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Fast Compositional Mapping of Solar Cell by Laser Spectroscopy Technique for Process Monitoring

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Abstract

The applicability of laser-induced breakdown spectroscopy (LIBS) for elemental mapping in atmospheric condition is demonstrated using a commercial Cu(In,Ga)Se2 solar cells module. The LIBS analysis was carried out using a Q-switched Nd:YAG laser (λ = 532 nm, τ = 5 ns, top-hat profile) and a CCD spectrometer. At the laser fluence of 22 J/cm2 with He as the buffer gas, a spatial resolution of 130 μm was achieved and the LIBS mapping of a 2.58 × 2.58 mm2 area was completed in 24 min. It is demonstrated that the detailed variation of elemental concentrations across the scribing pattern and over the buried pattern could be measured with LIBS. The comparison of measured LIBS profiles with those from secondary ion mass spectrometry agreed closely.

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Acknowledgement

This study was supported by the R&D Center for Valuable Recycling (Global-Top R&BD Program) of the Ministry of Environment (Project No. 2016002250003).

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Author notes

  1. Seok-Hee Lee and Jang-Hee Choi are co-first authors with equal contribution.

Authors and Affiliations

  1. Process Technology Department, LG Electronics, 222 LG-ro, Jinwi-myeon, Pyeongtaek-si, Gyeonggi-do, Republic of Korea

    Seok-Hee Lee

  2. School of Mechanical Engineering, Gwangju Institute of Science and Technology, 1 Oryong-dong Buk-gu, Gwangju, 500-712, Republic of Korea

    Jang-Hee Choi & Sungho Jeong

  3. Advanced Optical Lens Research Center, Korea Photonics Technology Institute, 9, Cheomdan Venture-ro 108beon-gil, Buk-gu, Gwangju, 61007, Republic of Korea

    Jung-Hwan In

Authors
  1. Seok-Hee Lee
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  2. Jang-Hee Choi
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  3. Jung-Hwan In
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  4. Sungho Jeong
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Correspondence to Sungho Jeong.

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Lee, SH., Choi, JH., In, JH. et al. Fast Compositional Mapping of Solar Cell by Laser Spectroscopy Technique for Process Monitoring. Int. J. of Precis. Eng. and Manuf.-Green Tech. 6, 189–196 (2019). https://doi.org/10.1007/s40684-019-00083-8

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  • DOI: https://doi.org/10.1007/s40684-019-00083-8

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