Multi-height micro structures in poly(dimethyl siloxane) lab-on-a-chip S. ChungJ. ParkJ. K. Chang OriginalPaper Pages: 81 - 88
Characterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrations W. Merlijn van SpengenR. PuersIngrid De Wolf OriginalPaper Pages: 89 - 96
Trench filling characteristics of low stress TEOS/ozone oxide deposited by PECVD and SACVD C. ChangT. AbeM. Esashi OriginalPaper Pages: 97 - 102
Effect of disk rotational speed on contamination particles generated in a hard disk drive D. Y. LeeJ. HwangG. N. Bae OriginalPaper Pages: 103 - 108
Tribocharge build-up and decay at a slider-disk interface H.S. ParkJ. HwangS.H. Choa OriginalPaper Pages: 109 - 114
Dynamics simulation of MEMS device embedded hard disk drive systems J. P. YangJ. ChaiY. Lu OriginalPaper Pages: 115 - 120
A novel design and microfabrication for a micro PEMFC S.-S. HsiehJ.-K. KuoH.-H. Tsai OriginalPaper Pages: 121 - 126
Flexible tooling for localized electrochemical deposition with wire-electrodischarge grinding J. H. ChooS. H. YeoF. F. Tan OriginalPaper Pages: 127 - 136
Piezoelectric thin films formed by MOD on cantilever beams for micro sensors and actuators T. CuiD. MarkusD. L. Polla OriginalPaper Pages: 137 - 141
Design and fabrication of high sensitive microphone diaphragm using deep corrugation technique W. J. WangR. M. LinY. Ren OriginalPaper Pages: 142 - 146
Development of a micro-opto-mechanical accelerometer based on intensity modulation S. J. LeeD.-W. Cho OriginalPaper Pages: 147 - 154
Optical switch with auto-aligning fibers and latching micro-mirrors H. YangC.-T. PanS.-C. Shen OriginalPaper Pages: 155 - 160