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Graphene NEMS

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Encyclopedia of Nanotechnology

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Synonyms

Carbon nanotube NEMS; NEMS; NEMS mass sensors; NEMS resonant mass sensors; RF MEMS/NEMS

Definition

Graphene nanoelectromechanical systems (NEMS) are devices that consist of single or multilayer graphene which is free to move along the out-of-plane direction and utilize the electrical and mechanical properties of graphene for various applications, such as mass or force sensing.

Overview

Graphene, as the first two-dimensional (2D) materials that can be explicitly prepared, offers both excellent electrical and superior mechanical attributes, both of which are desired for NEMS. Shortly after the first isolation of single-layer graphene in 2004, the field of graphene NEMS was spearheaded by researchers from Cornell University in 2007: they successfully actuated and detected the motion of doubly clamped graphene mechanical resonators. In the following years, advancements in fabrication, signal transduction, and modeling have been expanding the area of graphene NEMS. Applications of...

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References

  1. Lee, C., Wei, X., Kysar, J.W., Hone, J.: Measurement of the elastic properties and intrinsic strength of monolayer graphene. Science 321, 385–388 (2008)

    Article  Google Scholar 

  2. Lee, G.-H., et al.: High-strength chemical-vapor-deposited graphene and grain boundaries. Science 340, 1013–1016 (2013)

    Article  Google Scholar 

  3. Griffith, A.A.: The phenomena of rupture and flow in solids. Philos. Trans. R. Soc. Lond. A. 221, 163–198 (1921)

    Article  Google Scholar 

  4. Kim, K.S., et al.: Large-scale pattern growth of graphene films for stretchable transparent electrodes. Nature 457, 706–710 (2009)

    Article  Google Scholar 

  5. Li, X., et al.: Large-area synthesis of high-quality and uniform graphene films on copper foils. Science 324, 1312–1314 (2009)

    Article  Google Scholar 

  6. Lee, Y., et al.: Wafer-scale synthesis and transfer of graphene films. Nano Lett. 10, 490–493 (2010)

    Article  Google Scholar 

  7. Lee, S., et al.: Electrically integrated su-8 clamped graphene drum resonators for strain engineering. Appl. Phys. Lett. 102, 153101 (2013)

    Article  Google Scholar 

  8. Frank, I., Tanenbaum, D.M., Van der Zande, A., McEuen, P.L.: Mechanical properties of suspended graphene sheets. J. Vac. Sci. Technol. B 25, 2558–2561 (2007)

    Article  Google Scholar 

  9. Koenig, S.P., Boddeti, N.G., Dunn, M.L., Bunch, J.S.: Ultrastrong adhesion of graphene membranes. Nat. Nanotechnol. 6, 543–546 (2011)

    Article  Google Scholar 

  10. Bunch, J.S., et al.: Impermeable atomic membranes from graphene sheets. Nano Lett. 8, 2458–2462 (2008)

    Article  Google Scholar 

  11. Smith, A.D., et al.: Electromechanical piezoresistive sensing in suspended graphene membranes. Nano Lett. 13, 3237–3242 (2013)

    Article  Google Scholar 

  12. Milaninia, K.M., Baldo, M.A., Reina, A., Kong, J.: All graphene electromechanical switch fabricated by chemical vapor deposition. Appl. Phys. Lett. 95, 183105 (2009)

    Article  Google Scholar 

  13. Liu, X., et al.: Large arrays and properties of 3-terminal graphene nanoelectromechanical switches. Adv. Mater. 26, 1571–1576 (2014)

    Article  Google Scholar 

  14. Chen, C., Hone, J.: Graphene nanoelectromechanical systems. Proc. IEEE 101, 1766–1779 (2013)

    Article  Google Scholar 

  15. Bunch, J.S., et al.: Electromechanical resonators from graphene sheets. Science 315, 490–493 (2007)

    Article  Google Scholar 

  16. Chen, C., et al.: Performance of monolayer graphene nanomechanical resonators with electrical readout. Nat. Nanotechnol. 4, 861–867 (2009)

    Article  Google Scholar 

  17. van der Zande, A.M., et al.: Large-scale arrays of single-layer graphene resonators. Nano Lett. 10, 4869–4873 (2010)

    Article  Google Scholar 

  18. Song, X., et al.: Stamp transferred suspended graphene mechanical resonators for radio frequency electrical readout. Nano Lett. 12, 198–202 (2011)

    Article  Google Scholar 

  19. Xu, Y., et al.: Radio frequency electrical transduction of graphene mechanical resonators. Appl. Phys. Lett. 97, 243111 (2010)

    Article  Google Scholar 

  20. Atalaya, J., Isacsson, A., Kinaret, J.M.: Continuum elastic modeling of graphene resonators. Nano Lett. 8, 4196–4200 (2008)

    Article  Google Scholar 

  21. Barton, R.A., et al.: High, size-dependent quality factor in an array of graphene mechanical resonators. Nano Lett. 11, 1232–1236 (2011)

    Article  Google Scholar 

  22. Eichler, A., et al.: Nonlinear damping in mechanical resonators made from carbon nanotubes and graphene. Nat. Nanotechnol. 6, 339–342 (2011)

    Article  Google Scholar 

  23. Singh, V., et al.: Optomechanical coupling between a multilayer graphene mechanical resonator and a superconducting microwave cavity. Nat. Nanotechnol. 9, 820–824 (2014)

    Article  Google Scholar 

  24. Weber, P., Güttinger, J., Tsioutsios, I., Chang, D., Bachtold, A.: Coupling graphene mechanical resonators to superconducting microwave cavities. Nano Lett. 14, 2854–2860 (2014)

    Article  Google Scholar 

  25. Chaste, J., et al.: A nanomechanical mass sensor with yoctogram resolution. Nat. Nanotechnol. 7, 301–304 (2012)

    Article  Google Scholar 

  26. Barton, R.A., et al.: Photothermal self-oscillation and laser cooling of graphene optomechanical systems. Nano Lett. 12, 4681–4686 (2012)

    Article  Google Scholar 

  27. Chen, C., et al.: Graphene mechanical oscillators with tunable frequency. Nat. Nanotechnol. 8, 923–927 (2013)

    Article  Google Scholar 

  28. Song, X., Oksanen, M., Li, J., Hakonen, P.J., Sillanpää, M.A.: Graphene optomechanics realized at microwave frequencies. Phys. Rev. Lett. 113, 021404 (2014)

    Google Scholar 

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Authors and Affiliations

  1. Argonne National Laboratory, 9700, S. Cass Avenue B109, Lemont, IL, 60439, USA

    Changyao Chen

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  1. Changyao Chen
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Correspondence to Changyao Chen .

Editor information

Editors and Affiliations

  1. Biomimetics (NLB²), Ohio State University Nanoprobe Lab. for Bio- & Nanotechnology, Columbus, Ohio, USA

    Bharat Bhushan

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© 2015 Springer Science+Business Media Dordrecht

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Chen, C. (2015). Graphene NEMS. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6178-0_100991-1

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  • DOI: https://doi.org/10.1007/978-94-007-6178-0_100991-1

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  • Online ISBN: 978-94-007-6178-0

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