Reliability assessment for development of microtechnologies J. W. EvansJ. Y. Evans Original paper Pages: 145 - 154
Fabrication, metallographic and tribologic investigations of LIGA-microstructures made of nickelphosphorous alloys T. Bieger Pages: 155 - 163
Coupled finite element and network simulation for microsystem components P.-C. EccardtM. KnothS. Wünsche Pages: 164 - 167
A resonant, dielectric micro-motor driven by low ac-voltages (<6V) T. MüllerJ. GimsaG. Fuhr Pages: 168 - 170
Finite element investigations of the dynamical properties of microstructured membranes R. ElsäßerM. KamlahC. Tsakmakis Pages: 171 - 177
Efficient design/simulation algorithms for simultaneous switching noise in leadframe packages C. HuangL. LinJ. L. Prince Pages: 178 - 182
Silicon hotplates for metal oxide gas sensor elements G. SberveglieriW. HellmichG. Müller Pages: 183 - 190
Flexible integration of various fieldbus and sensor/actuator bus systems into machine tool control T. PfeiferH. S. ParkH. Thrum Pages: 191 - 198