1. A parameter identification method for thermal flying-height control sliders

   • Gang Sheng
   • Jianfeng Xu

   Technical Paper 13 August 2011 Pages: 1409 - 1415

   

2. Review of MEMS flow sensors based on artificial hair cell sensor

   • Mohd Norzaidi Mat Nawi
   • Asrulnizam Abd Manaf
   • Othman Sidek

   Technical Paper 09 August 2011 Pages: 1417 - 1426

   

3. Numerical study of enhancing the mixing effect in microchannels via transverse electroosmotic flow by placing electrodes on top and bottom of the channel

   • Hongjun Song
   • Dawn J. Bennett

   Technical Paper 29 July 2011 Pages: 1427 - 1437

   

4. Polymeric (SU-8) optical microscanner driven by electrostatic actuation

   • Seung-Hwan Moon
   • Min-Ho Jun
   • Jong-Hyun Lee

   Technical Paper 04 August 2011 Pages: 1439 - 1445

   

5. On the tunability of a MEMS based variable capacitor with a novel structure

   • Hamed Mobki
   • Morteza H. Sadeghi
   • Ghader Rezazadeh

   Technical Paper 03 August 2011 Pages: 1447 - 1452

   

6. Design and fabrication of implantable pressure sensing resistor sensor for human bladder monitoring system

   • Jonghyun Kim
   • Bumkyoo Choi

   Technical Paper 11 August 2011 Pages: 1453 - 1458

   

7. Device for oxide dots fabrication with copper wire as cathode probe

   • K. Sathiyaraj
   • K. Kanivalan
   • S. Kumaran

   Technical Paper 28 July 2011 Pages: 1459 - 1462

   

8. A synchronous microsystem process using a dual-cylinder tool for the surface microstructures from solar cell silicon wafers

   • P. S. Pa

   Technical Paper 17 August 2011 Pages: 1463 - 1470

   

9. Design and realization of micro structured surfaces for thermodynamic applications

   • Andreas Schubert
   • Matthias Hackert-Oschätzchen
   • Mike Zinecker

   Technical Paper 06 August 2011 Pages: 1471 - 1479

   

10. An electrothermally excited dual beams silicon resonant pressure sensor with temperature compensation

    • Zhangyang Tang
    • Shangchun Fan
    • Zhengyuan Zhang

    Technical Paper 30 July 2011 Pages: 1481 - 1490

    

11. Design of shrinkage microvalve in microchannel with hydrophilic and hydrophobic walls

    • Ping Zhang
    • Yongbo Deng
    • Yihui Wu

    Technical Paper 17 August 2011 Pages: 1491 - 1495

    

12. Improvement of damping performance by splitting damping material

    • Hajime Eguchi
    • Hiromitsu Masuda
    • Eiji Soga

    Technical Paper 17 August 2011 Pages: 1497 - 1503

    

13. Photoresist-based integration of enzyme functionality into MEMS

    • Nicole Thomas
    • Ilkka Lähdesmäki
    • Babak A. Parviz

    Technical Paper 10 August 2011 Pages: 1505 - 1510

    

14. Fabrication and electrical characterization of integrated nano-scale fluidic channels

    • A. Afanasiev
    • I. Lähdesmäki
    • B. A. Parviz

    Technical Paper 02 August 2011 Pages: 1511 - 1518

    

15. Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications

    • J. A. van Kan
    • P. G. Shao
    • P. Malar

    Technical Paper 29 July 2011 Pages: 1519 - 1527

    

16. Dielectric property improvement of polymer-nanosized strontium titanate-composites for applications in microelectronics

    • Thomas Hanemann
    • Holger Gesswein
    • Benedikt Schumacher

    Technical Paper 02 August 2011 Pages: 1529 - 1535

    

17. Development of an injection molding tool for complex microfluidic geometries

    • Emil J. Geiger
    • Dieudonne A. Mair
    • Albert P. Pisano

    Technical Paper 28 July 2011 Pages: 1537 - 1540

    

18. Influence and limits of sintering temperatures on the movability of shaft-to-collar connections formed by two-component micro powder injection moulding

    • Andreas Ruh
    • Volker Piotter
    • Jürgen Haußelt

    Technical Paper 02 August 2011 Pages: 1541 - 1546