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Glancing angle sputter deposited tungsten trioxide (WO3) thin films for electrochromic applications

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Abstract

The columnar growth angle-dependent tungsten oxide (WO3) thin films were grown by using the Glancing angle sputter deposition (GLAD) technique with varying different substrate angles (00, 700, 750, and 800) on Fluorine-doped tin oxide (FTO) and Corning glass (CG) corning glass substrates at room temperature. The surface morphology, crystallographic structure, optical, and electrochemical properties were determined using X-ray diffraction (XRD), Field emission scanning electron microscopy (FE-SEM), Ultraviolet–Visible (UV–Vis) spectrometer, and electrochemical analyzer, respectively. The structural properties reveal that the films are amorphous in nature. FE-SEM studies observed the columnar growth of the nano-rods and surface porosity. The optical transmittance of the deposited films was decreased from 83 to 78%, and the optical bandgap decreased from 3.08 to 2.88 eV with increasing GLAD angle. The electrochemical studies reveal that the GLAD angle influenced the coloration efficiency (CE). The highest CE of 32 cm2/C at 600 nm and highest Diffusion coefficient (DC) of 6.529 × 10–9 cm2 s−1 of the films was observed for the films deposited at an angle of 750.

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Abbreviations

WO3 :

Tungsten oxide

GLAD:

Glancing angle sputter deposition

RF:

Radio frequency

FTO:

Fluorine doped tin oxide

CG:

Corning glass

XRD:

X-ray diffraction

FE-SEM:

Field emission scanning electron microscope

CE:

Coloration efficiency

TMO:

Transition metal oxides

CV:

Cyclic voltammograms

DC:

Diffusion coefficient

WE:

Working electrode

RE:

Reference electrode

CE:

Counter electrode

References

  1. D. Shao, M. Yu, J. Lian, S. Sawyer, An ultraviolet photodetector fabricated from WO3 nanodiscs/reduced graphene oxide composite material. Nanotechnology 24(29), 295701 (2013)

    Article  Google Scholar 

  2. H. Simchi, B.E. McCandless, T. Meng, W.N. Shafarman, Structural, optical, and surface properties of WO3 thin films for solar cells. J Alloys Compd. 617(302), 609–615 (2014)

    Article  Google Scholar 

  3. J.L. Solis, S. Saukko, L. Kish, C.G. Granqvist, V. Lantto, Semiconductor gas sensors based on nanostructured tungsten oxide. Thin Solid Films 391(2), 255–260 (2001)

    Article  Google Scholar 

  4. V. Lokhande, A. Lokhande, G. Namkoong, J.H. Kim, T. Ji, Charge storage in WO 3 polymorphs and their application as supercapacitor electrode material. Results Phys. (2019). https://doi.org/10.1016/j.rinp.2019.02.012

    Article  Google Scholar 

  5. M. Bb, K. VM., Structural, morphological and optical properties of electron beam evaporated WO 3 thin films. J. Taibah Univ. Sci. 11(6), 1232–1237 (2017). https://doi.org/10.1016/j.jtusci.2016.12.003

    Article  Google Scholar 

  6. Y. Djaoued, S. Balaji, R. Brüning, Electrochromic devices based on porous tungsten oxide thin films. J. Nanomater. (2012). https://doi.org/10.1155/2012/674168

    Article  Google Scholar 

  7. M. Meenakshi, V. Gowthami, P. Perumal, R. Sivakumar, C. Sanjeeviraja, Influence of dopant concentration on the electrochromic properties of tungsten oxide thin films. Electrochim. Acta. 174, 302–314 (2015). https://doi.org/10.1016/j.electacta.2015.05.187

    Article  Google Scholar 

  8. R. Sivakumar, R. Gopalakrishnan, M. Jayachandran, C. Sanjeeviraja, Preparation and characterization of electron beam evaporated WO3 thin films. Opt. Mater. (Amst). 29(6), 679–687 (2007)

    Article  Google Scholar 

  9. S. Park, H. Kim, C. Jin, C. Lee, Intense ultraviolet emission from needle-like WO 3 nanostructures synthesized by noncatalytic thermal evaporation. Nanoscale Res. Lett. (2011). https://doi.org/10.1186/1556-276X-6-451

    Article  Google Scholar 

  10. S. Badilescu, P.V. Ashrit, Study of sol-gel prepared nanostructured WO3 thin films and composites for electrochromic applications. Solid State Ionics 158(1–2), 187–197 (2003)

    Article  Google Scholar 

  11. K. Naveen Kumar, H. Shaik, M.V. Sathish, S.S. Abdul, On the bonding and electrochemical performance of sputter deposited WO3 thin films. IOP Conf. Ser. Mater. Sci. Eng. 872(1), 01247 (2020)

    Article  Google Scholar 

  12. M.B. Johansson, B. Zietz, G.A. Niklasson, L. Österlund, Optical properties of nanocrystalline WO3 and WO3-x thin films prepared by DC magnetron sputtering. J. Appl. Phys. 115(21), 213510 (2014)

    Article  Google Scholar 

  13. K. Naveen Kumar, H. Shaik, L.N. Chandrashekar, P. Aishwarya, S. Abdul Sattar, G. Nithya et al., On ion transport during the electrochemical reaction on plane and GLAD deposited WO3 thin films. Mater. Today Proc. 59, 275–282 (2021)

    Article  Google Scholar 

  14. K. Naveen Kumar, H. Shaik, A. Pawar, L.N. Chandrashekar, S.A. Sattar, G. Nithya et al., Effect of annealing and oxygen partial pressure on the RF sputtered WO3 thin films for electrochromic applications. Mater. Today. Proc. 59, 339–344 (2021)

    Article  Google Scholar 

  15. V.V. Kondalkar, R.R. Kharade, S.S. Mali, R.M. Mane, P.B. Patil, P.S. Patil et al., Nanobrick-like WO3 thin films: Hydrothermal synthesis and electrochromic application. Superlattices Microstruct. 73, 290–295 (2014). https://doi.org/10.1016/j.spmi.2014.05.039

    Article  Google Scholar 

  16. N.E. Stankova, P.A. Atanasov, T.J. Stanimirova, A.O. Dikovska, R.W. Eason, Thin (0 0 1) tungsten trioxide films grown by laser deposition. Appl. Surf. Sci. 247(1–4), 401–405 (2005)

    Article  Google Scholar 

  17. R. Levinas, N. Tsyntsaru, M. Lelis, H. Cesiulis, Synthesis, electrochemical impedance spectroscopy study and photoelectrochemical behaviour of as-deposited and annealed WO3 films. Electrochim. Acta 225, 29–38 (2017). https://doi.org/10.1016/j.electacta.2016.12.112

    Article  Google Scholar 

  18. V. Madhavi, P. Kondaiah, H. Shaik, K.N. Kumar, T.S.S. Kumar Naik, G.M. Rao et al., Fabrication of porous 1D WO3 NRs and WO3/BiVO4 hetero junction photoanode for efficient photoelectrochemical water splitting. Mater. Chem. Phys. (2021). https://doi.org/10.1016/j.matchemphys.2021.125095

    Article  Google Scholar 

  19. J. Gupta, H. Shaik, K.N. Kumar, A review on the prominence of porosity in tungsten oxide thin films for electrochromism. Ionics (Kiel). 27(6), 2307–2334 (2021)

    Article  Google Scholar 

  20. C. Charles, N. Martin, M. Devel, J. Ollitrault, A. Billard, Correlation between structural and optical properties of WO3 thin films sputter deposited by glancing angle deposition. Thin Solid Films 534, 275–281 (2013). https://doi.org/10.1016/j.tsf.2013.03.004

    Article  Google Scholar 

  21. K. Robbie, Advanced techniques for glancing angle deposition. J. Vac. Sci. Technol. B Microelectron. Nanom. Struct. 16(3), 1115 (1998)

    Article  Google Scholar 

  22. M. Layani, P. Darmawan, W.L. Foo, L. Liu, A. Kamyshny, D. Mandler et al., Nanostructured electrochromic films by inkjet printing on large area and flexible transparent silver electrodes. Nanoscale 6(9), 4572–4576 (2014)

    Article  Google Scholar 

  23. A. Rydosz, K. Dyndał, K. Kollbek, W. Andrysiewicz, M. Sitarz, K. Marszałek, Structure and optical properties of the WO3 thin films deposited by the GLAD magnetron sputtering technique. Vacuum (2020). https://doi.org/10.1016/j.vacuum.2020.109378

    Article  Google Scholar 

  24. J.J. Steele, M.J. Brett, Nanostructure engineering in porous columnar thin films: Recent advances. J. Mater. Sci. Mater. Electron. 18(4), 367–379 (2007)

    Article  Google Scholar 

  25. L. Xiao, Y. Lv, W. Dong, N. Zhang, X. Liu, Dual-functional WO3 nanocolumns with broadband antireflective and high-performance flexible electrochromic properties. ACS Appl. Mater. Interfaces. 8(40), 27107–27114 (2016)

    Article  Google Scholar 

  26. J. Yuan, B. Wang, H. Wang, Y. Chai, Y. Jin, H. Qi et al., Electrochromic behavior of WO 3 thin films prepared by GLAD. Appl. Surf. Sci. 447, 471–478 (2018). https://doi.org/10.1016/j.apsusc.2018.03.248

    Article  Google Scholar 

  27. J. Wang, E. Khoo, P.S. Lee, J. Ma, Controlled synthesis of WO3 nanorods and their electrochromic properties in H2SO4 electrolyte. J. Phys. Chem. C. 113(22), 9655–9658 (2009)

    Article  Google Scholar 

  28. Y.M. Lu, C.P. Hu, The colored and bleached properties of tungsten oxide electrochromic films with different substrate conductivities. J. Alloys Compd. 449(1–2), 389–392 (2008)

    Article  Google Scholar 

  29. M. Laurenti, S. Bianco, M. Castellino, N. Garino, A. Virga, C.F. Pirri et al., toward plastic smart windows: optimization of indium tin oxide electrodes for the synthesis of electrochromic devices on polycarbonate substrates. ACS Appl. Mater. Interfaces. 8(12), 8032–8042 (2016)

    Article  Google Scholar 

  30. V. Madhavi, P. Kondaiah, O.M. Hussain, S. Uthanna, Structural, optical and electrochromic properties of RF magnetron sputtered WO3 thin films. Phys. B Condens. Matter. 454, 141–147 (2014). https://doi.org/10.1016/j.physb.2014.07.029

    Article  Google Scholar 

Download references

Acknowledgements

The author acknowledges AICTE (8-39/RIFD/RPS/POLICY-1/2016) in New Delhi, India for financial support.

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AICTE, 8-39/RIFD/RPS/POLICY-1/2016, Habibuddin Shaik.

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Naveen Kumar, K., Shaik, H., Madhavi, V. et al. Glancing angle sputter deposited tungsten trioxide (WO3) thin films for electrochromic applications. Appl. Phys. A 128, 985 (2022). https://doi.org/10.1007/s00339-022-06124-5

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