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Nano-tribology and Materials in MEMS

  • Sujeet K. Sinha
  • N. Satyanarayana
  • Seh Chun Lim

Table of contents

  1. Front Matter
    Pages i-viii
  2. Biswajit Saha , Erjia Liu, Shu Beng Tor
    Pages 1-51
  3. Yufei Mo, Liping Wang
    Pages 81-110
  4. R. Arvind Singh, Eui-Sung Yoon, Kahp-Yang Suh, Deok-Ho Kim
    Pages 147-162
  5. Y. K. Yew, Z. C. Su, Sujeet K. Sinha, V. B. C. Tan
    Pages 163-181
  6. L. Dai, V. B. C. Tan
    Pages 183-198
  7. R. Arvind Singh, N. Satyanarayana, Sujeet K. Sinha
    Pages 215-229
  8. L. Y. Jonathan, V. Harikumar, N. Satyanarayana, Sujeet K. Sinha
    Pages 247-271
  9. Back Matter
    Pages 273-275

About this book

Introduction

This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.

Keywords

MEMS Coatings Materials in Mems Micro-Tribology Nano-Lubricants Nanofriction SiO2/Si substrate Surface Forces

Editors and affiliations

  • Sujeet K. Sinha
    • 1
  • N. Satyanarayana
    • 2
  • Seh Chun Lim
    • 3
  1. 1.Department of Mechanical EngineeringIndian Institute of TechnologyKanpurIndia
  2. 2.Department of Mechanical EngineeringNational University of SingaporeSingaporeSingapore
  3. 3.Department of Mechanical EngineeringNational University of SingaporeSingaporeSingapore

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-36935-3
  • Copyright Information Springer-Verlag Berlin Heidelberg 2013
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Engineering
  • Print ISBN 978-3-642-36934-6
  • Online ISBN 978-3-642-36935-3
  • Buy this book on publisher's site