Abstract
Many researches have studied the micro tools either by simulations or experiments showing that the micro tools play very important roles in micro/nano machining, and micro tool geometries have a direct impact on the final machining quality. Commercially available micro milling tools are usually simply made from downsizing of macro milling tools, which may not be able to be accurately fabricated. Custom micro milling tools have been created by some researchers, but no design criteria for micro milling tools have been introduced. The above factors constrain the development of effective micro milling tools and consequently constrain the researches on micro/nano milling. Based on former researcher’s work, this paper tries to introduce the design criteria for the custom micro tooling. Firstly, the extent typical micro milling tools are studied, and their drawback/limitations are summarized. Secondly, experimental evaluations of the key drawback/limitations are processed. Thirdly, the design criteria for custom micro milling tools are proposed, and corresponding design process is introduced. Then, a new micro hexagonal end mill has been designed based on these criteria. Finally, a polycrystalline diamond micro hexagonal end mill with a diameter of 0.5 mm was fabricated by wire electrical discharge machining, and the evaluation experiments for the hexagonal end mill have been processed on a nano milling center. Experimental results show the newly designed hexagonal end mill can achieve submicron level surface roughness and has simultaneously high-accuracy side and bottom machining capabilities.
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References
Aoki I, Takahashi T (1999) Micropattern fabrication by specially designed micro tool, Proceedings of SPIE. Int Soc Opt Eng 3874:365–372
Fleischer J, Deuchert M, Ruhs C, Kuhlewein C, Halvadjiysky G, Schmidt C (2008) Design and manufacturing of micro milling tools. Microsyst Technol 14:1771–1775
Uhlmann E, Schauer K (2005) Dynamic load and strain analysis for the optimization of micro end mills, CIRP Annals. Manuf Technol 54(1):75–78
Ali MY, Ong AS (2006) Fabricating micromilling tool using wire electodischarge grinding and focused ion beam sputtering. Int J Adv Manuf Technol 31:501–508
Jin M, Goto I, Watanabe T, Kurosawa J, Murakawa M (2007) Development of CBN ball-nosed end mill with newly designed cutting edge. J Mater Process Technol 192–193:48–54
Fang FZ, Wu H, Liu XD, Liu YC, Ng ST (2003) Tool geometry study in micromachining. J Micromech Microeng 13:726–731
Ohnishi O, Onikura H, Min SK, Aziz M, Tsuruoka S (2007) Characteristics of grooving by micro end mills with various tool shapes and approach to their optimal shape. Mem Fac Eng Kyushu Univ 67:143–151
Suzuki H, Moriwaki T, Yamamoto Y, Goto Y (2007) Precision cutting of aspherical ceramic molds with micro PCD milling tool. Annals of the CIRP 56:131–134
Cheng X, Nakamoto K, Sugai M, Matsumoto S, Wang ZG, Yamazaki K (2008) Development of ultra-precision machining system with unique wire EDM tool fabrication system for micro/nano milling-machining. CIRP Annals-Manuf Technol 57(1):415–420
Blake PN, Scattergood RO (1990) Ductile regime machining of germanium and silicon. J Am Ceram Soc 73(4):949–957
Liu X, Devor RE, Kapoor SG, Ehmann KF (2004) The mechanics of machining at the microscale: assessment of the current state of the science. Trans ASME V126:666–678
Cheng X, Wang ZG, Kobayashi S, Nakamoto K, Yamazaki K (2009) Development of a six-axis wire electrical discharge machining machine for the fabrication of micro end mills. Proc IMechE Part B: J Eng Manufacture 223:121–131
Cheng X, Wang ZG, Nakamoto K, Yamazaki K (2009) Design and development of micro pcd ball end mill for micro/nano freeform machining of hard and brittle materials. J Micromech Microeng 19(115022):10. doi:10.1088/0960-1317/19/11/115022
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Open Access This is an open access article distributed under the terms of the Creative Commons Attribution Noncommercial License (https://creativecommons.org/licenses/by-nc/2.0), which permits any noncommercial use, distribution, and reproduction in any medium, provided the original author(s) and source are credited.
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Cheng, X., Wang, Z., Nakamoto, K. et al. A study on the micro tooling for micro/nano milling. Int J Adv Manuf Technol 53, 523–533 (2011). https://doi.org/10.1007/s00170-010-2856-3
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DOI: https://doi.org/10.1007/s00170-010-2856-3