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Particle Beam Sources

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Handbook of Thin-Film Technology

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Abstract

In this section we consider the fate of energetic ions (1–100 keV) incident on a solid surface. The 10 ways in which ions can interact with a surface are illustrated in Fig. 8.1. An incoming ion can be backscattered by an atom or group of atoms in the bombarded sample (1). The backscattering process generally results in a deflection of the ion’s incident path to a new trajectory after the encounter and an exchange of energy between the ion and the target atom. The energy exchange can be either elastic or inelastic, depending on the constituent particles and the energy of the ions. The momentum of an ion can be sufficient to dislodge a surface atom from a weakly bound position on the sample lattice and cause its relocation on the surface in a more strongly bound position (2).

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Authors
  1. Hartmut Frey Prof. Dr.
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Editors and Affiliations

  1. Esslingen, Germany

    Hartmut Frey Prof. Dr.

  2. Schwäbisch Gmünd, Germany

    Hamid R. Khan Prof. Dr.

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Frey, H. (2015). Particle Beam Sources. In: Frey, H., Khan, H.R. (eds) Handbook of Thin-Film Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-05430-3_8

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