Volume 21, Issue 9

Search all Microsystem Technologies articles

September 2015

Special issue on design, test, integration and packaging of EMS/MOEMS, 2013

Issue Editors:

Bernard Courtois,
Bernd Michel

26 articles in this issue

Special issue on design, test, integration and packaging of EMS/MOEMS, 2013
Bernard Courtois
Bernd Michel
Editorial 14 July 2015 Pages: 1811 - 1811
Miniaturization of package for an implantable heart monitoring device
Anh-Tuan T. Nguyen
Fjodors Tjulkins
Kristin Imenes
Technical Paper 23 May 2014 Pages: 1813 - 1826
The effect of sensing area position on the mechanical response of mass-detecting cantilever sensor
Marius Pustan
Cristian Dudescu
Corina Birleanu
Technical Paper 28 April 2015 Pages: 1827 - 1834
Suspended integration of pyrolytic carbon membrane on C-MEMS
Shuang Xi
Tielin Shi
Zirong Tang
Technical Paper 22 July 2014 Pages: 1835 - 1841
A novel fabrication method of micro-needle mold by using the micro-lens mask through contact printing
Tsung-Hung Lin
Ching-Kong Chao
Shih-Yu Hung
Technical Paper 30 October 2014 Pages: 1843 - 1848
Synthesis of Sn nanoparticles and their size effect on the melting point
Yang Ju
Takafumi Tasaka
Tomoki Nakagawa
Technical Paper 21 December 2014 Pages: 1849 - 1854
Diagnosis of parametric defects in dual axis IC accelerometers
Álvaro Gómez-Pau
Luz Balado
Joan Figueras
Technical Paper 22 May 2014 Pages: 1855 - 1866
A new monolithic 3-axis thermal convective accelerometer: principle, design, fabrication and characterization
H. B. Nguyen
F. Mailly
P. Nouet
Technical Paper 30 July 2014 Pages: 1867 - 1877
Modeling of chemical mechanical polishing processes by cellular automata and finite element/matlab integration methods
Kuo-Shen Chen
Shang-Lun Wu
Hsiu-Ming Yeh
Technical Paper 13 August 2014 Pages: 1879 - 1892
Using proximity exposure to produce asymmetrical lens for light control films
Tung-Yu Chang
Chien-Hsin Hung
Hsiharng Yang
Technical Paper 19 August 2014 Pages: 1893 - 1901
Reliability of RF MEMS capacitive and ohmic switches for space redundancy configurations
Andrea Lucibello
Romolo Marcelli
Benno Margesin
Technical Paper 19 March 2014 Pages: 1903 - 1913
Multi-frequency CMOS oscillator based on CMOS MEMS SAW resonator
Jamilah Karim
Ahmad Anwar Zainuddin
Anis Nurashikin Nordin
Technical Paper 16 July 2014 Pages: 1915 - 1922
Improving the sensitivity of piezoelectric excited millimeter-sized cantilevers in sensing applications
A. A. Kashi
M. Zamani
S. Asadi
Technical Paper 28 November 2014 Pages: 1923 - 1929
Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator
Aliza Aini Md Ralib
Anis Nurashikin Nordin
Raihan Othman
Technical Paper 19 September 2014 Pages: 1931 - 1940
RF-MEMS packaging by using quartz caps and epoxy polymers
Flavio Giacomozzi
Viviana Mulloni
Stefano Girardi
Technical Paper 12 July 2014 Pages: 1941 - 1948
Polysilicon thin film piezoresistive pressure microsensor: design, fabrication and characterization
S. Santosh Kumar
B. D. Pant
Technical Paper 12 September 2014 Pages: 1949 - 1958
A novel approach for MEMS with galvanic protection on SOI wafer
Wenshan Wei
Weilong You
Heng Yang
Technical Paper 02 September 2014 Pages: 1959 - 1965
Micro-channel diffusion characteristics of an implantable drug delivery device for age-related macular degeneration
Ramana M. Pidaparti
Jae-Hwan Lee
Hu Yang
Technical Paper 24 August 2014 Pages: 1967 - 1974
Design and implementation of novel thin film position-sensitive detectors (TFPSDs) based on photoconductive effect
Yan-qing Zhu
Yuan-yuan Shan
Ming Qin
Technical Paper 12 October 2014 Pages: 1975 - 1986
Influence of grains and surface roughness in boron and phosphorus implanted LPCVD polycrystalline silicon thin film
Kulwant Singh
Sanjeev Kumar
Jamil Akhtar
Technical Paper 29 July 2014 Pages: 1987 - 1994
Study on the giant magnetoimpedance effect in micro-patterned Co-based amorphous ribbons with single strip structure and tortuous shape
Zhen Yang
Chong Lei
Xue-cheng Sun
Technical Paper 21 October 2014 Pages: 1995 - 2001
Fabrication and characterization of bionic amphiphobic functional surface on X70 pipeline steel
Hao Li
Sirong Yu
Yan Zhao
Technical Paper 25 September 2014 Pages: 2003 - 2010
Fabrication and characterization of highly sensitive ZnO/Si SAW device with Pd selective layer for F₂ gas sensing
Saleem Khan
Sandeep Arya
Parveen Lehana
Technical Paper 07 August 2014 Pages: 2011 - 2017
A silicon microring resonator with a nanolatch mechanism
Syotaro Abe
Kazuhiro Hane
Technical Paper 10 August 2014 Pages: 2019 - 2024
Fabrication of novel MEMS inertial switch with six layers on a metal substrate
Liqun Du
Ming Zhao
Weirong Nie
Technical Paper 18 September 2014 Pages: 2025 - 2032
Designing of infrared detector based on the bi-material micro-cantilever and its manufacturing process research
Changlong Cai
Weiguo Liu
Technical Paper 08 August 2014 Pages: 2033 - 2038

Volume 21, Issue 9

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