Reduction of mechanical stress in micromachined components caused by humidity-induced volume expansion of polymer layers R. BuchholdA. NakladalM. Müller Technical papers Pages: 3 - 12
Application of the laser flash diffusivity method to thin high thermal conductivity materials L. KehoeP. V. KellyG. M. Crean Pages: 18 - 21
Torsional tests on microstructures: two methods to determine shear-moduli G. SchiltgesD. GsellJ. Dual Pages: 22 - 29
Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation K. KomaiK. MinoshimaS. Inoue Pages: 30 - 37
Actuator – sensor technology on “electronic grade” diamond films P. GlucheR. LeunerE. P. Hofer Pages: 38 - 43
Transducer and protective PVD-films for applications in microsystem components E. QuandtH. Holleck Pages: 49 - 58