1. Preface: Harmst2003

   • Jill Hruby

   OriginalPaper Pages: 681 - 681

2. Microfabrication by hot embossing and injection molding at LASTI

   • H. Mekaru
   • T. Yamada
   • T. Hattori

   OriginalPaper Pages: 682 - 688

3. Metallic microgripper with SU-8 adaptor as end-effectors for heterogeneous micro/nano assembly applications

   • K. Kim
   • E. Nilsen
   • J.-B. Lee

   OriginalPaper Pages: 689 - 693

4. Using megasonic development of SU-8 to yield ultra-high aspect ratio microstructures with UV lithography

   • J. D. Williams
   • W. Wang

   OriginalPaper Pages: 694 - 698

5. Microfabrication of an electromagnetic power relay using SU-8 based UV-LIGA technology

   • J. D. Williams
   • W. Wang

   OriginalPaper Pages: 699 - 705

6. Incorporating design rules into the LIGA technology applied to a fourier transformation spectrometer

   • C. Solf
   • A. Janssen
   • U. Wallrabe

   OriginalPaper Pages: 706 - 710

7. Hybrid replication development for construction of polymeric devices

   • C. Khan Malek
   • G. Thuillier
   • P. Blind

   OriginalPaper Pages: 711 - 715

8. Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers

   • V. Nazmov
   • E. Reznikova
   • V. Saile

   OriginalPaper Pages: 716 - 721

9. Preliminary results of fracture mechanics analysis on the quality of LIGA sidewalls

   • M. S. Guimarães
   • P. Meyer
   • J. Schulz

   OriginalPaper Pages: 722 - 727

10. Improvements in graphite-based X-ray mask fabrication for ultradeep X-ray lithography

    • R. Divan
    • D.C. Mancini
    • D. Van der Weide

    OriginalPaper Pages: 728 - 734