Abstract
In decades, Microelectromechanical System (MEMS)-based devices haveĀ opened up new frontiers of research in biomedical engineering that benefit from the miniaturized structures and integrated functions. In this chapter, MEMS technologies are introduced as a platform to support the generation of biomedical devices for molecular, cellular, and organ-mimic study. The state-of-the-art of MEMS techniques, including surface processing, bulk processing, LIGA, and quasi-LIGA, are briefly introduced. We summarized the applications of the MEMS-based devices for bio-detection in terms of the dimension of molecular and cells, with focus on molecular detection from secretion, cellular mechanism analysis, and organ-on-a-chip. The emerging opportunities and future obstacles of the biomedical MEMS devices are discussed, yet with a bright prospect that this field would bring unprecedented future to biomedical engineering.
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Wang, Y., Chang, T., Wu, H., Dong, Z., Wei, B., Chang, L. (2023). Biomedical Microelectromechanical System for Molecular, Cellular, and Organ Study. In: Gu, N. (eds) Nanomedicine. Micro/Nano Technologies. Springer, Singapore. https://doi.org/10.1007/978-981-16-8984-0_27
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DOI: https://doi.org/10.1007/978-981-16-8984-0_27
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