Ray Space Telescope Systems, ed. by G. Hasinger, M.J.L. Turner. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 5488 (2004), pp. 868–874. https://doi.org/10.1117/12.585122

  • V. Burwitz, M. Bavdaz, E. Wille, M. Collon, G. Vacanti, N. Barriere, G. Valsecchi, F. Marioni, D. Vernani, T. Seure, S. Blum, R. Willingale, R. Smith, C. de Roo, E. Hertz, G. Hartner, M.M. La Caria, C. Pelliciari, A. Langmeier, S.F. Hartl, X-ray testing at PANTER of optics for the ATHENA and Arcus Missions, in International Conference on Space Optics – ICSO 2018. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11180 (2019), p. 1118024. https://doi.org/10.1117/12.2535995

  • R.C. Chase, L.P. van Speybroeck, Wolter-Schwarzschild telescopes for X-ray astronomy. Appl. Opt. 12, 1042–1044 (1973). https://doi.org/10.1364/AO.12.001042

    Article  ADS  Google Scholar 

  • F.E. Christensen, A.C. Jakobsen, N.F. Brejnholt, K.K. Madsen, A. Hornstrup, N.J. Westergaard, J. Momberg, J. Koglin, A.M. Fabricant, M. Stern, W.W. Craig, M.J. Pivovaroff, D. Windt, Coatings for the NuSTAR mission, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 8147, ed. by S.L. O’Dell, G. Pareschi (2011), p. 81470U. https://doi.org/10.1117/12.894615

  • M.J. Collon, S. Kraft, R. Günther, E. Maddox, M. Beijersbergen, M. Bavdaz, D. Lumb, K. Wallace, M. Krumrey, L. Cibik, M. Freyberg, Performance characterization of silicon pore optics, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 6266, ed. by M.J.L. Turner, G. Hasinger (2006), p. 62661T

    Google Scholar 

  • M.J. Collon, R. Günther, M. Ackermann, R. Partapsing, G. Vacanti, M.W. Beijersbergen, M. Bavdaz, K. Wallace, E. Wille, M. Olde Riekerink, J. Haneveld, A. Koelewijn, C. van Baren, P. Müller, M. Krumrey, M. Freyberg, A.C. Jakobsen, F. Christensen, Design, fabrication, and characterization of silicon pore optics for ATHENA/IXO, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 8147, ed. by S.L. O’Dell, G. Pareschi (2011), p. 81470D. https://doi.org/10.1117/12.893418

  • M.J. Collon, M. Ackermann, R. Günther, G. Vacanti, M.W. Beijersbergen, M. Bavdaz, E. Wille, K. Wallace, J. Haneveld, M. Olde Riekerink, A. Koelewijn, C. van Baren, P. Müller, M. Krumrey, V. Burwitz, G. Sironi, M. Ghigo, Aberration-free silicon pore x-ray optics, in Optics for EUV, X-Ray, and Gamma-Ray Astronomy VI, ed. by S.L. O’Dell, G. Pareschi. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 8861 (2013), p. 88610M. https://doi.org/10.1117/12.2024982

  • M.J. Collon, G. Vacanti, R. Günther, A. Yanson, N. Barrière, B. Landgraf, M. Vervest, A. Chatbi, M.W. Beijersbergen, M. Bavdaz, E. Wille, J. Haneveld, A. Koelewijn, A. Leenstra, M. Wijnperle, C. van Baren, P. Müller, M. Krumrey, V. Burwitz, G. Pareschi, P. Conconi, F.E. Christensen, Silicon pore optics development for ATHENA, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 9603 (2015), p. 96030K. https://doi.org/10.1117/12.2188988

  • M.J. Collon, G. Vacanti, N.M. Barrière, B. Landgraf, R. Günther, M. Vervest, R. van der Hoeven, D. Dekker, A. Chatbi, D. Girou, J. Sforzini, M.W. Beijersbergen, M. Bavdaz, E. Wille, S. Fransen, B. Shortt, J. Haneveld, A. Koelewijn, K. Booysen, M. Wijnperle, C. van Baren, A. Eigenraam, P. Müller, M. Krumrey, V. Burwitz, G. Pareschi, S. Massahi, F.E. Christensen, D. Della Monica Ferreira, G. Valsecchi, P. Oliver, I. Checquer, K. Ball, K.H. Zuknik, Development of ATHENA mirror modules, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 10399 (2017), p. 103990C. https://doi.org/10.1117/12.2273704

  • M.J. Collon, G. Vacanti, N.M. Barrière, B. Landgraf, R. Günther, M. Vervest, L. Voruz, S. Verhoeckx, L. Babić, L. Keek, D. Girou, B. Okma, E. Hauser, M.W. Beijersbergen, M. Bavdaz, E. Wille, S. Fransen, B. Shortt, I. Ferreira, J. Haneveld, A. Koelewijn, R. Start, M. Wijnperle, J.J. Lankwarden, C. van Baren, P. Hieltjes, J.W. den Herder, P. Müller, E. Handick, M. Krumrey, M. Bradshaw, V. Burwitz, G. Pareschi, S. Massahi, S. Svendsen, D. Della Monica Ferreira, F.E. Christensen, G. Valsecchi, P. Oliver, I. Chequer, K. Ball, Status of the silicon pore optics technology, in Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11119 (2019), p. 111190L. https://doi.org/10.1117/12.2530696

  • M.J. Collon, L. Babic, N.M. Barrière, A. Bayerle, L. Castiglione, N. Eenkhoorn, D. Girou, R. Günther, E. Hauser, Y. Jenkins, B. Landgraf, L. Keek, B. Okma, G. Mendoza Serrano, A. Thete, G. Vacanti, S. Verhoeckx, M. Vervest, L. Voruz, M.W. Beijersbergen, M. Bavdaz, E. Wille, I. Ferreira, S. Fransen, B. Shortt, M. Olde Riekerink, J. Haneveld, A. Koelewijn, M. Wijnperle, J.J. Lankwarden, B. Schurink, R. Start, C. van Baren, P. Hieltjes, J.W. den Herder, E. Handick, M. Krumrey, M. Bradshaw, V. Burwitz, S. Massahi, S. Svendsen, D. Della Monica Ferreira, F.E. Christensen, G. Valsecchi, G. Kailla, W. Mundon, G. Philips, K. Ball, Silicon pore optics x-ray mirror development for the Athena telescope, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11822 (2021), p. 1182206. https://doi.org/10.1117/12.2593505

  • G. Conti, E. Mattaini, E. Santambrogio, B. Sacco, G. Cusumano, O. Citterio, H.W. Braeuninger, W. Burkert, X-ray characteristics of the Italian X-Ray Astronomy Satellite (SAX) flight mirror units, in Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, ed. by R.B. Hoover, A.B. Walker. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 2279 (1994), pp. 101–109. https://doi.org/10.1117/12.193179

  • P.A.J. de Korte, J.M. Bleeker, A.J.F. den Boggende, G. Branduardi-Raymont, A.C. Brinkman, J.L. Culhane, E.H.B.M. Gronenschild, I. Mason, S.P. McKechnie, The X-ray imaging telescopes on EXOSAT. Space Sci. Rev. 30(1–4), 495–511 (1981). https://doi.org/10.1007/BF01246070

    Article  ADS  Google Scholar 

  • D. Della Monica Ferreira, S. Svendsen, S. Massahi, A. Jafari, L.M. Vu, J. Korman, N.C. Gellert, F.E. Christensen, S. Kadkhodazadeh, T. Kasama, B. Shortt, M. Bavdaz, M.J. Collon, B. Landgraf, M. Krumrey, L. Cibik, S. Schreiber, A. Schubert, Performance and stability of mirror coatings for the ATHENA mission, in Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray, ed. by J.W.A. den Herder, S. Nikzad, K. Nakazawa. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 10699 (2018), p. 106993K. https://doi.org/10.1117/12.2313275

  • I. Ferreira, M. Bavdaz, M. Ayre, S. Fransen, A. Pacros, M. Linder, A. Stefanescu, M. Branco, M. Guainazzi, J.U. Ness, T. Oosterbroek, R. Willingale, ATHENA reference telescope design and recent mission level consolidation, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11822 (2021), p. 1182204. https://doi.org/10.1117/12.2594443

  • U. Gösele, Q.Y. Tong, Semiconductor wafer bonding. Annu. Rev. Mater. Sci. 28(1), 215–241 (1998). https://doi.org/10.1146/annurev.matsci.28.1.215

    Article  ADS  Google Scholar 

  • D. Girou, S. Massahi, D.M. Ferreira, F.E. Christensen, B. Landgraf, B. Shortt, M. Collon, M. Beijersbergen, Plasma etching for the compatibility of thin film metallic coatings and direct bonding of silicon pore optics. J. Appl. Phys. 128(9), 095302 (2020). https://doi.org/10.1063/5.0010212

  • D. Girou, E. Ford, C. Wade, C. van Aarle, A. Uliyanov, L. Hanlon, J.A. Tomsick, A. Zoglauer, M.J. Collon, M.W. Beijersbergen, N.M. Barrière, Design and modeling of a laue lens for radiation therapy with hard x-ray photons. Phys. Med. Biol. 66(24), 245007 (2021a). https://doi.org/10.1088/1361-6560/ac3840

  • D.A. Girou, C. van Baren, I. te Kloeze, L. Castiglione, B. Okma, G. Vacanti, E. Hauser, L. Babic, A. Bayerle, N.M. Barrière, N. Eenkhoorn, R. Günther, Y. Jenkins, B. Landgraf, L. Keek, A. Thete, S. Verhoeckx, M. Vervest, L. Voruz, M. Collon, M. Beijersbergen, S. Fransen, G. Campoli, I. Ferreira, E. Wille, M. Bavdaz, F. Marioni, G. Valsecchi, Environmental testing of the Athena telescope mirror modules, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11822 (2021b), p. 1182209. https://doi.org/10.1117/12.2594230

  • P. Gondoin, K. van Katwijk, B.R. Aschenbach, N. Schulz, R. Boerret, H. Glatzel, O. Citterio, X-ray spectroscopy mission (XMM) telescope development, in Space Optics 1994: Earth Observation and Astronomy, ed. by M.G. Cerutti-Maori, P. Roussel. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 2209 (1994), pp. 438–450. https://doi.org/10.1117/12.185278

  • P. Gorenstein, Focusing X-ray optics for astronomy. X-Ray Opt. Instrum. 2010, 109740 (2010). https://doi.org/10.1155/2010/109740

    Google Scholar 

  • R. Günther, M. Collon, S. Kraft, M. Beijersbergen, M. Bavdaz, D. Lumb, A. Peacock, K. Wallace, Production of silicon pore optics, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 6266, ed. by M.J.L. Turner, G. Hasinger (2006), p. 626619. https://doi.org/10.1117/12.673248

  • E. Handick, L. Cibik, M. Krumrey, P. Müller, N. Barrière, M. Collon, E. Hauser, G. Vacanti, S. Verhoeckx, M. Bavdaz, E. Wille, Upgrade of the x-ray parallel beam facility XPBF 2.0 for characterization of silicon pore optics, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11444 (2020), p. 114444G. https://doi.org/10.1117/12.2561236

  • F.A. Harrison, W.W. Craig, F.E. Christensen, C.J. Hailey, W.W. Zhang, S.E. Boggs, D. Stern, W.R. Cook, K. Forster, P. Giommi, B.W. Grefenstette, Y. Kim, T. Kitaguchi, J.E. Koglin, K.K. Madsen, P.H. Mao, H. Miyasaka, K. Mori, M. Perri, M.J. Pivovaroff, S. Puccetti, V.R. Rana, N.J. Westergaard, J. Willis, A. Zoglauer, H. An, M. Bachetti, N.M. Barrière, E.C. Bellm, V. Bhalerao, N.F. Brejnholt, F. Fuerst, C.C. Liebe, C.B. Markwardt, M. Nynka, J.K. Vogel, D.J. Walton, D.R. Wik, D.M. Alexander, L.R. Cominsky, A.E. Hornschemeier, A. Hornstrup, V.M. Kaspi, G.M. Madejski, G. Matt, S. Molendi, D.M. Smith, J.A. Tomsick, M. Ajello, D.R. Ballantyne, M. Baloković, D. Barret, F.E. Bauer, R.D. Blandford, W.N. Brandt, L.W. Brenneman, J. Chiang, D. Chakrabarty, J. Chenevez, A. Comastri, F. Dufour, M. Elvis, A.C. Fabian, D. Farrah, C.L. Fryer, E.V. Gotthelf, J.E. Grindlay, D.J. Helfand, R. Krivonos, D.L. Meier, J.M. Miller, L. Natalucci, P. Ogle, E.O. Ofek, A. Ptak, S.P. Reynolds, J.R. Rigby, G. Tagliaferri, S.E. Thorsett, E. Treister, C.M. Urry, The nuclear spectroscopic telescope array (NuSTAR) high-energy x-ray mission. Asian Pac. J. 770(2), 103 (2013). https://doi.org/10.1088/0004-637X/770/2/103

  • D. Heinis, A. Carballedo, C. Colldelram, G. Cuní, N. Valls Vidal, Ó. Matilla, J. Marcos, A. Sánchez, J. Casas, J. Nicolàs, N. Barrière, M.J. Collon, G. Vacanti, E. Handick, P. Müller, M. Krumrey, I. Ferreira, M. Bavdaz, X-ray facility for the characterization of the Athena mirror modules at the ALBA synchrotron, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11852 (2021), p. 1185222. https://doi.org/10.1117/12.2599350

  • A. Jafari, D.D.M. Ferreira, S. Kadkhodazadeh, T. Kasama, S. Massahi, S. Svendsen, L.M. Vu, P.L. Henriksen, Z.M. Balogh, M. Krumrey, L. Cibik, F.E. Christensen, B. Shortt, Long-term performance and durability of Ir/B4C multilayer x-ray mirrors: focusing on composition, structure, and reflectivity properties. J. Astron. Teles. Instrum. Syst. 6, 034005 (2020). https://doi.org/10.1117/1.JATIS.6.3.034005

    Article  ADS  Google Scholar 

  • F. Jansen, D. Lumb, B. Altieri, J. Clavel, M. Ehle, C. Erd, C. Gabriel, M. Guainazzi, P. Gondoin, R. Much, R. Munoz, M. Santos, N. Schartel, D. Texier, G. Vacanti, XMM-Newton observatory. I. The spacecraft and operations. Astronaut. Aeronaut. 365, L1–L6 (2001). https://doi.org/10.1051/0004-6361:20000036

    Google Scholar 

  • J. Kegley, XRCF Handbook (NASA Marshall Space Flight Center Huntsville, Huntsville, 2016). https://ntrs.nasa.gov/api/citations/20160003530/downloads/20160003530.pdf

    Google Scholar 

  • W. Kern, Cleaning solutions based on hydrogen peroxide for use in silicon semiconductor technology. RCA Rev. 31, 187–206 (1970). https://ci.nii.ac.jp/naid/10003367909/en/

    Google Scholar 

  • P. Kirkpatrick, A.V. Baez, Formation of optical images by x-rays. J. Opt. Soc. Am. (1917–1983) 38(9), 766 (1948)

    Google Scholar 

  • M. Krumrey, L. Cibik, P. Müller, M. Bavdaz, E. Wille, M. Ackermann, M.J. Collon, X-ray pencil beam facility for optics characterization, in SPIE Astronomical Telescopes + Instrumentation, 2010, San Diego (2010), p. 77324O. https://doi.org/10.1117/12.857335

  • M. Krumrey, P. Müller, L. Cibik, M. Collon, N. Barrière, G. Vacanti, M. Bavdaz, E. Wille, New x-ray parallel beam facility XPBF 2.0 for the characterization of silicon pore optics, in SPIE Astronomical Telescopes + Instrumentation, 2016, Edinburgh (2016), p. 99055N. https://doi.org/10.1117/12.2231687

  • B. Landgraf, M.J. Collon, G. Vacanti, N.M. Barrière, R. Günther, M. Vervest, L. Voruz, S. Verhoeckx, L. Babić, L. Keek, D. Girou, B. Okma, M.W. Beijersbergen, M. Bavdaz, E. Wille, S. Fransen, B. Shortt, I. Ferreira, J. Haneveld, A. Koelewijn, R. Start, M. Wijnperlé, J.J. Lankwarden, C. van Baren, P. Hieltjes, J.W. den Herder, V. Burwitz, G. Pareschi, S. Massahi, D. Della Monica Ferreira, F.E. Christensen, G. Valsecchi, P. Oliver, I. Chequer, K. Ball Development and manufacturing of SPO X-ray mirrors, in Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11119 (2019), p. 111190E. https://doi.org/10.1117/12.2530941

  • B. Landgraf, L. Babić, N.M. Barrière, A. Bayerle, L. Castiglione, M.J. Collon, N. Eenkhoorn, D. Girou, R. Günther, E. Hauser, Y. Jenkins, L. Keek, B. Okma, G.M. Serano, A. Thete, G. Vacanti, S. Verhoeckx, M. Vervest, L. Voruz, M.W. Beijersbergen, M. Bavdaz, E. Wille, I. Ferreira, S. Fransen, B. Shortt, M.O. Riekerink, J. Haneveld, A. Koelewijn, M. Wijnperlé, J.J. Lankwarden, B. Schurink, R. Start, C. van Baren, P. Hieltjes, J.W. den Herder, E. Handick, M. Krumrey, M. Bradshaw, V. Burwitz, S. Massahi, S. Svendsen, D.M. Ferreira, F.E. Christensen, G. Valsecchi, G. Kailla, G. Phillips, W. Mundon, I. Chequer, K. Ball, SPO mirror plate production and coating, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11822 (2021), p. 1182207. https://doi.org/10.1117/12.2594234

  • P. Lightsey, B. Gallagher, D. Chaney, B. Brown, James Webb space telescope primary mirror manufacturing, in American Astronomical Society Meeting Abstracts, vol. 213 (2009), p. 426.19

    Google Scholar 

  • S. Massahi, F.E. Christensen, D.M. Ferreira, A. Jafari, S. Svendsen, P.L. Henriksen, B. Shortt, I. Ferreira, M. Bavdaz, M. Collon, B. Landgraf, D. Girou, A. Langer, W. Schönberger, T. Wellner, M. Krumrey, L. Cibik, Installation and commissioning of the silicon pore optics coating facility for the ATHENA mission, in Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11119 (2019), p. 111190F. https://doi.org/10.1117/12.2528351

  • W.P. Maszara, G. Goetz, A. Caviglia, J.B. McKitterick, Bonding of silicon wafers for silicon-on-insulator. J. Appl. Phys. 64(10), 4943–4950 (1988). https://doi.org/10.1063/1.342443

    Article  ADS  Google Scholar 

  • N. Meidinger, S. Albrecht, C. Beitler, M. Bonholzer, V. Emberger, J. Frank, A. Lederhuber, J. Müller-Seidlitz, K. Nandra, J. Oser, S. Ott, M. Plattner, R. Strecker, Development status of the wide field imager instrument for Athena, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11444 (2020), p. 114440T. https://doi.org/10.1117/12.2560507

  • A. Merloni, P. Predehl, W. Becker, Böhringer, H., T. Boller, H. Brunner, M. Brusa, K. Dennerl, M. Freyberg, P. Friedrich, A. Georgakakis, F. Haberl, G. Hasinger, N. Meidinger, J. Mohr, K. Nandra, A. Rau, T.H. Reiprich, J. Robrade, M. Salvato, A. Santangelo, M. Sasaki, A. Schwope, J. Wilms, The German eROSITA Consortium, eROSITA Science Book: Mapping the Structure of the Energetic Universe. E-prints arXiv:1209.3114 (2012)

    Google Scholar 

  • A. Moretti, G. Pareschi, S. Basso, D. Spiga, M. Ghigo, G. Tagliaferri, G. Sironi, M. Civitani, V. Cotroneo, N. La Palombara, M. Uslenghi, M. Tordi, S. Delorenzi, G. Valsecchi, F. Zocchi, F. Marioni, D. Vernani, F. Amisano, G. Parissenti, G. Parodi, M. Ottolini, P. Corradi, M. Bavdaz, I. Ferreira,The VERT-X calibration facility: development of the most critical parts, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11822 (2021), p. 118220K. https://doi.org/10.1117/12.2593670

  • K. Nandra, D. Barret, X. Barcons, A. Fabian, J.W. den Herder, L. Piro, M. Watson, C. Adami, J. Aird, J.M. Afonso, D. Alexander, C. Argiroffi, L. Amati, M. Arnaud, J.L. Atteia, M. Audard, C. Badenes, J. Ballet, L. Ballo, A. Bamba, A. Bhardwaj, Stefano Battistelli, E., W. Becker, M. De Becker, E. Behar, S. Bianchi, V. Biffi, L. Bîrzan, F. Bocchino, S. Bogdanov, L. Boirin, T. Boller, S. Borgani, K. Borm, N. Bouché, H. Bourdin, R. Bower, V. Braito, E. Branchini, G. Branduardi-Raymont, J. Bregman, L. Brenneman, M. Brightman, M. Brüggen, J. Buchner, E. Bulbul, M. Brusa, M. Bursa, A. Caccianiga, E. Cackett, S. Campana, N. Cappelluti, M. Cappi, F. Carrera, M. Ceballos, F. Christensen, Y.H. Chu, E. Churazov, N. Clerc, S. Corbel, A. Corral, A. Comastri, E. Costantini, J. Croston, M. Dadina, A. D’Ai, A. Decourchelle, R. Della Ceca, K. Dennerl, K. Dolag, C. Done, M. Dovciak, J. Drake, D. Eckert, A. Edge, S. Ettori, Y. Ezoe, E. Feigelson, R. Fender, C. Feruglio, A. Finoguenov, F. Fiore, M. Galeazzi, S. Gallagher, P. Gandhi, M. Gaspari, F. Gastaldello, A. Georgakakis, I. Georgantopoulos, M. Gilfanov, M. Gitti, R. Gladstone, R. Goosmann, E. Gosset, N. Grosso, M. Guedel, M. Guerrero, F. Haberl, M. Hardcastle, S. Heinz, A. Alonso Herrero, A. Hervé, M. Holmstrom, K. Iwasawa, P. Jonker, J. Kaastra, E. Kara, V. Karas, J. Kastner, A. King, D. Kosenko, D. Koutroumpa, R. Kraft, I. Kreykenbohm, R. Lallement, G. Lanzuisi, J. Lee, M. Lemoine-Goumard, A. Lobban, G. Lodato, L. Lovisari, S. Lotti, I. McCharthy, B. McNamara, A. Maggio, R. Maiolino, B. De Marco, D. de Martino, S. Mateos, G. Matt, B. Maughan, P. Mazzotta, M. Mendez, A. Merloni, G. Micela, M. Miceli, R. Mignani, J. Miller, G. Miniutti, S. Molendi, R. Montez, A. Moretti, C. Motch, Y. Nazé, J. Nevalainen, F. Nicastro, P. Nulsen, T. Ohashi, P. O’Brien, J. Osborne, L. Oskinova, F. Pacaud, F. Paerels, M. Page, I. Papadakis, G. Pareschi, R. Petre, P.O. Petrucci, E. Piconcelli, I. Pillitteri, C. Pinto, J. de Plaa, E. Pointecouteau, T. Ponman, G. Ponti, D. Porquet, K. Pounds, G. Pratt, P. Predehl, D. Proga, D. Psaltis, D. Rafferty, M. Ramos-Ceja, P. Ranalli, E. Rasia, A. Rau, G. Rauw, N. Rea, A. Read, J. Reeves, T. Reiprich, M. Renaud, C. Reynolds, G. Risaliti, J. Rodriguez, P. Rodriguez Hidalgo, M. Roncarelli, D. Rosario, M. Rossetti, A. Rozanska, E. Rovilos, R. Salvaterra, M. Salvato, T. Di Salvo, J. Sanders, J. Sanz-Forcada, K. Schawinski, J. Schaye, A. Schwope, S. Sciortino, P. Severgnini, F. Shankar, D. Sijacki, S. Sim, C. Schmid, R. Smith, A. Steiner, B. Stelzer, G. Stewart, T. Strohmayer, L. Strüder, M. Sun, Y. Takei, V. Tatischeff, A. Tiengo, F. Tombesi, G. Trinchieri, T.G. Tsuru, A. Ud-Doula, E. Ursino, L. Valencic, E. Vanzella, S. Vaughan, C. Vignali, J. Vink, F. Vito, M. Volonteri, D. Wang, N. Webb, R. Willingale, J. Wilms, M. Wise, D. Worrall, A. Young, L. Zampieri, J. In’t Zand, S. Zane, A. Zezas, Y. Zhang, I. Zhuravleva, The hot and energetic universe: a white paper presenting the science theme motivating the Athena+ mission. e-prints arXiv:1306.2307 (2013)

    Google Scholar 

  • T. Okajima, Y. Soong, P. Serlemitsos, H. Mori, L. Olsen, D. Robinson, R. Koenecke, B. Chang, D. Hahne, R. Iizuka, M. Ishida, Y. Maeda, T. Sato, N. Kikuchi, S. Kurashima, N. Nakaniwa, T. Hayashi, K. Ishibashi, T. Miyazawa, K. Tachibana, K. Tamura, A. Furuzawa, Y. Tawara, S. Sugita, First peek of ASTRO-H Soft X-ray Telescope (SXT) in-orbit performance, in Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray, ed. by J.W.A. den Herder, T. Takahashi, M. Bautz. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 9905 (2016), p. 99050Z. https://doi.org/10.1117/12.2231705

  • F. Pajot, D. Barret, T. Lam-Trong, J.W. den Herder, L. Piro, M. Cappi, J. Huovelin, R. Kelley, J.M. Mas-Hesse, K. Mitsuda, S. Paltani, G. Rauw, A. Rozanska, J. Wilms, M. Barbera, F. Douchin, H. Geoffray, R. den Hartog, C. Kilbourne, M. Le Du, C. Macculi, J.M. Mesnager, P. Peille, The athena X-ray integral field unit (X-IFU). J. Low Temp. Phys. 193(5–6), 901–907 (2018). https://doi.org/10.1007/s10909-018-1904-5

    Article  ADS  Google Scholar 

  • G. Pareschi, A. Moretti, B. Salmaso, G. Sironi, G. Tagliaferri, M. Uslenghi, M. Fiorini, P. Attinà, R. Bressan, G. Marchiori, M. Tordi, F. Marioni, G. Valsecchi, F. Zocchi, A vertical facility based on raster scan configuration for the x-ray scientific calibrations of the ATHENA optics, in International Conference on Space Optics – ICSO 2018. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11180 (2019), p. 1118025. https://doi.org/10.1117/12.2535996

    Google Scholar 

  • T.T. Saha, W. Zhang, Equal-curvature grazing-incidence x-ray telescopes. Appl. Opt. 42(22), 4599 (2003). https://doi.org/10.1364/AO.42.004599

  • P.J. Serlemitsos, L. Jalota, Y. Soong, H. Kunieda, Y. Tawara, Y. Tsusaka, H. Suzuki, Y. Sakima, T. Yamazaki, H. Yoshioka, A. Furuzawa, K. Yamashita, H. Awaki, M. Itoh, Y. Ogasaka, H. Honda, Y. Uchibori, The X-ray telescope on board ASCA. Publ. Astron. Soc. Jpn. 47, 105–114 (1995)

    ADS  Google Scholar 

  • M. Shimbo, K. Furukawa, K. Fukuda, K. Tanzawa, Silicon-to-silicon direct bonding method. J. Appl. Phys. 60(8), 2987–2989 (1986). https://doi.org/10.1063/1.337750

    Article  ADS  Google Scholar 

  • R.K. Smith, The Arcus soft x-ray grating spectrometer explorer, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11444 (2020), p. 114442C. https://doi.org/10.1117/12.2576047

  • S. Svendsen, D.M. Ferreira, S. Massahi, A. Jafari, N.C. Gellert, F.E. Christensen, P.L. Henriksen, L.M. Vu, A.S. Jegers, B. Shortt, B. Landgraf, D.A. Girou, M.J. Collon, L. Cibik, E. Handick, M. Krumrey, Status of the Ir and Ir/SiC coating development for the Athena optics, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11444 (2020), p. 114444K. https://doi.org/10.1117/12.2562430

  • J. Truemper, The ROSAT mission. Adv. Space Res. 2(4), 241–249 (1982). https://doi.org/10.1016/0273-1177(82)90070-9

    Article  ADS  Google Scholar 

  • G. Vacanti, N. Barrière, M. Bavdaz, A. Chatbi, M. Collon, D. Dekker, D. Girou, R. Günther, R. van der Hoeven, M. Krumrey, B. Landgraf, P. Müller, S. Schreiber, M. Vervest, E. Wille, Measuring silicon pore optics, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 10399 (2017), p. 103990N. https://doi.org/10.1117/12.2274357

  • G. Vacanti, N.M. Barrière, M.J. Collon, E. Hauser, L. Babić, A. Bayerle, D. Girou, R. Günther, L. Keek, B. Landgraf, B. Okma, S. Verhoeckx, M. Vervest, L. Voruz, M. Bavdaz, E. Wille, M. Krumrey, P. Müller, E. Handick, X-ray testing of silicon pore optics, in Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11119 (2019), p. 111190I. https://doi.org/10.1117/12.2530977

  • G. Vacanti, N. Barrière, M.J. Collon, On the optical design of a large X-ray mirror based on silicon pore optics, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11822 (2021), p. 118220E. https://doi.org/10.1117/12.2594228

  • G. Vacanti et al., The optical design of x-ray mirrors based on Silicon Pore Optics, in Optics for EUV, X-Ray, and Gamma-Ray Astronomy X (2022), p. 118220E

    Google Scholar 

  • G. Valsecchi, F. Marioni, G. Bianucci, F.E. Zocchi, D. Gallieni, G. Parodi, M. Ottolini, M. Collon, M. Civitani, G. Pareschi, D. Spiga, M. Bavdaz, E. Wille, Optical integration of SPO mirror modules in the ATHENA telescope, in Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 10399 (2017), p. 103990E. https://doi.org/10.1117/12.2272997

  • L.P. van Speybroeck, Einstein Observatory /HEAO-B/ mirror design and performance, in Space Optics: Imaging X-Ray Optics Workshop, ed. by M. Weisskopf. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 184 (1979), pp. 2–11. https://doi.org/10.1117/12.957428

  • L.P. VanSpeybroeck, R.C. Chase, Design parameters of paraboloid-hyperboloid telescopes for x-ray astronomy. Appl. Opt. 11(2), 440 (1972). https://doi.org/10.1364/AO.11.000440

  • M.C. Weisskopf, B. Brinkman, C. Canizares, G. Garmire, S. Murray, L.P. Van Speybroeck, An overview of the performance and scientific results from the Chandra X-ray observatory. Publ. Astron. Soc. Jpn. 114(791), 1–24 (2002). https://doi.org/10.1086/338108

    Article  ADS  Google Scholar 

  • R. Willingale, Stray x-ray flux in the athena mirror, in Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX. Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, vol. 11119 (2019), p. 111190Q. https://doi.org/10.1117/12.2530682

  • R. Willingale, F.H.P. Spaan, Improving the angular resolution of the conical Wolter-I silicon pore optics (SPO) mirror design for the International X-ray Observatory (IXO), in Space Telescopes and Instrumentation 2010: Ultraviolet to Gamma Ray, San Diego (2010), p. 773241. https://doi.org/10.1117/12.857027

    Google Scholar 

  • H. Wolter, Spiegelsysteme streifenden Einfalls als abbildende Optiken für Röntgenstrahlen. Ann. Phys. 445(1), 94–114 (1952). https://doi.org/10.1002/andp.19524450108

    Article  MATH  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. cosine, Sassenheim, The Netherlands

    Nicolas M. Barrière, Maximilien J. Collon, David Girou, Boris Landgraf & Giuseppe Vacanti

  2. European Space Agency, ESTEC, Noordwijk, The Netherlands

    Marcos Bavdaz & Ivo Ferreira

Authors
  1. Nicolas M. Barrière
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Marcos Bavdaz
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Maximilien J. Collon
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Ivo Ferreira
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. David Girou
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Boris Landgraf
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Giuseppe Vacanti
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Nicolas M. Barrière .

Editor information

Editors and Affiliations

  1. Department of Physics, Fudan University, Shanghai, China

    Cosimo Bambi

  2. Inst. for Astronomy & Astrophysics, University of Tuebingen, Tuebingen, Baden-Württemberg, Germany

    Andrea Santangelo

Section Editor information

  1. NASA - Marshall Space Flight Center, Huntsville, Alabama, USA

    Jessica Gaskin

  2. Brera Astronomical Observatory, INAF - Istituto Nazionale di Astrofisica, Milan, Italy

    Daniele Spiga

  3. Astronomical Institute/CAS, Czechia, Czech Republic

    René Hudec

Rights and permissions

Reprints and permissions

Copyright information

© 2022 Springer Nature Singapore Pte Ltd.

About this entry

Check for updates. Verify currency and authenticity via CrossMark

Cite this entry

Barrière, N.M. et al. (2022). Silicon Pore Optics. In: Bambi, C., Santangelo, A. (eds) Handbook of X-ray and Gamma-ray Astrophysics. Springer, Singapore. https://doi.org/10.1007/978-981-16-4544-0_5-1

Download citation

  • DOI: https://doi.org/10.1007/978-981-16-4544-0_5-1

  • Published:

  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-16-4544-0

  • Online ISBN: 978-981-16-4544-0

  • eBook Packages: Springer Reference Physics and AstronomyReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics

Publish with us

Policies and ethics

Search

Navigation