Skip to main content
Log in

Optimization of polishing path and material removal for uniform material removal in optical surface polishing

  • ORIGINAL ARTICLE
  • Published:
The International Journal of Advanced Manufacturing Technology Aims and scope Submit manuscript

Abstract

Uniform material removal affects the profile accuracy and surface quality of the optical surface in polishing. In general, polishing path planning and material removal optimization are studied separately. In this paper, the research combining these two aspects is employed to better ensure material removal uniformity and polishing efficiency. Two common polishing paths are covered: the scanning path and the concentric circle path. The scanning path is divided into the inner area and edge area, and the concentric circle path is divided into the peripheral area and central area, respectively. Material removal caused by the polishing path is analyzed by the simulation of the material removal map. For the scanning path, the spacing range is defined according to the number of superimposed removal profiles on the cross-section of the path, and the optimal spacing value in each spacing range is determined by using the numerical method. Then, the feed velocity is optimized to control the material removal thickness in the inner area, eliminate the over-polishing in the edge area, and ensure the polishing efficiency. For the concentric circle path, in the peripheral area, the influence of the path curvature on the removal profile is eliminated by optimizing the inclination angle and feed velocity, so that the spacing law of the scanning path can be applied to the concentric circle path. Furthermore, the over-polishing in the central area is eliminated by optimizing the radius of the central path, inclination angle, and feed velocity. Simulations and experiments are conducted to verify the feasibility of the proposed method. The results show that the proposed method can effectively improve the material removal uniformity, control the material removal thickness, and ensure the polishing efficiency.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14
Fig. 15
Fig. 16
Fig. 17
Fig. 18
Fig. 19
Fig. 20
Fig. 21
Fig. 22
Fig. 23
Fig. 24
Fig. 25
Fig. 26
Fig. 27
Fig. 28
Fig. 29
Fig. 30
Fig. 31
Fig. 32

Similar content being viewed by others

References

  1. Ding YF, Min XP, Fu WW, et al. (2019) Research and application on force control of industrial robot polishing concave curved surfaces. Proc IMeche, Part B: Journal of Engineering Manufacture 233 (6):1674–1686. https://doi.org/10.1177/0954405418802309

    Article  Google Scholar 

  2. Zhai K, He Q, Li L, et al. (2017) Study on chemical mechanical polishing of silicon wafer with megasonic vibration assisted. Ultrasonics 80:9–14. https://doi.org/10.1016/j.ultras.2017.04.005

    Article  Google Scholar 

  3. Liu P, Bae S, Hong S, et al. (2022) Investigation of thermal effects in copper chemical mechanical polishing. Precis Eng 73:195–202. https://doi.org/10.1016/j.precisioneng.2021.08.022

    Article  Google Scholar 

  4. Choi YT, Wereley NM (2022) Controllable stress of magnetorheological fluid elastomeric encapsulations. IEEE Trans Magn 58(2):1–10. https://doi.org/10.1109/TMAG.2021.3085588

    Article  Google Scholar 

  5. Guo Y, Yin S, Ohmori H, et al. (2022) A novel high efficiency magnetorheological polishing process excited by Halbach array magnetic field. Precis Eng 74:175–185. https://doi.org/10.1016/j.precisioneng.2021.11.011

    Article  Google Scholar 

  6. Wang C, Zhang Z, Cheung CF, et al. (2022) Maskless fluid jet polishing of optical structured surfaces. Precis Eng 73:270–283. https://doi.org/10.1016/j.precisioneng.2021.09.010

    Article  Google Scholar 

  7. Wan K, Wan S, Jiang C, et al. (2022) Sparse bi-step raster path for suppressing the mid-spatial-frequency error by fluid jet polishing. Opt Express 30(5):6603–6616. https://doi.org/10.1364/OE.453122

    Article  Google Scholar 

  8. Wang Z, Wu L, Fang Y, et al. (2022) Application of flow field analysis in ion beam figuring for ultra-smooth machining of monocrystalline silicon mirror. Micromachines 13(2):318. https://doi.org/10.3390/mi13020318

    Article  Google Scholar 

  9. Chernyshev A, Chkhalo N, Malyshev I, et al. (2021) Matrix based algorithm for ion-beam figuring of optical elements. Precis Eng 69:29–35. https://doi.org/10.1016/j.precisioneng.2021.01.006

    Article  Google Scholar 

  10. Huang Z, Chen G, Liu H, et al. (2022) Research on robot bonnet polishing silicon carbide optical element machining method based on improved traveling salesman problem pseudo-random polishing path planning. Opt Eng 61(2):25102. https://doi.org/10.1117/1.OE.61.2.025102

    Article  Google Scholar 

  11. Zhong B, Deng W, Chen X, et al. (2021) Frequency division combined machining method to improve polishing efficiency of continuous phase plate by bonnet polishing. Opt Express 29(2):1597–1612. https://doi.org/10.1364/OE.412678

    Article  Google Scholar 

  12. Tian F, Lv C, Li Z, et al. (2016) Modeling and control of robotic automatic polishing for curved surfaces. CIRP J Manuf Sci Technol 14:55–64. https://doi.org/10.1016/j.cirpj.2016.05.010

    Article  Google Scholar 

  13. Jin M, Wang L, Ye S, et al. (2020) A novel functionally graded lapping and polishing method for the improvement of material removal uniformity. J Manuf Process 50:102–110. https://doi.org/10.1016/j.jmapro.2019.12.039

    Article  Google Scholar 

  14. Han Y, Zhang L, Guo M, et al. (2018) Tool paths generation strategy for polishing of freeform surface with physically uniform coverage. Int J Adv Manuf Technol 95(5-8):2125–2144. https://doi.org/10.1007/s00170-017-1281-2

    Article  Google Scholar 

  15. Zhao Q, Zhang L, Han Y, Fan C (2019) Polishing path generation for physical uniform coverage of the aspheric surface based on the archimedes spiral in bonnet polishing. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 233(12):2251–2263. https://doi.org/10.1177/0954405419838655

    Article  Google Scholar 

  16. Zhang L, Han Y, Fan C, et al. (2017) Polishing path planning for physically uniform overlap of polishing ribbons on freeform surface. Int J Adv Manuf Technol 92(9-12):4525–4541. https://doi.org/10.1007/s00170-017-0466-z

    Article  Google Scholar 

  17. Zhang L, Tam HY, Yuan CM, et al. (2002) An investigation of material removal in polishing with fixed abrasives. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 216(1):103–112. https://doi.org/10.1243/0954405021519591

    Article  Google Scholar 

  18. Tam HY, Zhang L, Hua M (2004) Material removal by fixed abrasives following curved paths. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 218 (7):713–720. https://doi.org/10.1177/095440540421800704

    Article  Google Scholar 

  19. Fan C, Zhao J, Zhang L, et al. (2016) Local material removal model considering the tool posture in deterministic polishing. Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 230(15):2660–2675. https://doi.org/10.1177/0954406215598800

    Article  Google Scholar 

  20. Fan C, Zhao J, Zhang L, et al. (2014) Modeling and experimental study on the material removal in the velocity-dwell-mode polishing process. J Mech Eng 50(5):173–181. https://doi.org/10.3901/JME.2014.05.173

    Article  Google Scholar 

  21. Tam HY, Hua M, Zhang L (2007) Aspheric surface finishing by fixed abrasives. Int J Adv Manuf Technol 34(5-6):483–490. https://doi.org/10.1007/s00170-006-0625-0

    Article  Google Scholar 

  22. Fan C, Zhao J, Zhang L, et al. (2014) Predictive models of the local and the global polished profiles in deterministic polishing of free-form surfaces. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 228(8):868–879. https://doi.org/10.1177/0954405413512813

    Article  Google Scholar 

  23. Hy Tam, Cheng H (2010) An investigation of the effects of the tool path on the removal of material in polishing. J Mater Process Technol 210(5):807–818. https://doi.org/10.1016/j.jmatprotec.2010.01.012

    Article  Google Scholar 

  24. Greenwood JA (1985) Formulas for moderately elliptical hertzian contacts. J Tribol 107(4):501–504. https://doi.org/10.1115/1.3261116

    Article  Google Scholar 

  25. Greenwood JA (1997) Analysis of elliptical hertzian contacts. Tribol Int 30(3):235–237. https://doi.org/10.1016/S0301-679X(96)00051-5

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Hongyi Wang.

Ethics declarations

Conflict of interest

The authors declare no competing interests.

Additional information

Publisher’s note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Xingtian Qu, Qinglong Liu, and Hongyi Wang contributed equally to this work.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Qu, X., Liu, Q., Wang, H. et al. Optimization of polishing path and material removal for uniform material removal in optical surface polishing. Int J Adv Manuf Technol 124, 1699–1722 (2023). https://doi.org/10.1007/s00170-022-10464-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00170-022-10464-0

Keywords

Navigation