Novel H-beam electrothermal actuators with capability of generating bi-directional static displacement Chengkuo Lee Technical Paper 21 February 2006 Pages: 717 - 722
The design and simulation of a novel out-of-plane micro electrostatic actuator Chingfu Tsou Technical paper 11 February 2006 Pages: 723 - 729
Rapid hot embossing of polymer microfeatures Thomas E. KimerlingWeidan LiuDonggang Yao Technical paper 07 February 2006 Pages: 730 - 735
Identification of material and geometrical parameters for microstructures by dynamic finite element model updating Kun-Nan ChenWei-Hsin GauYuh-Chung Hu Technical paper 28 February 2006 Pages: 736 - 745
Microfabricated fluorescence-activated cell sorter through hydrodynamic flow manipulation Hyunwoo BangChanil ChungJun Keun Chang Technical paper 10 January 2006 Pages: 746 - 753
A roller embossing process for rapid fabrication of microlens arrays on glass substrates C. Y. ChangS. Y. YangJ. L. Sheh Technical Paper 21 February 2006 Pages: 754 - 759
Microchannel heat sink fabrication with roughened bottom walls H. YangF. LeeR. Chein Technical Paper 31 March 2006 Pages: 760 - 765
A micromachined tunable resonator fabricated by the CMOS post-process of etching silicon dioxide Ching-Liang DaiWei-Chiang Yu Technical paper 10 January 2006 Pages: 766 - 772
Microcasting of Al bronze and a gold base alloy improved by plaster-bonded investment G. BaumeisterS. RathJ. Hausselt Technical paper 21 February 2006 Pages: 773 - 777
Metallic micro displacement capacitive sensor fabricated by laser micromachining technology Yongjun LaiEvgueni V. BordatchevSuwas K. Nikumb Technical Paper 04 April 2006 Pages: 778 - 785
A novel method to fabricate complex three-dimensional microstructures Jing-Quan LiuHong-Wen SunDi Chen Technical paper 07 February 2006 Pages: 786 - 789
Micro structuring of borosilicate glass by high-temperature micro-forming Andreas SchubertJan EdelmannThomas Burkhardt Technical paper 10 January 2006 Pages: 790 - 795
Modeling and verification of the double frequency effect using a MEMS device J. C. ChiouY. J. Lin Technical Paper 12 May 2006 Pages: 796 - 802