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Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition

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Springer Handbook of Nanotechnology

Part of the book series: Springer Handbooks ((SHB))

Abstract

In this chapter, we describe three-dimensional nanostructure fabrication using 30 keV Ga+ focused ion beam chemical vapor deposition (FIB-CVD) and a phenanthrene (C14H10) source as a precursor. We also consider microstructure plastic art, which is a new field that has been made possible by microbeam technology, and we present examples of such art, including a “micro wine glass” with an external diameter of 2.75 μm and a height of 12 μm. The film deposited during such processes is diamond-like amorphous carbon, which has a Young's modulus exceeding 600 GPa, appearing to make it highly desirable for various applications. The production of three-dimensional nanostructures is also discussed. The fabrication of microcoils, nanoelectrostatic actuators, and 0.1 μm nanowiring – all potential components of nanomechanical systems – is explained. The chapter ends by describing the realization of nanoinjectors and nanomanipulators, novel nanotools for manipulating and analyzing subcellular organelles.

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Abbreviations

AFM:

atomic force microscopy

CVD:

chemical vapor deposition

DC:

direct current

DLC:

diamond like carbon

FIB:

focused ion beam

PC:

polycarbonate

SEM:

scanning electron microscopy

TEM:

transmission electron microscopy

References

  1. S. Matsui: Proc. IEEE 85, 629 (1997)

    Article  CAS  Google Scholar 

  2. O. Lehmann, F. Foulon, M. Stuke: NATO ASI Series E, Appl. Sci. 265, 91–102 (1994)

    CAS  Google Scholar 

  3. H. W. Koops: Jpn. J. Appl. Phys. 33, 7099 (1994)

    Article  CAS  Google Scholar 

  4. A. Wargner, J. P. Levin, J. L. Mauer, P. G. Blauner, S. J. Kirch, P. Long: J. Vacuum. Sci. Technol. B8, 1557 (1990)

    Google Scholar 

  5. I. Utke, P. Hoffmann, B. Dwir, K. Leifer, E. Kapon, P. Doppelt: J. Vacuum. Sci. Technol. B18, 3168 (2000)

    Google Scholar 

  6. A. J. DeMarco, J. Melngailis: J. Vacuum. Sci. Technol. B17, 3154 (1999)

    Google Scholar 

  7. S. Matsui, T. Kaito, J. Fujita, M. Komuro, K. Kanda, Y. Haruyama: J. Vacuum. Sci. Technol. B18, 3181 (2000)

    Google Scholar 

  8. T. Hoshino, K. Watanabe, R. Kometani, T. Morita, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai, S. Matsui: J. Vacuum. Sci. Technol. 21, 2732 (2003)

    Article  CAS  Google Scholar 

  9. E. Buks, M. L. Roukes: Phys. Rev. B 63, 033402 (2001)

    Article  Google Scholar 

  10. J. Fujita, M. Ishida, T. Sakamoto, Y. Ochiai, T. Kaito, S. Matsui: J. Vacuum. Sci. Technol. B 19, 2834 (2001)

    Google Scholar 

  11. M. Ishida, J. Fujita, Y. Ochiai: J. Vacuum. Sci. Technol. B20, 2784 (2002)

    Google Scholar 

  12. T. Morita, R. Kometani, K. Watanabe, K. Kanda, Y. Haruyama, T. Hoshino, K. Kondo, T. Kaito, T. Ichihashi, J. Fujita, M. Ishida, Y. Ochiai, T. Tajima, S. Matsui: J. Vacuum. Sci. Technol. B21, 2737 (2003)

    Google Scholar 

  13. J. Fujita, M. Ishida, Y. Ochiai, T. Ichihashi, T. Kaito, S. Matsui: J. Vacuum. Sci. Technol. 20, 2686 (2002)

    Article  CAS  Google Scholar 

  14. T. Morita, K. Nakamatsu, K. Kanda, Y. Haruyama, K. Kondo, T. Hoshino, T. Kaito, J. Fujita, T. Ichihashi, M. Ishida, Y. Ochiai, T. Tajima, S. Matsui: J. Vacuum. Sci. Technol. B22, 3137 (2004)

    Google Scholar 

  15. R. Kometani, T. Hoshino, K. Kondo, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai, S. Matsui: J. Appl. Phys. 43(10), 7187 (2004)

    Article  CAS  Google Scholar 

  16. P. Vukusic, J. Roy. Sambles: Nature 424, 852 (2003)

    Article  CAS  Google Scholar 

  17. K. Watanabe, T. Hoshino, K. Kanda, Y. Haruyama, S. Matsui: Jpn. J. Appl. Phys. 44, L48 (2005)

    Article  CAS  Google Scholar 

  18. R. Kometani, T. Morita, K. Watanabe, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai, S. Matsui: Jpn. J. Appl. Phys. 42, 4107 (2003)

    Article  CAS  Google Scholar 

  19. R. Kometani, T. Hoshino, K. Kondo, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai, S. Matsui: J. Vacuum. Sci. Technol. B23, 298 (2005)

    Google Scholar 

  20. S. Akita, Y. Nakayama, S. Mizooka, Y. Takano, T. Okawa, K. Y. Miyatake, S. Yamanaka, M. Tsuji, T. Nosaka: Appl. Phys. Lett. 74, 1691 (2001)

    Article  Google Scholar 

  21. R. Kometani, T. Hoshino, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai, S. Matsui: Nuclear Instrum. Meth. Phys. Res. B (2006) in press

    Google Scholar 

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Authors and Affiliations

  1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori Ako, 678-1205, Hyogo, Japan

    Shinji Matsui Prof.

Authors
  1. Shinji Matsui Prof.
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Correspondence to Shinji Matsui Prof. .

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Editors and Affiliations

  1. Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM), Ohio State University, 201 W. 19th Avenue, W 390 Scott Laboratory, Ohio 43210-1142, Columbus, OH, USA

    Bharat Bhushan Prof.

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Matsui, S. (2007). Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition. In: Bhushan, B. (eds) Springer Handbook of Nanotechnology. Springer Handbooks. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-29857-1_6

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