1. Electrocasting - formation and structuring of suspended microbodies using a.c. generated field cages

   • S. Fiedler
   • Th. Schnelle
   • G. Fuhr

   Technical Papers Pages: 1 - 7

2. Niobium microelectrodes for submicron particle confinement

   • R. Leoni
   • M. G. Castellano
   • T. Muller

   Technical Papers Pages: 8 - 10

3. Micro liquid dosing system

   • R. Roßberg
   • B. Schmidt
   • S. Büttgenbach

   Technical Papers Pages: 11 - 16

4. Finite element simulation of microstructure demolding as part of the LIGA process

   • N. Huber
   • Ch. Tsakmakis

   Technical Papers Pages: 17 - 21

5. Electromagetically driven microvalve

   • K. Yanagisawa
   • H. Kuwano
   • A. Tago

   Technical Papers Pages: 22 - 25

6. Pb-based ferroelectric thin film actuator for optical applications

   • M. Sakata
   • S. Wakabayashi
   • T. Yada

   Technical Papers Pages: 26 - 31

7. Reliability of thermo-setting anisotropically conductive adhesives in Chip on Glass application

   • J. Liu
   • L. Ljungkrona

   Technical Papers Pages: 32 - 37

8. International Conference on High Aspect-Ratio Microstructure Technology HARMST ’95

   • P. Bley
   • W. Menz
   • H. O. Moser

   Editorial Pages: 39 - 39

9. Fabrication of stepped microoptical benches for fibre and free space applications

   • A. Müller
   • J. Göttert
   • A. Rogner

   Technical Papers Pages: 40 - 45

10. The copolymer of methyl methacrylate and methacrylic acid as a sensitive resist for deep-etch X-ray lithography

    • T. Numazawa
    • Y. Hirata
    • H. Takada

    Technical Papers Pages: 46 - 49

11. The effect of residual solvent on the profiles of thick positive DNO-photoresist for microsystem technologies

    • J. Schulz
    • T. Mono
    • J. Mohr

    Technical Papers Pages: 50 - 55

12. Synchrotron radiation analysis of microstructures

    • N. Mölders
    • H. O. Moser
    • V. Saile

    Technical Papers Pages: 56 - 62

13. Tribological investigations of LIGA-microstructures

    • T. Bieger
    • U. Wallrabe

    Technical Papers Pages: 63 - 70

14. Studies of the adhesion properties of LIGA microstructures by X-ray spectroscopy and mechanical measurements

    • D. Kadereit
    • J. Hormes
    • A. El-Kholi

    Technical Papers Pages: 71 - 74

15. Dimensional measurement of micro mechanical components with HAR

    • U. Breitmeier
    • G. Häusler

    Technical Papers Pages: 75 - 78

16. A source of kilovolt X-ray

    • F. Villa
    • A. Luccio
    • M. Zolotorev

    Technical Papers Pages: 79 - 82

17. Light optical deformation measurements in microbars with nanometer resolution

    • E. Mazza
    • G. Danuser
    • J. Dual

    Technical Papers Pages: 83 - 91

18. Determination of Young’s modulus and residual stress of electroless nickel using test structures fabricated in a new surface micromachining process

    • S. Roy
    • S. Furukawa
    • M. Mehregany

    Technical Papers Pages: 92 - 96

19. Stereolithography and microtechniques

    • S. Zissi
    • A. Bertsch
    • J. C. André

    Technical Papers Pages: 97 - 102

20. Fabrication of LIGA-acceleration sensors by aligned molding

    • A. Both
    • W. Bacher
    • M. Strohrmann

    Technical Papers Pages: 104 - 108

21. High aspect ratio structures obtained by electroforming in microstructured glass

    • D. Hülsenberg
    • A. Harnisch
    • B. Straube

    Technical Papers Pages: 109 - 113

22. Fabrication of monolithic integrated fiber-lens connector arrays by deep proton irradiation

    • M. Kufner
    • S. Kufner

    Technical Papers Pages: 114 - 118

23. The strategic development of HARM manufacturing technologies

    • S. T. Walsh
    • R. Boylan
    • J. Elders

    Technical Papers Pages: 119 - 125

24. LIGA technology in BSRF

    • E. Tang
    • F. Yi
    • M. Jin

    Technical Papers Pages: 126 - 129

25. Development of ceramic microstructures

    • H. -J. Ritzhaupt-Kleissl
    • W. Bauer
    • J. Haußelt

    Technical Papers Pages: 130 - 134

26. Ceramic microstructures and potential applications

    • R. Knitter
    • E. Günther
    • U. Maciejewski

    Technical Papers Pages: 135 - 138

27. A variable reluctance stepping microdynamometer

    • T. R. Christenson
    • H. Guckel
    • J. Klein

    Technical Papers Pages: 139 - 143

28. The micromilling process for high aspect ratio microstructures

    • C. R. Friedrich
    • M. J. Vasile

    Technical Papers Pages: 144 - 148

29. Movable microstructures made by a sub-micron LIGA process

    • M. W. Börner
    • M. Kohl
    • W. K. Schomburg

    Technical Papers Pages: 149 - 152

30. LIGA and LIGA-like processing with high energy photons

    • H. Guckel

    Technical Papers Pages: 153 - 156

31. LIGA activity in Taiwan

    • Y. Cheng

    Technical Papers Pages: 157 - 161

32. Combination of LIGA with other microstructure technologies

    • W. Menz
    • W. Bacher
    • D. Seidel

    Technical Papers Pages: 162 - 166

33. Knowledge based support for manufacturing of microstructures

    • K. P. Scherer
    • P. Buchberger
    • U. Stucky

    Technical Papers Pages: 167 - 170

34. The study of LIGA technique at NSRL

    • Y. Tian
    • Y. Hong
    • X. Tao

    Technical Papers Pages: 171 - 173

35. High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithography

    • J. Fahrenberg
    • Th. Schaller
    • W. K. Schomburg

    Technical Papers Pages: 174 - 177

36. Electrochemical post-processing of LIGA structures

    • S. Akkaraju
    • Y. M. Desta
    • M. C. Murphy

    Technical Papers Pages: 178 - 181

37. Molding of LIGA microstructures from fluorinated polymers

    • R. Ruprecht
    • H. Kalb
    • W. Bacher

    Technical Papers Pages: 182 - 185

38. Application of deep reactive ion etching for silicon angular rate sensor

    • J. Choi
    • K. Minami
    • M. Esashi

    Technical Papers Pages: 186 - 190

39. Design and simulation of high aspect ratio motion sensors

    • L. Yao
    • E. Chowanietz
    • A. Lees

    Technical Papers Pages: 191 - 196

40. Experimental determination of mechanical properties of Ni and Ni-Fe microbars

    • E. Mazza
    • S. Abel
    • J. Dual

    Technical Papers Pages: 197 - 202