Abstract
In this paper, negative permeability metamaterial medium is modeled using the split-ring resonator (SRR) structure and is fabricated for use in waveguides as filter. Starting from the basic resonant and magnetic plasma frequency equations, effects of the various structural parameters of the SRR on its performance are studied for the desired resonant frequency. After the optimization study of the SRR unit cell, an SRR array is modeled. Effects of the orientation of the rings and the array, and the position of the array are also studied for the best filter response. The optimization studies are carried out using the commercial solver, CST MWS. Finally, the SRR array consisting of 135 unit cells is fabricated on a conventional FR4 substrate using PCB printing technique. The SRR array is also fabricated on a non-conventional silicon substrate using UV-LIGA technique. Both the arrays are tested and the experimental results are compared with the simulation results.
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Acknowledgments
The authors would like to thank the Director, CSIR-CEERI for providing the opportunity to carry out the work. The authors are also thankful to members of Klystron Laboratory for providing Vector Network Analyzer and waveguide to carry out the experiment and to all members of MEMS Laboratory for help in smooth fabrication.
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Purushothaman, N., Jain, A., Taube, W.R. et al. Modeling and fabrication studies of negative permeability metamaterial for use in waveguide applications. Microsyst Technol 21, 2415–2424 (2015). https://doi.org/10.1007/s00542-014-2402-6
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DOI: https://doi.org/10.1007/s00542-014-2402-6