Design and fabrication of one millimeter high structures K. FischerJ. KleinH. Guckel Pages: 176 - 179
Long throw linear magnetic actuators stackable to one millimeter of structural height K. FischerH. Guckel Pages: 180 - 183
Manufacturing pinhole arrays for X-ray source diagnostics using LIGA M. GernerK. HolldackM. Schmidt Pages: 184 - 186
LIGA-fabricated compact mm-wave linear accelerator cavities J. J. SongS. BajikarV. White Pages: 193 - 196
Micro fluidic control systems in deep etch optical lithography N. PyeM. McCormickM. Goodwin Pages: 197 - 200
Tapered microvalves fabricated by off-axis X-ray exposures T. W. TsueiR. L. WoodR. B. Fair Pages: 201 - 204