1. A simple micro-mixer prototyped in polycarbonate

   • Stephen Wan
   • Xu Diao
   • Ng Teng Yong

   OriginalPaper Pages: 75 - 79

2. Casimir effect on the pull-in parameters of nanometer switches

   • W.-H. Lin
   • Y.-P. Zhao

   OriginalPaper Pages: 80 - 85

3. High temperature resistant antireflective moth-eye structures for infrared radiation sensors

   • T. Glaser
   • A. Ihring
   • V. Baier

   OriginalPaper Pages: 86 - 90

4. Electrical detection of DNA hybridization with multilayer gold nanoparticles between nanogap electrodes

   • C.-Y. Tsai
   • Y.-H. Tsai
   • P.-H. Chen

   OriginalPaper Pages: 91 - 96

5. Two-dimensional stress measurement of a micromachined piezoresistive structure with micro-Raman spectroscopy

   • J. Qian
   • T.-X. Yu
   • Y.-P. Zhao

   OriginalPaper Pages: 97 - 103

6. Tuning the quality factor of bulk micromachined structures using squeezed-film damping

   • C.-C. Cheng
   • W. Fang

   OriginalPaper Pages: 104 - 110

7. A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure

   • Y. Chen
   • J. Jiao
   • Y. Wang

   OriginalPaper Pages: 111 - 116

8. A new pre-etching pattern to determine 〈110〉 crystallographic orientation on both (100) and (110) silicon wafers

   • W.-H. Chang
   • Y.-C. Huang

   OriginalPaper Pages: 117 - 128

9. Silicon MEMS components: a fatigue life assessment approach

   • A. Varvani-Farahani

   OriginalPaper Pages: 129 - 134

10. The evaporated metal masks for chemical glass etching for BioMEMS

    • Y. Mourzina
    • A. Steffen
    • A. Offenhäusser

    OriginalPaper Pages: 135 - 140

11. Bulk micromachining fabrication platform using the integration of DRIE and wet anisotropic etching

    • Huai-Yuan Chu
    • Weileun Fang

    OriginalPaper Pages: 141 - 150

12. A novel method for determining Young’s modulus of thin films by micro-strain gauges

    • Chi Hsiang Pan

    OriginalPaper Pages: 151 - 157

13. Laser scanning path generation considering photopolymer solidification in micro-stereolithography

    • Y. H. Cho
    • I. H. Lee
    • D.-W. Cho

    OriginalPaper Pages: 158 - 167

14. 3D Optical microstructure fabrication and its bonding to micro IR detector using elastomeric polymer

    • Jong-Yeon Park
    • Kun-Tae Kim
    • James Jungho Pak

    OriginalPaper Pages: 168 - 178

15. Metallic microstructures by electroforming from conducting polymer templates

    • N. Holstein
    • G. Schanz
    • R. Ruprecht

    OriginalPaper Pages: 179 - 185

16. Laser beam soldering – a new assembly technology for microoptical systems

    • H. Banse
    • E. Beckert
    • J. Vogel

    OriginalPaper Pages: 186 - 193

17. Investigations of the capillary effect for gripping silicon chips

    • H. Grutzeck

    OriginalPaper Pages: 194 - 203

18. A self-aligned fabrication method of dual comb drive using multilayers SOI process for optical MEMS applications

    • W. T. Lin
    • J. C. Chiou
    • C. Tsou

    OriginalPaper Pages: 204 - 209

19. Injection molding of 3D microstructures by μPIM

    • B.Y. Tay
    • L. Liu
    • R. Maeda

    OriginalPaper Pages: 210 - 213

20. A robust and reliable stress-induced self-assembly supporting mechanism for optical devices

    • Y.-P. Ho
    • M. Wu
    • W. Fang

    OriginalPaper Pages: 214 - 220

21. Overcoming SU-8 stiction in high aspect ratio structures

    • A. G. Peele
    • B. Y. Shew
    • H. C. Li

    OriginalPaper Pages: 221 - 224