Abstract
In this chapter, a novel ultrasonic-assisted micro-/nano-texturing method was proposed and developed. A new 3D ultrasonic vibration spindle was developed for carrying out the proposed processes. The texturing mechanisms were analyzed by mathematically calculating the cutting loci and establishing the surface generation modeling processes. Finally, the tool design principles were proposed and experimentally verified. The experimental results and theoretical analysis proved that the proposed method can rapidly and precisely fabricate tailored surface textures at micrometer and nanometer scales.
Similar content being viewed by others
References
Abbas NM, Solomon DG, Bahari MF (2007) A review on current research trends in electrical discharge machining (EDM). Int J Mach Tools Manuf 47(7–8):1214–1228
Boothroyd G, Knight WA (2006) Fundamentals of machining and machine tools. Taylor and Francis, UK
Brehl DE, Dow TA (2008) Review of vibration-assisted machining. Precis Eng 32(3):153–172
Brinksmeier E, Gläbe R, Schӧnemann L (2012) Review on diamond-machining processes for the generation of functional surface structures. CIRP J Manuf Sci Technol 5(1):1–7
Cheng J, Liu C, Shang S, Liu D, Perrie W (2013) A review of ultrafast laser materials micromachining. Opt Laser Technol 46:88–102
Denkena B, Kästner J, Wang B (2010) Advanced microstructures and its production through cutting and grinding. CIRP Ann Manuf Technol 59(1):67–72
Dubey AK, Yadava V (2008) Laser beam machining – a review. Int J Mach Tools Manuf 48(6):609–628
Ehmann KF, Hong MS (1994) A generalized model of the surface generation process in metal cutting. CIRP Ann Manuf Technol 43(1):483–486
Hansen HN, Hocken RJ, Tosello G (2011) Replication of micro and nano surface geometries. CIRP Ann Manuf Technol 60(2):695–714
Ho KH, Newman ST (2003) State of the art electrical discharge machining (EDM). Int J Mach Tools Manuf 43(13):1287–1300
Kim DS, Chang IC, Kim SW (2002) Microscopic topographical analysis of tool vibration effects on diamond turned optical surfaces. Precis Eng 26(2):168–174
Kurosawa M, Kodaira O, Tsuchitoi Y, Higuchi T (1998) Transducer for high speed and large thrust ultrasonic linear motor using two sandwich-type vibrators. IEEE Trans Ultrason Ferroelectr Freq Control 45(5):1188–1195
Lee WB, Cheung CF (2001) A dynamic surface topography model for the prediction of nano-surface generation in ultra-precision machining. Int J Mech Sci 43(4):961–991
Lin SC, Chang MF (1998) A study on the effects of vibrations on the surface finish using a surface topography simulation model for turning. Int J Mach Tools Manuf 38(7):763–782
Liu X, Du D, Mourou G (1997) Laser ablation and micromachining with ultrashort laser pulses. IEEE J Quantum Electron 33(10):1706–1716
Lyshevski SE (2002) MEMS and NEMS: systems, devices, and structures. Taylor & Francis, UK
Masuzawa T (2000) State of the art of micromachining. CIRP Ann Manuf Technol 49(2):473–488
Moriwaki T, Shamoto E (1995) Ultrasonic elliptical vibration cutting. CIRP Ann Manuf Technol 44(1):31–34
Rozzi JC, Pfefferkorn FE, Incropera FP, Shin YC (2000a) Transient, three-dimensional heat transfer model for the laser assisted machining of silicon nitride: I. Comparison of predictions with measured surface temperature histories. Int J Heat Mass Transf 43(3):1409–1424
Rozzi JC, Pfefferkorn FE, Shin YC (2000b) Transient, three-dimensional heat transfer model for the laser assisted machining of silicon nitride: II. Assessment of parametric effects. Int J Heat Mass Transf 43(8):1425–1437
Shamoto E, Moriwaki T (1994) Study on elliptical vibration cutting. CIRP Ann Manuf Technol 43(1):35–38
Shimada K (2012) Study on vibration grinding. Doctoral thesis
Shimada S, Tanaka H, Higuchi M, Yamaguchi T, Honda S, Obata K (2004) Thermo-chemical wear mechanism of diamond tool in machining of ferrous metals. CIRP Ann Manuf Technol 53(1):57–60
Shimomura M, Sawadaishi T (2001) Bottom-up strategy of materials fabrication: a new trend in nanotechnology of soft materials. Curr Opin Colloid Interface Sci 6(1):11–16
Stupp SI, LeBonheur V, Walker K, Li LS, Huggins KE (1997) Supramolecular materials: self-organized nanostructures. Science 276(5311):384–389
Thoe TB, Aspinwall DK, Wise MLH (1998) Review on ultrasonic machining. Int J Mach Tools Manuf 38(4):239–255
Xing D, Zhang J, Shen X, Zhao Y, Wang T (2013) Tribological properties of ultrasonic vibration assisted milling aluminium alloy surfaces. Procedia CIRP 6:539–544
Xu S, Nishikawa C, Shimada K, Mizutani M, Kuriyagawa T (2013) Surface textures fabrication on zirconia ceramics by 3D ultrasonic vibration assisted slant feed grinding. Adv Mater Res 797:326–331
Xu S, Shimada K, Mizutani M, Kuriyagawa T (2014) Fabrication of hybrid micro/nano-textured surfaces using rotary ultrasonic machining with one-point diamond tool. Int J Mach Tools Manuf 86:12–17
Xu S, Shimada K, Mizutani M, Kuriyagawa T (2016) Analysis of machinable structures and their wettability of rotary ultrasonic texturing method. Chinese J Mechanical Eng 29 (6):1187–1192
Xu S, Shimada K, Mizutani M, Kuriyagawa T (2017) Development of a novel 2D rotary ultrasonic texturing technique for fabricating tailored structures. Int J Adv Manuf Tech 89 (1–4):1161–1172
Xu S, Shimada K, Mizutani M, Kuriyagawa T (2017) Recent advances in ultrasonic-assisted machining for the fabrication of micro/nano-textured surfaces. Front Mech Eng 12(1):33–45
Yan J, Oowada T, Zhou T, Kuriyagawa T (2009) Precision machining of microstructures on electroless-plated NiP surface for molding glass components. J Mater Process Technol 209(10):4802–4808
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2018 Springer Nature Singapore Pte Ltd.
About this entry
Cite this entry
Mizutani, M., Xu, S., Shimada, K., Kuriyagawa, T. (2018). Micro-/Nano-texturing by Ultrasonic-Assisted Grinding. In: Yan, J. (eds) Micro and Nano Fabrication Technology. Micro/Nano Technologies, vol 1. Springer, Singapore. https://doi.org/10.1007/978-981-10-6588-0_8-1
Download citation
DOI: https://doi.org/10.1007/978-981-10-6588-0_8-1
Received:
Accepted:
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-10-6588-0
Online ISBN: 978-981-10-6588-0
eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering
Publish with us
Chapter history
-
Latest
Micro-/Nano-texturing by Ultrasonic-Assisted Grinding- Published:
- 17 April 2018
DOI: https://doi.org/10.1007/978-981-10-6588-0_8-2
-
Original
Micro-/Nano-texturing by Ultrasonic-Assisted Grinding- Published:
- 27 February 2018
DOI: https://doi.org/10.1007/978-981-10-6588-0_8-1