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Processing of Transparent Materials Using Laser-Induced High-Energy State in Liquid

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High-Energy Chemistry and Processing in Liquids

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Abstract

High-energy states formed upon focused laser irradiation are a basic phenomenon in laser material processing. The high-energy states formed in liquid can also contribute to material processing. When laser pulses are focused onto the solid–liquid interface through solid materials, a high-energy state is generated at the interface. More precisely, it is generated in a thin liquid layer in contact with solid materials. Laser-induced backside wet etching (LIBWE) is a laser micromachining technique that utilizes the action of such high-energy states at the solid–liquid interface. Precise micromachining of hard and brittle transparent materials was achieved using this technique. The simple concept of this technique allows a variety of combinations of lasers, materials, and experimental setups for processing. While the concept for processing is relatively simple, the mechanism of the material removal is rather complex and has not yet been fully elucidated. A variety of material combination and conditions of laser irradiation is a factor making it more complex. Several attempts have been made to address the action of the high-energy state in liquid for material removal. Studies regarding LIBWE are overviewed in the context of the action of high-energy state generated in liquid.

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  1. National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, 305-8568, Ibaraki, Japan

    Tadatake Sato

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  1. National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan

    Yoshie Ishikawa

  2. Tohoku University, Sendai, Japan

    Takahiro Nakamura

  3. >National Institutes for Quantum Science and Technology (QST), Takasaki, Japan

    Morihisa Saeki

  4. National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan

    Tadatake Sato

  5. National Yang Ming Chiao Tung University, Hsinchu City, Taiwan

    Teruki Sugiyama

  6. Tokyo Institute of Technology, Yokohama, Japan

    Hiroyuki Wada

  7. Osaka City University, Osaka, Japan

    Tomoyuki Yatsuhashi

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Sato, T. (2022). Processing of Transparent Materials Using Laser-Induced High-Energy State in Liquid. In: Ishikawa, Y., et al. High-Energy Chemistry and Processing in Liquids. Springer, Singapore. https://doi.org/10.1007/978-981-16-7798-4_10

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