Lifetime modelling for microsystems integration: from nano to systems Bernhard WunderleB. Michel Technical Paper 06 May 2009 Pages: 799 - 812
Application of hybrid differential transformation/finite difference method to nonlinear analysis of micro fixed-fixed beam Cha’o-Kuang ChenH. Y. LaiChin-Chia Liu Review Article 07 April 2009 Pages: 813 - 820
Switching cell embedded in photonic crystal Almir Wirth Lima JrA. S. B. Sombra Review Article 07 April 2009 Pages: 821 - 825
Experimental analysis and numerical modelling of the forming process of polypropylene replicas of micro-cavities using hot embossing Mohamed SahliChristine MillotChantal Khan Malek Review Article 26 March 2009 Pages: 827 - 835
Thermal conductivity measurement of submicrometer-scale silicon dioxide films by an extended micro-Raman method Shuo HuangXiaodong RuanHuayong Yang Technical Paper 29 March 2009 Pages: 837 - 842
The optimization of hybrid scaffold fabrication process in precision deposition system using design of experiments Jong Young KimDong-Woo Cho Technical Paper 04 November 2008 Pages: 843 - 851
Electromechanical characterization of a new micro programmable blazed grating by laser Doppler vibrometry Yi-Ting YuWei-Zheng YuanDa-Yong Qiao Technical Paper 08 April 2009 Pages: 853 - 858
Micromanipulation system using scanning electron microscope Y. NakazatoT. YuasaM. Murakawa Technical Paper 26 March 2009 Pages: 859 - 864
A PZT-driven atomizer based on a vibrating flexible membrane and a micro-machined trumpet-shaped nozzle array Yeau-Ren JengChien-Chan SuGhin-Pin Chien Technical Paper 12 April 2009 Pages: 865 - 873
Grain size control of (111) polycrystalline 3C-SiC films by doping used as folded-beam MEMS resonators for energy dissipation Wen-Teng ChangChristian Zorman Technical Paper 07 April 2009 Pages: 875 - 880
Dual confocal laser-induced fluorescence/moveable contactless conductivity detector for capillary electrophoresis microchip Feng ShenYong YuQi Kang Technical Paper 16 April 2009 Pages: 881 - 885
Molding technology for improvement on dimensional accuracy in micro metal injection molding Kenji OkuboShigeo TanakaHiroshi Ito Technical Paper 26 April 2009 Pages: 887 - 892
Parametric model order reduction for squeeze film damping in perforated microstructures Honglong ChangYafei ZhangWeizheng Yuan Technical Paper 05 April 2009 Pages: 893 - 898
A new developed method assisting mass transfer of Ni ions in via L. M. Wang Technical Paper 29 April 2009 Pages: 899 - 906
Design and analysis of the film assembly of thermo-optic infrared focal plane arrays Xu YanFei FengYuelin Wang Technical Paper 27 March 2009 Pages: 907 - 911
Visualizing analysis for weld line forming in micro injection molding by experimental method Lei XieGerhard Ziegmann Technical Paper 14 April 2009 Pages: 913 - 917
Passive microfluidic gas valves using capillary pressure Duckjong KimY. W. HwangS.-J. Park Technical Paper 29 March 2009 Pages: 919 - 923
Influence of environmental temperature on the dynamic properties of a die attached MEMS device Jing SongQing-An HuangJie-Ying Tang Technical Paper 25 March 2009 Pages: 925 - 932
Fabrication of bio-microelectrodes for deep-brain stimulation using microfabrication and electroplating process Ge QinYaxiong LiuRukun Du Technical Paper 01 April 2009 Pages: 933 - 939
A micro electromagnetic low level vibration energy harvester based on MEMS technology Peihong WangKatsuhiko TanakaJingquan Liu Technical Paper 12 April 2009 Pages: 941 - 951
Slip model for the ultra-thin gas-lubricated slider bearings of an electrostatic micromotor in MEMS Wen-Ming ZhangGuang MengJie-Yu Chen Technical Paper 31 March 2009 Pages: 953 - 961