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Micro/Nano Fabrication and Packaging Technologies for Bio Systems

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Engineering of Micro/Nano Biosystems

Part of the book series: Microtechnology and MEMS ((MEMS))

Abstract

The investigation and development of micro/nano biosytem requires a sealed fluidic platform to separate, mix or control the flow of liquids and bio samples as well as a biochemical surface processing to selectively capture or repel biospecies. The first part of this chapter reviews the main techniques used for the fabrication of microchannels, reservoirs, pillars,… in various substrate materials. This includes direct machining techniques such as mechanical cutting, lithography and electroforming, as well as various replication techniques such as PDMS or UV curable resin casting, hot embossing and overall injection molding that is compatible with mass production. The second part describes the recent advances in the development of functionalized surfaces and their applications in biochips. First a focus is put on bioreceptors immobilization and a brief presentation of bioreceptors (antibodies and aptamers) is included. Next the polymers employed against plasmatic proteins fouling are reviewed and finally the surface chemistry preventing bacteria attachment is presented. The two approaches leading to bacteria repelling or killing, depending on the polymers employed, is discussed. The last chapter part is devoted to a critical analysis of bonding and welding techniques proposed to seal fluidic platforms.

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Authors and Affiliations

  1. Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials, 156 Gajeongbuk-ro Yusung-gu, Daejeon, South Korea

    Yeong Eun Yoo

  2. University of Paris-Sud, Orsay, France

    Claire Smadja

  3. Center for Nanoscience and Nanotechnology (C2N), CNRS, University Paris-Sud, University Paris Saclay, Palaiseau, France

    Mehdi Ammar

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  1. Yeong Eun Yoo
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  2. Claire Smadja
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  3. Mehdi Ammar
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Correspondence to Mehdi Ammar .

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Editors and Affiliations

  1. Faculty of Engineering, EPF-Ecole d’Ingénieurs, Sceaux, France

    Gregory Barbillon

  2. Centre de Nanosciences et de Nanotechnologies (C2N) CNRS, University of Paris-Sud, University of Paris-Saclay, Orsay, France

    Alain Bosseboeuf

  3. Seoul National University, Seoul, Korea (Republic of)

    Kukjin Chun

  4. Institut des Nanotechnologies de Lyon, Université Claude Bernard Lyon 1, Villeurbanne, France

    Rosaria Ferrigno

  5. ESYCOM Laboratory, ESIEE Paris, Noisy-Le-Grand, France

    Olivier Français

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Yoo, Y.E., Smadja, C., Ammar, M. (2020). Micro/Nano Fabrication and Packaging Technologies for Bio Systems. In: Barbillon, G., Bosseboeuf, A., Chun, K., Ferrigno, R., Français, O. (eds) Engineering of Micro/Nano Biosystems. Microtechnology and MEMS. Springer, Singapore. https://doi.org/10.1007/978-981-13-6549-2_3

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